Aerotech’s
ABRT series rotary air-bearing stages provide 360-degree continuous travel with
resolution to 0.027 arc sec. Velocity stability and error motion performance
are exceptional. Payload capacity is up to 69 kg due to the outstanding radial
and axial stiffness. The ABRT is designed to meet the exacting requirements
of DVD mastering, wafer inspection, high precision metrology applications, X-ray
diffraction systems, optical inspection and fabrication, and MEMS/nanotechnology
device fabrication.
Superior
Mechanical Design
The ABRT design features large air-bearing surfaces and innovative preloading
for high stiffness and load capacity, producing not only excellent axial and
radial error motions (asynchronous is <20 nm for each), but outstanding tilt
error motion (asynchronous is <0.04 arc sec), as well. The resultant performance
is significantly better than other rotary air-bearing tables and spindles, greatly
benefiting applications requiring exceptional planar performance. Furthermore,
this stage family provides a clear aperture up to 50 mm in diameter that can
be used for product feed-through, laser beam delivery, cable clearance, or application-specific
requirements.
Brushless
Direct-Drive
The ABRT series utilizes optimized versions of Aerotech’s S-series slotless,
brushless motor to maximize positioning performance. The S-series motor uses
an advanced magnetic circuit design to produce high torque output with minimal
heat generation. The slotless design is inherently zero-cogging and torque-ripple-free.
This makes ABRT stages ideal for applications requiring smooth scan velocities
at low or high speeds. Maximum speed is up to 1200 rpm.
Custom
Designs
Custom versions of the ABRT are available to satisfy rate table and high precision
inertial guidance test-stand applications. Other features, such as slip rings
and rotary unions, are available.
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States [Change]
