ALS20000 Mechanical-Bearing Direct-Drive Linear Stage

Description

Design Features

  • Protective metal waycover
  • 450 mm wafer compatible
  • Integral cable management system
  • Ideally suited for cleanroom applications
  • Compact, high-performance, linear motor stage
  • Superior velocity control for imaging and scanning applications

The ALS20000 was designed to have exceptional velocity control, low vibration, high accuracy and excellent throughput, making it the ideal solution for imaging and precision inspection applications.

High Performance in a Compact Package

ALS20000 series stages incorporate the highest quality materials and design elements. The result is a high-reliability linear stage with excellent accuracy, straightness and flatness performance and a virtually unlimited, trouble-free service life.

Recognizing the importance of stage stiffness, the ALS20000 linear bearings are supported by the maximum cross-section possible while still maintaining an overall low profile. Outstanding system straightness and flatness are obtained particularly in XY configurations.

Linear Motor Drive

Unlike other linear motor stage designs that utilize an iron-core flat motor design, the ALS20000 is driven by a high-power ironless forcer and U-channel magnet track. This design is superior in high-performance applications. Since the BLM is ironless, it is a cog-free design. The lack of cogging enables extremely tight velocity control as well as superior contour motion profiles without sacrificing speed or acceleration. The magnetic field of the BLM motor is totally self-contained within the U-channel design. Most high-performance applications cannot tolerate the stray magnetic fields generated by flat motor magnet tracks.

The BLM’s magnet track is composed of opposing rows of high-power magnets that help to generate high output forces. This approach eliminates the need for an iron-based core, which has an inherent magnetic attraction between the forcer and the magnet track. This attractive force presents an additional load to the bearings that reduces stage life and performance.

Cable Management System

Extensive R&D has resulted in an optimized cable management system (CMS) that is designed for millions of cycles of maintenance-free operation. Designed to provide a turnkey system for both single- and multi-axis systems, upper-axis cabling is incorporated into the overall system CMS. To facilitate integration into the final system, a spare 25-pin D-connector and cabling are included for customer use. Custom configurations are common and are readily available.

Specifications

ALS20000 Specifications

ModelALS20010ALS20020ALS20030ALS20035ALS20045ALS20060
Travel 100 mm 200 mm 300 mm 350 mm 450 mm 600 mm
Drive System Linear Brushless Servomotor (BLM-142-A)
Bus Voltage(1) Up to 160 VDC
Continuous Current(2) Apk Up to 3.10 A
Arms Up to 2.19 A
Feedback Noncontact Linear Encoder
Resolution LN 0.001 µm - 0.2 µm
LT 0.005 µm - 1.0 µm
Maximum Travel Speed(3) 2 m/s
Maximum Linear Acceleration 3 g (No Load)
Maximum Load(4) Horizontal 70.0 kg
Side 35.0 kg
Accuracy LN HALAR(5) ±1.0 µm
Standard ±5.0 µm
LT HALAR(5) ±1.0 µm
Standard ±4.0 µm ±8.0 µm ±12.0 µm ±14.0 µm ±18.0 µm ±24.0 µm
Repeatability LN ±0.5 µm
LT ±0.5 µm
Straightness and Flatness Differential HALSF 1 µm/25 mm
Standard 2 µm/25 mm
Maximum Deviation HALSF ±1.0 µm ±1.5 µm ±2.0 µm ±2.2 µm ±2.5 µm ±3.0 µm
Standard ±2.0 µm ±4.0 µm ±6.0 µm ±7.0 µm ±9.0 µm ±9.0 µm
Pitch and Yaw 5 arc sec 8 arc sec 12 arc sec 14 arc sec 17 arc sec 20 arc sec
Nominal Stage Weight 13.5 kg 17.5 kg 21.0 kg 23.0 kg 27.0 kg 32.5 kg
Moving Mass 6.1 kg
Construction Aluminum Body/Black Anodize Finish/Hardcoat (62 Rockwell Hardness Teflon® Impregnated)
  1. 80 VDC bus limit with standard ribbon cable. Up to 320 VDC is available with round cables.
  2. Current values based on high performance (-P) magnet track.
  3. Maximum speed based on stage capability. Maximum application velocity may be limited by system data rate and system resolution.
  4. Maximum load based on bearing capability. Maximum application load may be limited by acceleration requirements.
  5. Available with Aerotech controllers.
  6. Specifications are for single-axis systems, measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
  • ALS20000-spec
  • ALS20000-spec2

