ALS5000 Mechanical-Bearing Direct-Drive Linear Stage

Description

Design Features

  • Rugged construction
  • Hard-coated tabletop and waycovers
  • Fully integrated cable management system
  • High-accuracy, noncontact linear encoder
  • Sealed design with optional air purge

The ALS5000 was designed to meet the needs of the most demanding applications. A rigid base, fully-sealed metal waycovers and high-power linear motor make the ALS5000 the stage of choice in laser machining, ceramic scribing or any other application requiring high accuracy in a production environment.

Rugged Construction

The greatest attention to detail is evident in all aspects of the ALS5000 design. The tabletop utilizes stainless steel Helicoil® inserts to protect mounting holes against thread wear.

An integral metal waycover is provided to protect the stage from hot sparks or debris. Both the metal waycover and tabletop are treated with a hardcoat (Rockwell 62 hardness) that is scratch-resistant and provides outstanding protection in the harshest applications.

To further provide the stage with protection from a caustic environment, the ALS5000 utilizes Aerotech’s unique tensioned side-strap system. The straps are in a vertical orientation that prevents debris from accumulating on top of them and are tensioned to create a tight seal. An optional air-purge is available that allows air to be forced into the body of the stage. This creates a positive pressure that prevents any particulate, no matter how fine, from entering the stage. To aid in system assembly, the base mounting holes are located outboard of the stage. Therefore, the stage can be mounted without removing the hardcover.

High Performance

The base of the ALS5000 is machined from special aluminum alloy tooling plate to provide high stiffness and long-term stability. Sealed linear motion guide bearings with integral wipers are incorporated to provide excellent payload capability and long life, even with heavy offset loads.

Noncontact linear encoders with submicron repeatabilities are standard on all ALS5000 series stages. Optional HALAR and HALSF factory calibration options are available that further increase the standard accuracy, straightness and flatness specifications to even finer precision.

Linear Motor Drive

Aerotech’s high-power, cog-free, BLM series linear motor drives the ALS5000 to a maximum speed of 2 m/s and acceleration of 3 g. This zero cogging design is ideal for applications requiring outstanding contour accuracy and smooth velocity profiling. As with all Aerotech ALS series linear motor stages, the linear motor has zero backlash, no windup, zero friction and outstanding system responsiveness.

Specifications

ModelALS50010ALS50020ALS50030ALS50045
Travel 100 mm 200 mm 300 mm 450 mm
Drive System Linear Brushless Servomotor (BLM-264-A)
Bus Voltage Up to 320 VDC
Continuous Current(1) Apk Up to 5.10 A
Arms Up to 3.61 A
Feedback Noncontact Linear Encoder
Resolution LN 0.001 µm - 0.2 µm
LT 0.005 µm - 1.0 µm
Maximum Travel Speed(2) 2 m/s
Maximum Linear Acceleration 3 g (No Load)
Maximum Load(3) Horizontal 135.0 kg
Side 45.0 kg
Accuracy LN HALAR(4) ±1.0 µm
Standard ±5.0 µm
LT HALAR(4) ±1.0 µm
Standard ±4.0 µm ±8.0 µm ±12.0 µm ±18.0 µm
Repeatability LN ±0.5 µm
LT ±0.5 µm
Straightness
and Flatness
Differential HALSF 1 µm/25 mm
Standard 2 µm/25 mm
Maximum Deviation HALSF ±0.5 µm ±1.0 µm ±1.5 µm ±2.5 µm
Standard ±1.0 µm ±2.0 µm ±3.0 µm ±4.0 µm
Pitch and Yaw 6 arc sec 8 arc sec 10 arc sec 14 arc sec
Nominal Stage Weight 35.0 kg 40.0 kg 45.0 kg 52.0 kg
Moving Mass 12.21 kg
Construction Stage Aluminum Body; Textured Epoxy (Polane-T) Pebble Grey Paint
Table and Waycover Hard Coating (62 Rockwell Hardness Teflon® Impregnated)
  1. Current values based on high performance (-P) magnet track.
  2. Maximum speed based on stage capability. Maximum application velocity may be limited by system data rate and system resolution.
  3. Maximum load based on bearing capability. Maximum application load may be limited by acceleration requirements.
  4. Available with Aerotech controllers.
  5. Specifications are for single-axis systems, measured 50 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.

