Aerotech's MaskAlign 100 photomask alignment stages demonstrate how its specialist positioning and direct-drive linear motor technology has been put to use to maximise performance, increase accuracy and drive down the costs for this very demanding application. The low profile, three axis positioning system includes a standard interface for a six-inch mask and an integral vacuum groove for mask retention. By applying an integrated design solution Aerotech offer semiconductor, MEMS and flat panel display production equipment manufacturers a bolt-on, machine ready solution for photo mask based writing systems.
By integrating the three axis positioning stage into a compact design, the MaskAlign100 series offers an inherent advantage over traditional stacked systems - as the overall height is reduced, the effects of Abbe error are thus minimised, improving the overall positioning accuracy of the stage. Furthermore the integral design includes interfacing mechanics, connectors and the cable management system making installation very straightforward. A single bracket houses all electrical and pneumatic connectors in one location. The resulting performance of the stage and its competitive "low cost of ownership" price is an example of Aerotech's industry-driven solutions capability.
With the advantage of non contact direct-drive technology for all axes, the MaskAlign 100 series allows the robust, precise and high-speed positioning which is required for the mass production of precision devices. Aerotech's brushless "cog-free" linear motors offer numerous advantages over conventional motor and lead screw designs; they have high stiffness and extremely smooth velocity performance with superior positioning accuracy and bi-directional repeatability. Direct-drive technology also means that maximum speeds are higher and in combination with non contact high-resolution encoders, that in-position stability and slow speed smoothness are unparalleled. The non-contact nature of the drive system removes any tendency for unwanted mechanical forces acting on the linear bearing system such as with ball screw radial misalignment. The resulting straightness and flatness of travel is thus optimised. The rotary (theta) axis benefits from a unique "curvilinear" direct drive motor based on the same high performance Aerotech design used in the linear axes. As only a proportion of full travel is required for mask alignment, this further reduces the cost as compared to a full 360 degree rotation direct drive motor.
Whilst customised versions are available, the standard range comprises of 100mm travel in X and Y and +/- 10 degrees of rotary motion. The open frame construction allows a 120 mm square aperture at mid travel with a full 70mm square aperture at the extremes of its X and Y travel range. With linear resolution to 10 nm and rotary resolution to 0.017 arc-sec, the MaskAlign 100 stage boasts a calibrated linear positioning accuracy of 1 µm and +/-1.5 arc-sec rotary accuracy. Straightness, flatness, pitch, yaw, roll and stage orthogonality values are all equally impressive.
Aerotech manufactures a wide range of complimentary servo amplifiers and advanced motion controllers to provide a complete integrated solution for mask alignment. The award winning A3200 Digital Automation Platform and associated servo drive hardware provides a breakthrough in software based machine control and combines motion, HMI, PLC and vision control modules with an industry standard Firewire® high performance communication network used to control up to 32 axes of high speed motion; additionally a 10/100 Base T Ethernet interface may be used to add third party I/O and PLC's.
Typical systems are supplied complete with motor power and encoder cables and all performance and calibration related documents plus a CD with full interconnection drawings to help integrators with their own system documentation. In addition, all motor parameter set-up data for system configuration is included making commissioning straightforward. These features are standard for every Aerotech product and with full product training and comprehensive on-line technical support, the true cost of ownership is extremely competitive.
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