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| ABL1000
Air Bearing Stage |
ABL1500
Linear Motor Stage |
ABL1500-B
Air Bearing Stage |
The
ABL 1000 series stages are the highest performance miniature
air-bearing stages available. Aerotech has combined over 30
years of precision motion control and positioning system experience
with the latest technologies to produce a truly outstanding
miniature, linear air-bearing stage.
Click
here for
complete product information. |
The ABL1500, with its fully active preload, exceptionally
high stiffness, and excellent geometric characteristics was
designed specifically to meet those demands.
Click
here for
complete product information. |
The ABL1500-B continues the exceptional performance of the ABL1500, but uses an integral bellows system to provide
a high level of environmental protection. This system
protects the air bearings and drive system from process-generated
contamination like abrasive debris.
Click
here for
complete product information. |
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Travel |
≤500
mm |
Accuracy |
±0.3
µm |
Repeatability |
±0.15
µm |
Straightness |
±0.25
µm |
Flatness |
±0.25
µm |
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| ABL1500WB
Air Bearing Stage |
ABL1500WB-B
Air Bearing Stage |
ABL2000
Air Bearing Stage |
The ABL1500WB is a wide-base version of the ABL1500
series air-bearing stage. The wider base makes the
ABL1500WB ideally suited for applications with large
offset loads, and it is ideal as the lower axis in XY stage
systems with large travel. The ABL1500WB incorporates
dual linear motors, effectively doubling the force output of
a standard ABL1500 stage.
Click
here for
complete product information. |
The ABL1500WB-B is a wide-base, environmentally
protected version of the ABL1500 series air-bearing stage.
The wider base makes the ABL1500WB-B ideally suited
for applications with large offset loads, and it is ideal as the
lower axis in XY stage systems with large travel. The
ABL1500WB-B incorporates dual linear motors,
effectively doubling the force output of a standard
ABL1500 stage.
Click
here for
complete product information. |
The ABL 2000 combines excellent pitch/yaw characteristics
with unsurpassed velocity control that is necessary for wafer
imaging, defect detection and coating applications.
Click
here for
complete product information. |
Travel |
≤500
mm |
Accuracy |
±0.4
µm |
Repeatability |
±0.1
µm |
Straightness |
±0.5
µm |
Flatness |
±0.5
µm |
|
Travel |
≤500
mm |
Accuracy |
±0.5
µm |
Repeatability |
±0.25
µm |
Straightness |
±0.5
µm |
Flatness |
±0.5
µm |
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| ABL3600
Air Bearing Stage |
ABL8000
Air Bearing Stage |
ABL9000
Air Bearing Stage |
The
ABL3600 dual-axis, large aperture, open-frame, airbearing
stage addresses the unique needs of scanning microscopy and
mask and wafer inspection.
Click
here for
complete product information. |
The ABL8000 incorporates a modified cross section design that
dramatically increases stiffness and stability. This is useful
for large payloads whose C.G.’s are off of the carriage
centerline.
Click
here for
complete product information. |
The ABL9000 is simply the world’s highest performance
air bearing. Designed to meet the exacting requirements of
wafer, flat panel display, and optical inspection and fabrication,
the ABL9000 sets new standards of performance.
Click
here for
complete product information. |
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| AHL9000
Linear Motor Stage |
ABG10000
Air Bearing Gantry |
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The AHL9000 linear motor stage combines air bearings for the
scan axis and mechanical bearings for the step axis, and has
been designed for demanding applications that require excellent
step and scan performance.
Click
here for
complete product information. |
The ABG10000 Air Bearing Gantry puts Aerotech’s core
technologies and extensive manufacturing capability to work
for you, providing outstanding performance and versatility
in a wide range of automation applications.
Click
here for
complete product information. |
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