ABL1500 Air-Bearing Direct-Drive Linear Stage
Description
Design Features
- Designed for high-performance scanning and inspection
- 450 mm wafer compatible
- Active air preload on all air-bearing surfaces
- Linear encoder feedback provides subnanometer resolution
- High stiffness for heavy loads and excellent geometric performance
- Travel up to 500 mm
Leading-edge manufacturing, particularly in the semiconductor and data storage industries, demands positioning tolerances beyond the capability of conventional ball-screw and mechanical-bearing positioning systems. The ABL1500, with its fully active preload, exceptionally high stiffness and excellent geometric characteristics was designed specifically to meet those demands.
Air-Bearing Design for High Dynamic Performance
The ABL1500 incorporates an air-on-air preload on both the vertical and horizontal surfaces. The opposing thin-film pressure maintains the bearing nominal gap tolerance. This design, in addition to the large air-bearing surface that distributes the load over a large surface area, results in a stage with outstanding stiffness that is ideal for heavy or offset loading.
Proprietary manufacturing techniques result in a stage with unsurpassed geometric characteristics. The air bearing has an inherent averaging effect that maximizes performance. The thin film will fill small surface voids and allow for other irregularities. This characteristic yields superior pitch, roll, yaw, straightness and flatness specifications.
Linear Motor Drive
The driving force behind this stage is Aerotech’s BLMC series brushless linear servomotor. Aerotech’s long history and experience as a motor manufacturer is reflected in this design. The BLMC utilizes an ironless forcer, which means there is zero cogging and no attractive forces, resulting in unsurpassed smoothness of motion. Capable of generating high force and velocity, the BLMC represents the ultimate combination of power and performance.
Zero Maintenance
Our totally noncontact air bearing, noncontact linear motor drive and noncontact feedback device ensure years of maintenance-free operation at the high performance levels that are expected of Aerotech equipment. Because there is no mechanical contact between moving elements, the ABL1500 experiences no wear or reduction in performance over time. Service life is virtually unlimited and since there is no lubrication – only clean, dry gas – air bearings are ideal for cleanroom and medical applications.
Cable Management
We carefully optimize the cable bend radius to ensure years of trouble-free operation. In the unlikely event of failure, Aerotech’s modular design makes cable replacement quick and easy with minimal downtime. We include all customer-required cables, air hoses, etc. in our CMS bundle to facilitate integration into the final system. Both ends are fully connectorized for simple integration into the customer’s machine.
Specifications
Mechanical Specifications
| Model | ABL15005 | ABL15010 | ABL15020 | ||
|---|---|---|---|---|---|
| Travel | 50 mm | 100 mm | 200 mm | ||
| Accuracy(1) | LN | HALAR | ±0.2 µm | ±0.2 µm | ±0.4 µm |
| Standard | ±1.0 µm | ±2.0 µm | ±5.0 µm | ||
| LT | HALAR | ±0.3 µm | ±0.3 µm | ±0.5 µm | |
| Standard | ±2.0 µm | ±4.0 µm | ±8.0 µm | ||
| Repeatability (Bidirectional)(1) |
LN | ±0.05 µm | ±0.05 µm | ±0.1 µm | |
| LT | ±0.1 µm | ±0.2 µm | |||
| Straightness(1) | ±0.25 µm | ±0.4 µm | ±0.5 µm | ||
| Flatness(1) | ±0.25 µm | ±0.4 µm | ±0.5 µm | ||
| Pitch | ±0.5 arc sec | ±1 arc sec | ±2 arc sec | ||
| Roll | ±0.5 arc sec | ±1 arc sec | ±2 arc sec | ||
| Yaw | ±0.5 arc sec | ±1 arc sec | ±2 arc sec | ||
| Maximum Speed | 2 m/s | ||||
| Maximum Acceleration | 2 g (No Load) | ||||
| Maximum Force (Continuous) | 93.6 N | ||||
| Load Capacity(2) | Horizontal | 35 kg | |||
| Side | 25 kg | ||||
| Operating Pressure | 80 psi ±5 psig | ||||
| Air Consumption | 24-30 SLPM @ 551 kPa (0.85-1.06 SCFM @ 5.51 bar) | ||||
| Moving Mass (No Load) | 5.1 kg | ||||
| Stage Mass | 14.7 kg | 16.0 kg | 18.6 kg | ||
| Material | Aluminum | ||||
| MTBF (Mean Time Between Failure) | 30,000 Hours | ||||
- Certified with each stage.
