Home >> Air Bearing Stages Quick Select Guide

Aerotech’s air bearing tables are driven by our brushless linear servo motors incorporating over three decades of knowledge designing high precision motion control and positioning systems. Our air bearing stages integrate an active preload on both vertical and horizontal surfaces and an opposing thin-film pressure maintains the bearing nominal gap tolerance. This air bearing stage design, in addition to the large air bearing surface that distributes the load over a large surface area, results in outstanding stiffness that is perfect for heavy or offset loading. Our air bearing stages and tables our ideal in semiconductor equipment, fibre optics, photonics, and other critical industrial automation applications. Our air bearings have unsurpassed geometrical characteristics due to proprietary manufacturing techniques. The air bearings have an inherent averaging effect that maxmizes performance and the thin film fills small surface voids and other irregularities, yielding superior pitch, roll, yaw, and straightness and flatness specifications.

 Linear Air-Bearing Stages

ABL1000 Air Bearing Stage	ABL1500 Linear Motor Stage	ABL2000 Air Bearing Stage
The ABL 1000 series stages are the highest performance miniature air-bearing stages available. Aerotech has combined over 30 years of precision motion control and positioning system experience with the latest technologies to produce a truly outstanding miniature, linear air-bearing stage. Click here for complete product information.	The ABL1500, with its fully active preload, exceptionally high stiffness, and excellent geometric characteristics was designed specifically to meet those demands. Click here for complete product information.	The ABL 2000 combines excellent pitch/yaw characteristics with unsurpassed velocity control that is necessary for wafer imaging, defect detection and coating applications. Click here for complete product information.
Travel ≤150 mm Accuracy ±0.20 µm Repeatability ±0.05 µm Straightness ±0.25 µm Flatness ±0.25 µm	Travel ≤500 mm Accuracy ±0.2 µm Repeatability ±0.1 µm Straightness ±0.25 µm Flatness ±0.25 µm	Travel ≤1200 mm Accuracy ±0.50 µm Repeatability ±0.20 µm Straightness ±0.25 µm Flatness ±0.25 µm
ABL3600 Air Bearing Stage	ABL8000 Air Bearing Stage	ABL9000 Air Bearing Stage
The ABL3600 dual-axis, large aperture, open-frame, airbearing stage addresses the unique needs of scanning microscopy and mask and wafer inspection. Click here for complete product information.	The ABL8000 incorporates a modified cross section design that dramatically increases stiffness and stability. This is useful for large payloads whose C.G.’s are off of the carriage centerline. Click here for complete product information.	The ABL9000 is simply the world’s highest performance air bearing. Designed to meet the exacting requirements of wafer, flat panel display, and optical inspection and fabrication, the ABL9000 sets new standards of performance. Click here for complete product information.
Travel ≤250 mm Accuracy ±1 µm Repeatability ±0.2 µm Straightness ±0.5 µm Flatness ±1 µm	Travel ≤1000 mm Accuracy ±0.50 µm Repeatability ±0.20 µm Straightness ±0.40µm Flatness ±0.40µm	Travel ≤1200 mm Accuracy ±0.5 µm Repeatability ±0.1 µm Straightness ±0.50µm Flatness ±0.50µm
AHL9000 Linear Motor Stage	ABG10000 Air Bearing Gantry
The AHL9000 linear motor stage combines air bearings for the scan axis and mechanical bearings for the step axis, and has been designed for demanding applications that require excellent step and scan performance. Click here for complete product information.	The ABG10000 Air Bearing Gantry puts Aerotech’s core technologies and extensive manufacturing capability to work for you, providing outstanding performance and versatility in a wide range of automation applications. Click here for complete product information.
Travel ≤350 mm Accuracy ± 1.0 µm Repeatability ±0.2 µm Straightness ±0.6 µm Flatness ±0.6 µm	Travel ≤1000 mm Accuracy ± 2 µm Repeatability ±0.5 µm Straightness ±1 µm Flatness ±1 µm

Rotary Air-Bearing Stages

ABRS Rotary Air Bearing Stage	ABRT Rotary Air Bearing Stage
Aerotech’s ABRS series rotary air-bearing stages provide superior angular positioning, velocity stability, and error motion performance in an exceptionally low-profile package. Click here for complete product information.	Aerotech's ABRT series rotary air-bearing stages provide superior angular positioning, velocity stability, and error motion performance along with impressive payload capacity and outstanding radial and axial stiffness. Click here for complete product information.
Tabletop Diameter 128.1-278.1 mm Resolution 0.18-0.036 arc sec Bidirectional Repeatability <1 arc sec	Tabletop Diameter 100-200 mm Resolution 0.055-0.027 arc sec Bidirectional Repeatability <1 arc sec