Aerotech's ABS series direct-drive,
air-bearing spindles were designed to provide superior angular positioning and
velocity control for applications including disk drive testing, imaging applications,
and precision wafer inspection.
Superior Mechanical
Design
The ABS2000 is balanced to ISO 1940 G 0.4 tolerances. The design also uses labyrinth-type
sealing to minimize particle migration from the spindle, resulting in certification
for Class 1 clean-room operation. An integral rotary union is provided for a
vacuum supply.
Low Loss, Non-Influencing
Direct-Drive Motor
Aerotech's custom designed, low-loss motor produces >0.25 N-m (38 oz-in)
of continuous torque with negligible motor losses, eliminating the need for
cooling fins and/or external cooling. The non-influencing motor design minimizes
parasitic forces in the motor, providing the exceptionally high level of error
motion performance. These motors have all the advantages of a brushless direct-drive
motor no brushes to wear, and high acceleration and high speeds. With
its low inherent inertia and high torque output, the ABS is capable of extremely
high speeds and accelerations.
Accurate Positioning
With a velocity ripple of <0.1%, an asynchronous error motion <20 nm,
and total error motion <100 nm, the Aerotech spindle offers superior performance
for high accuracy applications. The high performance motor and rotary encoder
are directly coupled to a common shaft. When used with the Aerotech A3200 controller
and Npaq® drive rack, the spindle resolution can be
as high as 0.05 arc sec with no speed trade-offs. This makes the ABS2000 ideal
for applications requiring both spindle operation and stage operation.
Flexible Configurations
Options include mechanical or vacuum-chuck configurations, grounding ball, and
optics mounting. Alternate higher torque motors are available. Aerotech manufactures
a wide range of servo amplifiers and advanced controllers to provide a complete,
integrated motion package.
