| The
ALS130, with its low profile and outstanding performance
characteristics, is the ultimate solution for high-accuracy
alignment and inspection stations. Unlike many stages that utilize a
side-drive lead screw, the
ALS130 employs a center-driven, non-cogging linear motor as the driving
element. Since the linear motor
is a direct-drive device there is no backlash, windup, or "stiction"
normally associated with a lead screw
or ball-screw drive.
For alignment applications, outstanding
step-to-step resolution is critical. The ALS130 meets this demand
with a resolution of 20 nm
when coupled with an MXH series multiplier box. The direct-drive linear
motor allows
the ALS130 to make precise, repeatable steps. This is particularly
important in alignment applications
where step accuracy is critical.
Aerotechs ultra-stiff construction and
compact two-piece design result in a stage with unmatched geometrical
tolerances. As a result, straightness and flatness of the standard stage
are < ± 2 µm over the entire
travel. Optional HAL calibration improves that to ±1µm. As a result,
the effects of Abbe error are nearly
eliminated, vastly improving overall system accuracy.
ALS130 series stages are available with
precision cross-roller or linear motion guide bearing systems.
Cross-roller bearing models
feature outstanding smoothness and vibration-free motion since neither
the bearing
system nor the linear motor utilizes any recirculating elements.
Cross-roller bearing ALS130 models
exhibit the outstanding ripple-free motion required for scanning,
inspection, and fiber-optic applications.
For applications where higher duty cycle or larger loads must be
accommodated, the linear motion
guide bearing option is well suited.
The linear motor drive also offers the
advantage of higher speeds and accelerations. Top speed of the
ALS130 is 500 mm/s, which is
significantly faster than comparable ball-screw-driven stages. With a
peak unloaded
acceleration of 1g, throughput is not an issue for this precision
device.
Like all stages in the Aerotech product
family, the ALS130 was designed for outstanding long-term performance.
Since both the linear motor and linear encoder are noncontact devices,
they not only exhibit long-life,
but also are maintenance free. A moving magnet track design eliminates
the need for cable management,
further improving long-term reliability.
ALS130 series stages are easily
configured as XY assemblies. Options include high accuracy calibration
at work height and precision
orthogonality alignment to 5 arc seconds. Aerotech offers theta, roll,
tip-tilt, and
piezoelectric solutions to complement the ALS130. Please consult the
factory for more information.
For more information, please contact
Aerotech, Inc., 101 Zeta Drive, Pittsburgh, PA 15238, Phone:
412-963-7470, Fax: 412-963-7459, e-mail: sales@aerotechinc.com.
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