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 |
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| MaskAlign
100 |
WaferMax
T |
WaferMax
Z |
Aerotech’s MaskAlign 100 is a high-performance photomask-aligning
system designed to meet the exacting requirements of advanced
semiconductor and flat panel writing systems.
Click
here for complete product information. |
Aerotech’s
Wafermax T rotary stage is an excellent choice for applications
that require high performance in a low-height package. Originally
designed for the demands of precision wafer inspection, the
Wafermax T stack-up benefits have been applied to a multitude
of applications. A standard 25 mm aperture allows for easy
pass-through of vacuum lines where limited rotation is required.
Click
here for
complete product information. |
The WaferMax Z represents a significant breakthrough in vertical
alignment of high-precision components in one compact package.
Its superior noncontact linear motor drive employs a high-accuracy
encoder for direct position feedback.
Click
here for
complete product information. |
Travel |
100
mm |
Accuracy |
1
micron |
Load |
2
kg |
|
Diameter |
106.7
mm |
Accuracy |
±5
arc sec |
Load |
40
kg |
|
Travel |
5
mm |
Velocity |
4
mm/s |
Load |
10
kg |
|
 |
 |
 |
| AVL1000
Verticle Lift Stage |
ARA1000
Rotary Actuator |
Wafer Chucks |
The
AVL1000 utilizes a wedge design mounted on high stiffness
bearings to achieve high lateral and rotational rigidity.
All elements of the AVL1000 were selected to operate in a
24/7 industrial environment and, unlike screw- or piezo-based
vertical stages, the AVL1000 requires no maintenance and will
ensure years of trouble-free operation.
Click
here for
complete product information. |
The
ARA1000 rotary actuator was designed for applications requiring
articulation for large payloads. It eliminates the mechanical
instability of high load inertia, multi-axis systems through
a proprietary design that significantly increases stage stiffness.
Click
here for
complete product information. |
To simplify system
development and reduce costs, Aerotech manufactures and integrates
high precision, custom engineered chucks. Custom designs include
chucks for 200 and 300 mm silicon wafers, as well as other
substrates such as reticles and flat-panel displays.
Click
here for
complete product information. |
Travel |
2
mm |
Velocity |
5
mm/s |
Load |
50
kg |
|
Diameter |
342.9
mm |
Accuracy |
±2
arc sec |
Load |
45
kg |
|
|
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