Engineered
Systems
Vacuum
Compatible Systems
Aerotech
has extensive experience in designing systems for deployment in vacuum environments.
Careful consideration of
material
selection and manufacturing procedures ensure delivery of systems with low outgassing
qualities and excellent
thermal
characteristics. Following are examples of a six-axis system with a two-axis
gimbal actuator used in an ion-beam
application.
Also shown is a vacuum prepared XY system. Both systems feature liquid-cooled
direct-drive linear motors
with
linear encoder feedback and direct-drive rotary axes for the highest level of
accuracy and repeatability.
•
Vented
hardware
Six-Axis
system with
•
Teflon®
cabling
a
two-axis gimbal
•
actuator
Vacuum
compatible lubricants
•
Optional
liquid-cooled linear motors
Vacuum
prepared
XY
system
Vacuum-Rated
Components and Systems
Vacuum
preparation of Aerotech positioning stages is available for most stage models.
Specific modifications are
required
before these stages can be operated in a vacuum. Aerotech certifies all stages,
stage hardware (i.e., mounting
or
10 torr. In addition, Aerotech can
brackets),
motors, feedback devices, and cables for vacuum operation to 10
-3
-6
supply
vacuum compatible motion control stages equipped with linear motors. A special
cooling technique has been
developed
to remove heat from a linear motor operating in a vacuum.
Aerotech’s
vacuum experience means you have a complete partner in your application design
— a partner with
engineers
who have worked on vacuum applications for over a quarter of a century!