- Axis orientation for on-axis loading is listed.
- Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
- To protect air bearing against under-pressure, an in-line pressure switch tied to the motion controller/amplifier ESTOP input is recommended.
- Air supply must be clean, dry to 0°F dew point and filtered to 0.25 µm or better; recommend nitrogen at 99.9% purity.
- For XY configurations, the maximum upper axis travel is 200 mm. For upper axis travels greater than 200 mm but equal to or less than 500 mm, an ABL1500WB is required as the lower axis.
| Model | ABL15030 | ABL15040 | ABL15050 | ||
|---|---|---|---|---|---|
| Travel | 300 mm | 400 mm | 500 mm | ||
| Accuracy(1) | LN | HALAR | ±0.4 µm | ±0.5 µm | ±0.5 µm |
| Standard | ±5.0 µm | ±5.0 µm | ±5.0 µm | ||
| LT | HALAR | ±0.5 µm | ±0.6 µm | ±0.6 µm | |
| Standard | ±12.0 µm | ±16.0 µm | ±20.0 µm | ||
| Repeatability (Bidirectional)(1) |
LN | ±0.15 µm | ±0.2 µm | ||
| LT | ±0.2 µm | ±0.3 µm | |||
| Straightness(1) | ±0.75 µm | ±1.5 µm | ±2.0 µm | ||
| Flatness(1) | ±0.75 µm | ±1.5 µm | ±2.0 µm | ||
| Pitch | ±3 arc sec | ±4 arc sec | ±5 arc sec | ||
| Roll | ±3 arc sec | ±4 arc sec | ±5 arc sec | ||
| Yaw | ±3 arc sec | ±4 arc sec | ±5 arc sec | ||
| Maximum Speed | 2 m/s | ||||
| Maximum Acceleration | 2 g (No Load) | ||||
| Maximum Force (Continuous) | 93.6 N | ||||
| Load Capacity(2) | Horizontal | 35 kg | |||
| Side | 25 kg | ||||
| Operating Pressure | 80 psi ±5 psig | ||||
| Air Consumption | 24-30 SLPM @ 551 kPa (0.85-1.06 SCFM @ 5.51 bar) | ||||
| Moving Mass (No Load) | 5.1 kg | ||||
| Stage Mass | 21.3 kg | 23.9 kg | 26.5 kg | ||
| Material | Aluminum | ||||
| MTBF (Mean Time Between Failure) | 30,000 Hours | ||||
- Certified with each stage.
- Axis orientation for on-axis loading is listed.
- Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
- To protect air bearing against under-pressure, an in-line pressure switch tied to the motion controller/amplifier ESTOP input is recommended.
- Air supply must be clean, dry to 0°F dew point and filtered to 0.25 µm or better; recommend nitrogen at 99.9% purity.
- For XY configurations, the maximum upper axis travel is 200 mm. For upper axis travels greater than 200 mm but equal to or less than 500 mm, an ABL1500WB is required as the lower axis.
