 |
 |
 |
| ATS50
Linear Stage |
ATS100
Linear Stage |
ATS115 Linear Stage |
The ATS50 linear stage offers superior positioning performance
in a very compact, low profile unit. They are companion stages
to the ART50 and ART100 series rotary stages and are ideal
for space-critical applications such as optical trains and
vacuum operation.
Click
here for complete product information. |
The
ATS100 linear stage provides the high resolution and repeatability
required for semiconductor wafer testing and fabrication,
automated microscope inspection systems, and precision micromachining
applications.
Click
here for complete product information. |
The
ATS115 linear stage is Aerotech’s smallest hard cover,
side-sealed stage design. Competitive pricing coupled with
Aerotech’s reputation for producing high-quality linear
motion devices make the ATS115 an attractive stage for medium-performance
applications.
Click
here for complete product information. |
Travel |
50
mm |
Accuracy |
±2.5µm/25mm |
Load |
5.0
kg |
|
Travel |
200
mm |
Accuracy |
±0.5
µm |
Load |
25.0
kg |
|
Travel |
600
mm |
Accuracy |
±6
µm |
Load |
40.0
kg |
|
 |
 |
 |
| ATS150
Linear Stage |
ATS165
Linear Stage |
ATS0300
Linear Stage |
The
ATS150 linear stage provides the high resolution and repeatability
required for semiconductor wafer testing and fabrication,
automated microscope inspection systems, and precision micromachining
applications.
Click
here for complete product information. |
The
ATS165 linear stage is a medium performance, entry-level design.
The ATS165 series is similar in design to the ATS115 series,
providing additional load carrying capability with larger
bearings and a wider cross-section.
Click
here for complete product information. |
The
ATS0300 linear stage provides an economical solution for applications
requiring fine positioning in a confined area.
Click
here for complete product information. |
Travel |
250
mm |
Accuracy |
±1.0
µm |
Load |
45
kg |
|
Travel |
600
mm |
Accuracy |
±6
µm |
Load |
45
kg |
|
Travel |
50
mm |
Accuracy |
±2.5µm/25mm |
Load |
25.0
kg |
|
 |
 |
 |
| ATS1000
Linear Stage |
ATS1100-H
Linear Stage |
ATS1500
Linear Stage |
The
ATS1000 linear stage is a compact, high- performance stage
that is as accurate as it is versatile. It provides a small
cross section, medium payload capacity, environmentally protected,
cost-effective solution for precision applications.
Click
here for complete product information. |
A
rigid base and high-performance brushless servomotor make
the ATS1100-H linear stage the choice in applications such
as laser machining and medical component manufacturing.
Click
here for complete product information. |
The
ATS1500 linear stage provides a flexible, economical platform
that is an outstanding selection for use as a general purpose
positioner.
Click
here for complete product information. |
Travel |
600
mm |
Accuracy |
±1.0
µm |
Load |
50
kg |
|
Travel |
600
mm |
Accuracy |
±1.0
µm |
Load |
70
kg |
|
Travel |
300
mm |
Accuracy |
1.0
µm/25 mm |
Load |
135
kg |
|
 |
 |
 |
| ATS2000
Linear Stage |
ATS3600
Open-Frame Linear Stage |
ATS5000
Linear Stage |
The
ATS2000 linear stage is a compact, high- performance stage
with hard-coated table top and waycovers.
Click
here for complete product information. |
The
demand for a high accuracy, robust, open-frame stage is met
with the ATS3600. This dual-axis, large aperture, open-frame
stage addresses the unique needs of scanning microscopy, wafer
and printed circuit board inspection, and automated assembly.
Click
here for complete product information. |
The
ATS5000 linear stage was designed to meet the needs of the
most demanding applications. A rigid base, fully sealed metal
waycovers, and high- performance brushless servomotor make
the ATS5000 the stage of choice in industrial applications
such as laser machining, ceramic scribing, or any other application
requiring high accuracy in a production environment.
Click
here for complete product information. |
Travel |
300
mm |
Accuracy |
±1.0
µm |
Load |
80.0
kg |
|
Travel |
400
mm |
Accuracy |
±1.0
µm |
Load |
90
kg |
|
Travel |
1000
mm |
Accuracy |
±1.0
µm |
Load |
135
kg |
|
 |
 |
|
| ATS5000WB
Linear Stage |
ATS6200
Linear Stage |
|
By
increasing the overall width of the stage, the ATS5000WB linear
stage can handle heavy cantilever loads and still maintain
high accuracy.
Click
here for complete product information. |
The
ATS6200 linear stage offers precision-grade performance for
a commercial-grade price.
Click
here for complete product information. |
|
Travel |
1000
mm |
Accuracy |
±1.0
µm |
Load |
135
kg |
|
Travel |
1500
mm |
Accuracy |
1.0
µm/ 25 mm |
Load |
90
kg |
|
|
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