ALS135 Mechanical-Bearing Direct-Drive Linear Stage

Description

Design Features

  • Direct-drive linear motor for ultra-precise motion
  • High-accuracy noncontact linear encoder
  • Outstanding performance in a small footprint

The ALS135, with its low profile and outstanding performance characteristics, is the ultimate solution for high-accuracy alignment and inspection stations.

Linear Motor Drive

Unlike many stages that utilize a side-drive lead screw, the ALS135 employs a center-driven, non-cogging linear motor as the driving element. Since the linear motor is a direct-drive device there is no backlash, windup or “stiction” that is normally associated with a lead screw or ball screw drive.

The linear motor drive also offers the advantage of higher speeds and accelerations. The compact yet powerful linear motor drives the ALS135 to a peak unloaded acceleration of 1 g and a maximum velocity of 300 mm/s. The result is a high-accuracy device with outstanding throughput that significantly outperforms comparable high-accuracy screw-driven stages.

Outstanding Resolution

For alignment applications, outstanding step-to-step resolution is critical. The ALS135 meets this demand with a resolution of 2.5 nm when coupled with Aerotech controls. The direct-drive linear motor allows the ALS135 to make precise, small resolution steps. This is particularly important in alignment applications where step accuracy is critical.

Superior Geometry

Aerotech’s ultra-stiff construction and compact two-piece design results in a stage with unmatched geometric tolerances. As a result, straightness and flatness for the standard stage is <±2 μm over the entire travel. The effects of Abbe error are nearly eliminated, vastly improving overall system accuracy.

Smooth Travel

Designed for smooth, vibration-free motion, the ALS135 exhibits the outstanding ripple-free motion required for scanning and inspection applications.

Designed for Long Life

Like all stages in the Aerotech product family, the ALS135 was designed for outstanding long-term performance. Both the linear motor and linear encoder are noncontact devices — they not only exhibit long-life, but are completely maintenance free. A moving magnet track design eliminates the need for cable management, further improving long-term reliability.

Precision Alignment

ALS135 series stages are easily configured as XY assemblies. Options include precision orthogonality alignment to 5 arc seconds and available vertical axis solutions.

Specifications

Mechanical Specifications

ModelALS135-025ALS135-050ALS135-100ALS135-150ALS135-200
Travel 25 mm 50 mm 100 mm 150 mm 200 mm
Drive System Linear Brushless Servomotor (BLMUC-95-A)
Bus Voltage Up to 80 VDC with a single 25-pin D connector;
Up to 160 VDC with split feedback and power – two 25-pin D connectors
Continuous Current Apk 2.94
Arms 2.08
Feedback Noncontact Linear Encoder
Resolution 0.0025 µm - 1.0 µm
Maximum Travel Speed(1) 300 mm/s
Maximum Linear Acceleration 1 g (No Load)
Maximum Load(2) Horizontal 15.0 kg
Side 10.0 kg
Accuracy HALAR(3) ±0.3 µm
Standard ±2.0µm ±2.0µm ±4.0 µm ±6.0 µm ±8.0 µm
Repeatability(3) ±100 nm
Straightness and Flatness Maximum Deviation ±1 µm ±1.5 µm ±1.5 µm ±2 µm ±2 µm
Pitch ±5 arc sec ±6 arc sec ±8 arc sec ±10 arc sec ±12 arc sec
Roll ±5 arc sec ±6 arc sec ±8 arc sec ±10 arc sec ±12 arc sec
Yaw ±5 arc sec ±5 arc sec ±6 arc sec ±7 arc sec ±9 arc sec
Nominal Stage Weight 2.8 kg 3.0 kg 3.8 kg 4.6 kg 5.4 kg
Moving Mass 0.9 kg 1 kg 1.2 kg 1.4 kg 1.6 kg
Construction Aluminum Body/Black Anodize Finish
  1. Maximum speed based on stage capability. Maximum application velocity may be limited by system data rate and system resolution.
  2. Maximum load based on bearing capability. Maximum application load may be limited by acceleration requirements.
  3. Value with Aerotech controls and HAL option.
  4. Specifications are for single-axis systems, measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.

Dimensions

  • ALS135 Dimensions

Ordering Information

Ordering Example

ALS135 -100 -NC -LT10X50 -25DU

Ordering Options

SeriesTravel (mm)LimitsLinear EncoderOuput Cable Connectors
-025
-050
-100
-150
-200
-NC
-NO
-LTnnAS
-LTnnX5
-LTnnX50
-25DU
-4DU-25DU

ALS135 Series Linear Motor Stage

OptionsDescription
ALS135-025 25 mm (1 in) travel stage with linear motor and limits
ALS135-050 50 mm (2 in) travel stage with linear motor and limits
ALS135-100 100 mm (4 in) travel stage with linear motor and limits
ALS135-150 150 mm (6 in) travel stage with linear motor and limits
ALS135-200 200 mm (8 in) travel stage with linear motor and limits

Limits

OptionsDescription
-NC Normally-closed end of travel limit switches (standard)
-NO Normally-open end of travel limit switches

Encoder

OptionsDescription
-LTAS Linear encoder for ALS135 with amplified sine read-head; requires external multiplier
-LTX5 Linear encoder for ALS135 with 1.0 µm digital TTL output
-LTX50 Linear encoder for ALS135 with 0.1 µm digital TTL output

Note: Amplified sine output (LTAS) linear encoders require external multiplier. MX50 required for 0.1 micron resolution.

Accessories (to be ordered as separate line item)

OptionsDescription
MXH5-D-mm(1) External 20-times multiplier, 32 MHz maximum data rate, 1.0 µm (LTAS)
MXH10-D-mm(1) External 40-times multiplier, 32 MHz maximum data rate, 0.5 µm (LTAS)
MXH25-D-mm(1) External 100-times multiplier, 32 MHz maximum data rate, 0.2 µm (LTAS)
MXH50-D-mm(1) External 200-times multiplier, 32 MHz maximum data rate, 0.1 µm (LTAS)
MXH100-D-mm(1) External 400-times multiplier, 32 MHz maximum data rate, 0.05 µm (LTAS)
MXH200-D-mm(1) External 800-times multiplier, 32 MHz maximum data rate, 0.025 µm (LTAS)
MXH250-D-mm(1) External 1000-times multiplier, 32 MHz maximum data rate, 0.02 µm (LTAS)
MXH500-D-mm(1) External 2000-times multiplier, 32 MHz maximum data rate, 0.01 µm (LTAS)
MXC-nn Multiplier to controller cable; specify length '-nn' in feet
HALAR High-accuracy system — linear error correction for accuracy and repeatability
HALSF High-accuracy system — improved straightness and flatness
ALIGNMENT-NPA Non-precision XY assembly
ALIGNMENT-PA10 XY assembly; 10 arc sec orthogonal
ALIGNMENT-PA5 XY assembly; 5 arc sec orthogonal
  1. Specify data rate "mm" 2M=2 MHz, 4M=4 MHz, 8M=8 MHz, 16M=16 MHz, 32M=32 MHz.

Output Cable Connectors

OptionsDescription
-25DU Single 25-pin D connector (standard)
-4DU-25DU 4-pin HPD and 25-pin D connectors

Note: -25DU single 25-pin connector option not valid for systems using bus voltages greater than 80 V.