Dimensions

  • ALS20000

Ordering Information

Ordering Example

ALS20 030 -M -10-S -LN30AS -NC -X-CMS

Ordering Options

SeriesTravel (mm)Mounting and Grid PatternMotor and Magnet TrackLinear EncoderLimitsOptions
ALS20 010
020
030
035
045
060
-O
-M
-U
-10-S
-10-P
-LTnnAS
-LTnnX5
-LNnnAS
-NC
-NO
-X-CMS
-XY-CMS
-XYZ-CMS
-XYZT-CMS
-Y-CMS
-YZ-CMS
-YZT-CMS

ALS20000 Series Linear Motor Stage

OptionDescription
ALS20010 100 mm (4 in) travel stage with linear motor and limits
ALS20020 200 mm (8 in) travel stage with linear motor and limits
ALS20030 300 mm (12 in) travel stage with linear motor and limits
ALS20035 350 mm (14 in) travel stage with linear motor and limits
ALS20045 450 mm (18 in) travel stage with linear motor and limits
ALS20060 600 mm (24 in) travel stage with linear motor and limits

Mounting and Grid Pattern

OptionDescription
-O No tabletop
-M Metric dimension mounting pattern and holes
-U English dimension mounting pattern and holes

Motor and Magnet Track

OptionDescription
-10-S Brushless linear motor with standard magnet track (BLM-142-A)
-10-P Brushless linear motor with high performance magnet track (BLM-142-A)

Standard Linear Encoders

OptionDescription
-LT10AS Linear encoder for ALS20010; amplified sine output 1 Vpp (20 µm signal period); requires signal multiplier
-LT20AS Linear encoder for ALS20020; amplified sine output 1 Vpp (20 µm signal period); requires signal multiplier
-LT30AS Linear encoder for ALS20030; amplified sine output 1 Vpp (20 µm signal period); requires signal multiplier
-LT35AS Linear encoder for ALS20035; amplified sine output 1 Vpp (20 µm signal period); requires signal multiplier
-LT45AS Linear encoder for ALS20045; amplified sine output 1 Vpp (20 µm signal period); requires signal multiplier
-LT60AS Linear encoder for ALS20060; amplified sine output 1 Vpp (20 µm signal period); requires signal multiplier
-LT10X5 Linear encoder for ALS20010; 1.0 micron line driver output
-LT20X5 Linear encoder for ALS20020; 1.0 micron line driver output
-LT30X5 Linear encoder for ALS20030; 1.0 micron line driver output
-LT35X5 Linear encoder for ALS20035; 1.0 micron line driver output
-LT45X5 Linear encoder for ALS20045; 1.0 micron line driver output
-LT60X5 Linear encoder for ALS20060; 1.0 micron line driver output

High-Accuracy Linear Encoders

OptionDescription
-LN10AS High-accuracy linear encoder for ALS20010; amplified sine output 1 Vpp (4 µm signal period); requires signal multiplier
-LN20AS High-accuracy linear encoder for ALS20020; amplified sine output 1 Vpp (4 µm signal period); requires signal multiplier
-LN30AS High-accuracy linear encoder for ALS20030; amplified sine output 1 Vpp (4 µm signal period); requires signal multiplier
-LN35AS High-accuracy linear encoder for ALS20035; amplified sine output 1 Vpp (4 µm signal period); requires signal multiplier
-LN45AS High-accuracy linear encoder for ALS20045; amplified sine output 1 Vpp (4 µm signal period); requires signal multiplier
-LN60AS High-accuracy linear encoder for ALS20060; amplified sine output 1 Vpp (4 µm signal period); requires signal multiplier

Note: Integral signal multipliers available with A3200 amplifier products.

Limits

OptionDescription
-NC Normally-closed end of travel limit switches (standard)
-NO Normally-open end of travel limit switches

Options

OptionDescription
-X-CMS Cable management system for single-axis assembly
-XY-CMS Cable management system for X-Y assembly; order with X axis only
-XYZ-CMS Cable management system for X-Y-Z assembly; order with X axis only
-XYZT-CMS Cable management system for X-Y-Z-T assembly; order with X axis only
-Y-CMS Cable management system for X-Y assembly; order with Y axis only
-YZ-CMS Cable management system for Y-Z assembly; order with Y axis only
-YZT-CMS Cable management system for Y-Z-T assembly; order with Y axis only

Accessories (to be ordered as separate line item)

OptionDescription
ALIGNMENT-NPA Non-precision XY assembly
ALIGNMENT-PA10 XY assembly; 10 arc sec orthogonal
ALIGNMENT-PA5 XY assembly; 5 arc sec orthogonal
HALAR High-accuracy system – linear error correction for accuracy and repeatability
HALSF High-accuracy system – improved straightness and flatness