NANO
Technology
Forty years ago, there was a need by both the scientific
community and the military/aerospace companies for a manual
adjusting mechanism to align and position test equipment
with extremely high resolution over a large linear or
angular range. This mechanism also had to have excellent
long-term stability. Aerotech filled that need with a
novel product – the patented Course and Fine
Adjustment and Positioning Mechanism (US Pat. No. 3,727,471).
This large range and high resolution device was well-accepted
and used by all the leading research facilities. By incorporating
this device, Aerotech developed products with a linear
resolution of 25 nanometers over 50 millimeters of travel,
and sub-arc-second angular resolution over a large angular
range. They are still being used today.
In the ensuing years, positioning and aligning requirements
continued to grow, demanding ever higher performance in
accuracy, speed, and resolution. Aerotech responded with
novel, state-of-the-art technologies resulting in products
with up to 1.5 meters travel, submicron accuracy, and
nanometer resolution. These products broke productivity
barriers by combining high speed and precision positioning
for maximized throughput.
Now the need arises again to create equipment that enables
us to measure, manipulate, affect, and view sub-nanometer
structures over a large area. To achieve this goal, Aerotech
has, once again, advanced the state-of-the-art in high
precision motion control.
Check back often as we continue to expand this revolutionary
line of positioning stages. |
Positioning - Linear |
| ANT95-L
NanoTranslation Cross-Roller Stage |
ANT95-XY
NanoTranslation, Two Axis, Cross-Roller Stage |
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Aerotech’s
NanoTranslation (ANT95-L, ANT95-L-H) crossed-roller stages
combine speed, accuracy, resolution, repeatability, reliability,
and compact size, and are offered in two accuracy grades.
As an evolution of the popular ANT stage family, these linear
stages exhibit enhanced motion performance over Aerotech’s
first generation ANT series. Product improvements such as
5 g acceleration, 500 mm/s velocity, enhanced load capacity,
and standardized, universal base mounting patterns allow
the use of this flexible stage family in an even wider range
of configurations than its predecessors.
Click
here for
complete product information. |
The
Aerotech NanoTranslation (ANT) crossed-roller-bearing, linear
motor, dual-axis stage is the newest release and continues
the evolution of the ANT series of stages. The ANT95-XY
and ANT95-XY-H are three-piece designs that allow travel
in two dimensions (X and Y). The sleek design provides an
extremely low profile of only 60 mm. The stage comes with
proprietary direct-drive motor technology, noncontact linear
encoders, limits, integrated cable management system, and
two grades of accuracy.
Click
here for
complete product information. |
5 nm Best-In-Class
Resolution
Minimum incremental
motion for ANT95-L |
5 nm Best-In-Class
Resolution
Minimum incremental
motion for ANT95-XY |
| Max
Travel |
25
or 50 mm |
| Accuracy |
±250
nanometers |
| Speed |
500
mm/s |
| Load |
7.0
kg |
|
| Max
Travel |
25
x 25 or 50 x 50 mm |
| Accuracy |
±250
nanometers |
| Speed |
500
mm/s |
| Load |
6.0
kg |
|
| ANT130-L
Mechanical Bearing, Linear Motor Stage |
ANT-130XY NanoTranslation, Two Axis,
Cross-Roller Bearing Linear Stage |
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 |
The ANT130-L series stages offer best-in-class performance in speed, accuracy, resolution, repeatability, reliability, travel range, and are offered in two accuracy grades. With its low profile and outstanding performance characteristics, the ANT130-L is the ultimate solution for high-accuracy alignment, inspection, positioning, and measurement stations.
Click
here for
complete product information.
|
The ANT130-XY crossed-roller-bearing, linear motor, dual-axis stage continues the evolution of the ANT series of stages. The ANT130-XY and ANT130-XY-H are three-piece designs that allow travel in two dimensions (X and Y). The sleek design provides an extremely low profile of only 85 mm in travel options including 60 x 60 mm, 110 x 110 mm, and 160 x 160 mm.
Click
here for
complete product information.
|
5
nm Best-In-Class Resolution
Minimum incremental motion
for ANT130-L |
1
nm Best-In-Class Resolution
 |
| Max
Travel |
25,
50, 100, 150 mm |
| Accuracy |
±250
nanometers |
| Speed |
350
mm/s |
| Load |
12.0
kg |
|
| Max
Travel |
60, 110, 160 mm |
| Accuracy |
±250 nanometers |
| Speed |
350 mm/s |
| Load |
12
kg |
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