The ALS130H, with its sub-nanometer resolution, superior bi-directional
repeatability, and exceptional low-velocity performance is the unparalleled
solution for high performance test, measurement, inspection, and other demanding
applications. The ALS130H employs a center-driven, non-cogging linear motor
as the driving element. Since the linear motor is a direct-drive device, there
is no backlash, windup, or "stiction" normally associated with a lead
screw or ball-screw drive. The moving magnet track design eliminates the need
for cable management and further improves long-term reliability.
The linear motor drive also offers the advantage of higher speeds
and accelerations. The compact yet powerful linear motor drives the ALS130H
to a peak unloaded acceleration of 1 g and a maximum velocity of 300 mm/s. The
result is a high-performance stage with outstanding throughput that significantly
outperforms comparable high-accuracy screw-driven stages.
Exceptional Resolution
Outstanding step-to-step resolution is critical for alignment applications.
The ALS130H meets this demand with a resolution of 0.5 nm. The direct-drive
linear motor allows the ALS130H to make precise, small resolution steps, which
is particularly important in alignment applications where step accuracy is critical.
The linear motor and high-resolution encoder system also provide excellent in-position
stability.
Superior Geometry
The ultra-stiff construction and compact two-piece design result in a stage
with unmatched geometrical tolerances. Straightness and flatness for the standard
ALS130H is <±2 µm over the entire travel.
Smooth Travel
Designed for smooth, vibration-free motion, the ALS130H utilizes precision anti-cage-creep
cross-roller bearings for the smoothest motion. Since neither the bearing system
nor the drive system utilize any recirculating elements, the ALS130H exhibits
the ripple-free motion required for high-precision scanning and inspection applications.
