# ALS20000 Mechanical-Bearing Direct-Drive Linear Stage

# Description

## Design Features

- Protective metal waycover
- 450 mm wafer compatible
- Integral cable management system
- Ideally suited for cleanroom applications
- Compact, high-performance, linear motor stage
- Superior velocity control for imaging and scanning applications

The ALS20000 was designed to have exceptional velocity control, low vibration, high accuracy and excellent throughput, making it the ideal solution for imaging and precision inspection applications.

## High Performance in a Compact Package

ALS20000 series stages incorporate the highest quality materials and design elements. The result is a high-reliability linear stage with excellent accuracy, straightness and flatness performance and a virtually unlimited, trouble-free service life.

Recognizing the importance of stage stiffness, the ALS20000 linear bearings are supported by the maximum cross-section possible while still maintaining an overall low profile. Outstanding system straightness and flatness are obtained particularly in XY configurations.

## Linear Motor Drive

Unlike other linear motor stage designs that utilize an iron-core flat motor design, the ALS20000 is driven by a high-power ironless forcer and U-channel magnet track. This design is superior in high-performance applications. Since the BLM is ironless, it is a cog-free design. The lack of cogging enables extremely tight velocity control as well as superior contour motion profiles without sacrificing speed or acceleration. The magnetic field of the BLM motor is totally self-contained within the U-channel design. Most high-performance applications cannot tolerate the stray magnetic fields generated by flat motor magnet tracks.

The BLM’s magnet track is composed of opposing rows of high-power magnets that help to generate high output forces. This approach eliminates the need for an iron-based core, which has an inherent magnetic attraction between the forcer and the magnet track. This attractive force presents an additional load to the bearings that reduces stage life and performance.

## Cable Management System

Extensive R&D has resulted in an optimized cable management system (CMS) that is designed for millions of cycles of maintenance-free operation. Designed to provide a turnkey system for both single- and multi-axis systems, upper-axis cabling is incorporated into the overall system CMS. To facilitate integration into the final system, a spare 25-pin D-connector and cabling are included for customer use. Custom configurations are common and are readily available.

# Specifications

## ALS20000 Specifications

Model | ALS20010 | ALS20020 | ALS20030 | ALS20035 | ALS20045 | ALS20060 | ||
---|---|---|---|---|---|---|---|---|

Travel | 100 mm | 200 mm | 300 mm | 350 mm | 450 mm | 600 mm | ||

Drive System | Linear Brushless Servomotor (BLM-142-A) | |||||||

Bus Voltage^{(1)} |
Up to 160 VDC | |||||||

Continuous Current^{(2)} |
A_{pk} |
Up to 3.10 A | ||||||

A_{rms} |
Up to 2.19 A | |||||||

Feedback | Noncontact Linear Encoder | |||||||

Resolution | LN | 0.001 µm - 0.2 µm | ||||||

LT | 0.005 µm - 1.0 µm | |||||||

Maximum Travel Speed^{(3)} |
2 m/s | |||||||

Maximum Linear Acceleration | 3 g (No Load) | |||||||

Maximum Load^{(4)} |
Horizontal | 70.0 kg | ||||||

Side | 35.0 kg | |||||||

Accuracy | LN | HALAR^{(5)} |
±1.0 µm | |||||

Standard | ±5.0 µm | |||||||

LT | HALAR^{(5)} |
±1.0 µm | ||||||

Standard | ±4.0 µm | ±8.0 µm | ±12.0 µm | ±14.0 µm | ±18.0 µm | ±24.0 µm | ||

Repeatability | LN | ±0.5 µm | ||||||

LT | ±0.5 µm | |||||||

Straightness and Flatness | Differential | HALSF | 1 µm/25 mm | |||||

Standard | 2 µm/25 mm | |||||||

Maximum Deviation | HALSF | ±1.0 µm | ±1.5 µm | ±2.0 µm | ±2.2 µm | ±2.5 µm | ±3.0 µm | |

Standard | ±2.0 µm | ±4.0 µm | ±6.0 µm | ±7.0 µm | ±9.0 µm | ±9.0 µm | ||

Pitch and Yaw | 5 arc sec | 8 arc sec | 12 arc sec | 14 arc sec | 17 arc sec | 20 arc sec | ||

Nominal Stage Weight | 13.5 kg | 17.5 kg | 21.0 kg | 23.0 kg | 27.0 kg | 32.5 kg | ||

Moving Mass | 6.1 kg | |||||||

Construction | Aluminum Body/Black Anodize Finish/Hardcoat (62 Rockwell Hardness Teflon^{®} Impregnated) |

- 80 VDC bus limit with standard ribbon cable. Up to 320 VDC is available with round cables.
- Current values based on high performance (-P) magnet track.
- Maximum speed based on stage capability. Maximum application velocity may be limited by system data rate and system resolution.
- Maximum load based on bearing capability. Maximum application load may be limited by acceleration requirements.
- Available with Aerotech controllers.
- Specifications are for single-axis systems, measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.

