Leading edge manufacturing, such as that in the semiconductor
and data storage industries, demands positioning tolerances beyond the capability
of conventional ball-screw and mechanical-bearing positioning systems. The ABL1500,
with its fully active preload, exceptionally high stiffness, and excellent geometric
characteristics, was designed specifically to meet the needs of the most demanding
applications.
Air-Bearing Design for High Dynamic Performance
The ABL1500 incorporates an active preload on both the vertical and horizontal
surfaces, and the opposing thin-film pressure maintains the bearing nominal
gap tolerance. This design, in addition to the large air-bearing surface that
distributes the load over a large surface area, results in a stage with outstanding
stiffness that is ideal for heavy or offset loading. Proprietary manufacturing
techniques result in unsurpassed geometrical characteristics.
The air bearing has an inherent averaging effect that maximizes
performance. The thin film will fill small surface voids and allow for other
irregularities. This characteristic yields superior pitch, roll, yaw, straightness,
and flatness specifications.
Linear Motor Drive
The driving force behind the ABL1500 is Aerotech’s BLMC series brushless
linear servomotor. Aerotech’s long history and experience as a motor manufacturer
is reflected in this design. The BLMC uses an ironless forcer for zero cogging
and no attractive forces, resulting in unsurpassed smoothness of motion. The
BLMC generates both high force and high velocity, making it the perfect combination
of power and performance.
Zero Maintenance
Our totally noncontact air bearing, noncontact linear motor drive, and noncontact
feedback device ensure years of maintenance-free operation at the high performance
levels that are expected of Aerotech equipment. Because there is no mechanical
contact between moving elements, the ABL1500 experiences no wear or reduction
in performance over time. Service life is virtually unlimited and since there
is no lubrication – only clean, dry gas – air bearings are ideal
for cleanroom and medical applications.
Cable Management System (CMS)
We carefully optimize the cable bend radius to ensure years of trouble-free
operation. In the unlikely event of failure, Aerotech’s modular design
makes cable replacement quick and easy with minimal downtime. We include all
customer-required cables, air hoses, etc. in our CMS bundle to facilitate integration
into the final system. Both ends are fully connectorized for simple integration
into the customer’s machine.
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