Electrical Specifications
| Drive System | Brushless Linear Servomotor | |||||
| Feedback | Noncontact Linear Encoder (see signal period options on Order Information page) | |||||
| Maximum Bus Voltage | up to 80 VDC | |||||
| Limit Switches | 5 V, Normally Closed | |||||
| Home Switch | Near Center | |||||
Recommended Controller
| Multi-Axis | A3200 | Ndrive MP/Ndrive CP/Ndrive HLe/Npaq MXR | |||||
| Ensemble | Ensemble MP/Ensemble CP/Ensemble HLe/Epaq | ||||||
| Single Axis | Soloist | Soloist MP/Soloist CP/Soloist HLe | |||||
-
ABL1500Spec 
-
ABL1500Spec-2 
Dimensions
-
ABL1500 
Ordering Information
Ordering Example
| ABL15 | 010 | -M | -10 | -NC | -LN10AS | -SINGLE-CMS |
Ordering Options
| Series | Travel | Mounting and Grid Pattern | Motor | Limits | Linear Encoder | Options |
|---|---|---|---|---|---|---|
| 005 010 020 030 040 050 |
-M | -10 | -NC | -LTnnAS -LTnnX50 -LNnnAS |
-SINGLE-CMS -XY-CMS |
ABL1500 Series Linear Air-Bearing Stage
| Option | Description |
|---|---|
| ABL15005 | 50 mm (2 in) travel linear air-bearing stage with linear motor and limits |
| ABL15010 | 100 mm (4 in) travel linear air-bearing stage with linear motor and limits |
| ABL15020 | 200 mm (8 in) travel linear air-bearing stage with linear motor and limits |
| ABL15030 | 300 mm (12 in) travel linear air-bearing stage with linear motor and limits |
| ABL15040 | 400 mm (16 in) travel linear air-bearing stage with linear motor and limits |
| ABL15050 | 500 mm (20 in) travel linear air-bearing stage with linear motor and limits |
Mounting and Grid Pattern
| Option | Description |
|---|---|
| -M | Metric dimension mounting pattern and holes |
Motor
| Option | Description |
|---|---|
| -10 | Brushless linear motor (BLMC-192-A) |
Limits
| Option | Description |
|---|---|
| -NC | Normally-closed end of travel limit switches (standard) |
Standard Linear Encoders
| Option | Description |
|---|---|
| -LT05AS | Linear encoder for ABL15005; amplified sine output |
| -LT10AS | Linear encoder for ABL15010; amplified sine output |
| -LT20AS | Linear encoder for ABL15020; amplified sine output |
| -LT30AS | Linear encoder for ABL15030; amplified sine output |
| -LT40AS | Linear encoder for ABL15040; amplified sine output |
| -LT50AS | Linear encoder for ABL15050; amplified sine output |
| -LT05X50 | Linear encoder for ABL15005; 0.1 micron line driver output |
| -LT10X50 | Linear encoder for ABL15010; 0.1 micron line driver output |
| -LT20X50 | Linear encoder for ABL15020; 0.1 micron line driver output |
| -LT30X50 | Linear encoder for ABL15030; 0.1 micron line driver output |
| -LT40X50 | Linear encoder for ABL15040; 0.1 micron line driver output |
| -LT50X50 | Linear encoder for ABL15050; 0.1 micron line driver output |
High-Accuracy Linear Encoders
| Option | Description |
|---|---|
| -LN05AS | High-accuracy linear encoder for ABL15005; amplified sine output |
| -LN10AS | High-accuracy linear encoder for ABL15010; amplified sine output |
| -LN20AS | High-accuracy linear encoder for ABL15020; amplified sine output |
| -LN30AS | High-accuracy linear encoder for ABL15030; amplified sine output |
| -LN40AS | High-accuracy linear encoder for ABL15040; amplified sine output |
| -LN50AS | High-accuracy linear encoder for ABL15050; amplified sine output |
Options
| Option | Description |
|---|---|
| -SINGLE-CMS | Cable management system for single-axis applications |
| -XY-CMS | Cable management system for X-Y assembly |
Accessories (to be ordered as separate line item)
| Option | Description |
|---|---|
| HALAR | High-accuracy system linear error correction for accuracy and repeatability |
| ALIGNMENT-NPA | Non-precision XY assembly |
| ALIGNMENT-PA10 | XY assembly; 10 arc sec orthogonal |
| ALIGNMENT-PA5 | XY assembly; 5 arc sec orthogonal |