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Aerotech's ABR1000 rotary air-bearing stage provides superior angular positioning, velocity stability, and error motion performance. It is designed to meet the exacting requirements for wafer inspection, DVD mastering, disk drive test and servo writing, optical inspection and fabrication, and MEMS/nanotechnology device fabrication.

Superior Mechanical Design
The ABR1000 is designed with large air-bearing surfaces for high stiffness and load capacity in a low profile design. This design produces not only excellent axial and radial error motions, but outstanding tilt error motion, as well. The resultant face error motion is significantly better than other rotary air-bearing tables and spindles in the marketplace, greatly benefiting applications requiring exceptional planar performance.

Brushless Direct Drive
To maximize positioning performance, the ABR1000 utilizes Aerotech's S-series slotless, brushless motor. This motor represents the latest in rotary motor technology. The motor design uses an advanced magnetic circuit design to produce high torque output with minimal heat generation. The slotless design is inherently zero cogging and torque-ripple-free. This makes the ABR1000 ideal for applications requiring smooth scan velocities at low or high speeds.

Accurate Positioning
Several feedback options are available. The encoders selected for this stage series are noncontacting, reflective, or interferential encoders. When coupled with Aerotech's feedback multipliers and controls, resolutions of <0.03 arc second are achievable. Positioning accuracy of <1 arc second is available.

Flexible Configurations
Options include integral wafer chucks, disk chucks and clamps, ESD versions, and rotary unions for air/vacuum service.