# Dimensions

# Ordering Information

## Ordering Example

ALS20 | 030 | -M | -10-S | -LN30AS | -NC | -X-CMS |

## Ordering Options

Series | Travel (mm) | Mounting and Grid Pattern | Motor and Magnet Track | Linear Encoder | Limits | Options |
---|---|---|---|---|---|---|

ALS20 | 010 020 030 035 045 060 |
-O -M -U |
-10-S -10-P |
-LTnnAS -LTnnX5 -LNnnAS |
-NC -NO |
-X-CMS -XY-CMS -XYZ-CMS -XYZT-CMS -Y-CMS -YZ-CMS -YZT-CMS |

## ALS20000 Series Linear Motor Stage

Option | Description |
---|---|

ALS20010 | 100 mm (4 in) travel stage with linear motor and limits |

ALS20020 | 200 mm (8 in) travel stage with linear motor and limits |

ALS20030 | 300 mm (12 in) travel stage with linear motor and limits |

ALS20035 | 350 mm (14 in) travel stage with linear motor and limits |

ALS20045 | 450 mm (18 in) travel stage with linear motor and limits |

ALS20060 | 600 mm (24 in) travel stage with linear motor and limits |

## Mounting and Grid Pattern

Option | Description |
---|---|

-O | No tabletop |

-M | Metric dimension mounting pattern and holes |

-U | English dimension mounting pattern and holes |

## Motor and Magnet Track

Option | Description |
---|---|

-10-S | Brushless linear motor with standard magnet track (BLM-142-A) |

-10-P | Brushless linear motor with high performance magnet track (BLM-142-A) |

## Standard Linear Encoders

Option | Description |
---|---|

-LT10AS | Linear encoder for ALS20010; amplified sine output 1 Vpp (20 µm signal period); requires signal multiplier |

-LT20AS | Linear encoder for ALS20020; amplified sine output 1 Vpp (20 µm signal period); requires signal multiplier |

-LT30AS | Linear encoder for ALS20030; amplified sine output 1 Vpp (20 µm signal period); requires signal multiplier |

-LT35AS | Linear encoder for ALS20035; amplified sine output 1 Vpp (20 µm signal period); requires signal multiplier |

-LT45AS | Linear encoder for ALS20045; amplified sine output 1 Vpp (20 µm signal period); requires signal multiplier |

-LT60AS | Linear encoder for ALS20060; amplified sine output 1 Vpp (20 µm signal period); requires signal multiplier |

-LT10X5 | Linear encoder for ALS20010; 1.0 micron line driver output |

-LT20X5 | Linear encoder for ALS20020; 1.0 micron line driver output |

-LT30X5 | Linear encoder for ALS20030; 1.0 micron line driver output |

-LT35X5 | Linear encoder for ALS20035; 1.0 micron line driver output |

-LT45X5 | Linear encoder for ALS20045; 1.0 micron line driver output |

-LT60X5 | Linear encoder for ALS20060; 1.0 micron line driver output |

## High-Accuracy Linear Encoders

Option | Description |
---|---|

-LN10AS | High-accuracy linear encoder for ALS20010; amplified sine output 1 Vpp (4 µm signal period); requires signal multiplier |

-LN20AS | High-accuracy linear encoder for ALS20020; amplified sine output 1 Vpp (4 µm signal period); requires signal multiplier |

-LN30AS | High-accuracy linear encoder for ALS20030; amplified sine output 1 Vpp (4 µm signal period); requires signal multiplier |

-LN35AS | High-accuracy linear encoder for ALS20035; amplified sine output 1 Vpp (4 µm signal period); requires signal multiplier |

-LN45AS | High-accuracy linear encoder for ALS20045; amplified sine output 1 Vpp (4 µm signal period); requires signal multiplier |

-LN60AS | High-accuracy linear encoder for ALS20060; amplified sine output 1 Vpp (4 µm signal period); requires signal multiplier |

Note: Integral signal multipliers available with A3200 amplifier products.

## Limits

Option | Description |
---|---|

-NC | Normally-closed end of travel limit switches (standard) |

-NO | Normally-open end of travel limit switches |

## Options

Option | Description |
---|---|

-X-CMS | Cable management system for single-axis assembly |

-XY-CMS | Cable management system for X-Y assembly; order with X axis only |

-XYZ-CMS | Cable management system for X-Y-Z assembly; order with X axis only |

-XYZT-CMS | Cable management system for X-Y-Z-T assembly; order with X axis only |

-Y-CMS | Cable management system for X-Y assembly; order with Y axis only |

-YZ-CMS | Cable management system for Y-Z assembly; order with Y axis only |

-YZT-CMS | Cable management system for Y-Z-T assembly; order with Y axis only |

## Accessories (to be ordered as separate line item)

Option | Description |
---|---|

ALIGNMENT-NPA | Non-precision XY assembly |

ALIGNMENT-PA10 | XY assembly; 10 arc sec orthogonal |

ALIGNMENT-PA5 | XY assembly; 5 arc sec orthogonal |

HALAR | High-accuracy system – linear error correction for accuracy and repeatability |

HALSF | High-accuracy system – improved straightness and flatness |