 

ModelALS50060ALS50075ALS50090ALS50100
Travel 600 mm 750 mm 900 mm 1000 mm
Drive System Linear Brushless Servomotor (BLM-264-A)
Bus Voltage Up to 320 VDC
Continuous Current(1) Apk Up to 5.10 A
Arms Up to 3.61 A
Feedback Noncontact Linear Encoder
Resolution LN 0.001 µm - 0.2 µm
LT 0.005 µm - 1.0 µm
Maximum Travel Speed(2) 2 m/s
Maximum Linear Acceleration 3 g (No Load)
Maximum Load(3) Horizontal 135.0 kg
Side 45.0 kg
Accuracy LN HALAR(4) ±1.0 µm
Standard ±5.0 µm
LT HALAR(4) ±1.0 µm
Standard ±24.0 µm ±30.0 µm ±36.0 µm ±40.0 µm
Repeatability LN ±0.5 µm
LT ±0.5 µm
Straightness
and Flatness
Differential HALSF 1 µm/25 mm
Standard 2 µm/25 mm
Maximum Deviation HALSF ±3.0 µm ±3.5 µm ±4.5 µm ±5.0 µm
Standard ±6.0 µm ±7.0 µm ±8.0 µm ±9.0 µm
Pitch and Yaw 17 arc sec 20 arc sec 25 arc sec 25 arc sec
Nominal Stage Weight 60.0 kg 68.0 kg 76.0 kg 81.3 kg
Moving Mass 12.21 kg
Construction Stage Aluminum Body; Textured Epoxy (Polane-T) Pebble Grey Paint
Table and Waycover Hard Coating (62 Rockwell Hardness Teflon® Impregnated)
 
  1. Current values based on high performance (-P) magnet track.
  2. Maximum speed based on stage capability. Maximum application velocity may be limited by system data rate and system resolution.
  3. Maximum load based on bearing capability. Maximum application load may be limited by acceleration requirements.
  4. Available with Aerotech controllers.
  5. Specifications are for single-axis systems, measured 50 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.

 

  • ALS5000

Dimensions

  • ALS5000 Dimensions

Ordering Information

Ordering Example

SeriesTravel (mm)Mounting and Grid PatternMotor and Magnet TrackLinear EncoderLimitsOptionsStage Construction
ALS50 045 -M -10-S -LT45X5 -NC    

Ordering Options

SeriesTravel (mm)Mounting and Grid PatternMotor and Magnet TrackLinear EncoderLimitsOptionsStage Construction
  010
020
030
045
060
075
090
100
-M
-U
-10-S
-10-P
-LTnnAS
-LTnnX5
-LNnnAS
-NC
-NO
-XY-CMS /VAC3
/VAC6
/STEEL

ALS5000 Series Linear Motor Stage

OptionsDescription
ALS50010 100 mm (4 in) travel stage with linear motor and limits
ALS50020 200 mm (8 in) travel stage with linear motor and limits
ALS50030 300 mm (12 in) travel stage with linear motor and limits
ALS50045 450 mm (18 in) travel stage with linear motor and limits
ALS50060 600 mm (24 in) travel stage with linear motor and limits
ALS50075 750 mm (30 in) travel stage with linear motor and limits
ALS50090 900 mm (36 in) travel stage with linear motor and limits
ALS50100 1000 mm (40 in) travel stage with linear motor and limits

Mounting and Grid Pattern

OptionsDescription
-M Metric dimension mounting pattern and holes
-U English dimension mounting pattern and holes

Motor

OptionsDescription
-10-S Brushless linear motor with standard magnet track (BLM-264-A)
-10-P Brushless linear motor with high performance magnet track (BLM-264-A)

Standard Linear Encoders

OptionsDescription
-LT10AS Linear encoder for ALS50010; amplified sine output 1 Vpp (20 µm signal period); requires signal multiplier
-LT20AS Linear encoder for ALS50020; amplified sine output 1 Vpp (20 µm signal period); requires signal multiplier
-LT30AS Linear encoder for ALS50030; amplified sine output 1 Vpp (20 µm signal period); requires signal multiplier
-LT45AS Linear encoder for ALS50045; amplified sine output 1 Vpp (20 µm signal period); requires signal multiplier
-LT60AS Linear encoder for ALS50060; amplified sine output 1 Vpp (20 µm signal period); requires signal multiplier
-LT75AS Linear encoder for ALS50075; amplified sine output 1 Vpp (20 µm signal period); requires signal multiplier
-LT90AS Linear encoder for ALS50090; amplified sine output 1 Vpp (20 µm signal period); requires signal multiplier
-LT100AS Linear encoder for ALS50100; amplified sine output 1 Vpp (20 µm signal period); requires signal multiplier
-LT10X5 Linear encoder for ALS50010; 1.0 micron line driver output
-LT20X5 Linear encoder for ALS50020; 1.0 micron line driver output
-LT30X5 Linear encoder for ALS50030; 1.0 micron line driver output
-LT45X5 Linear encoder for ALS50045; 1.0 micron line driver output
-LT60X5 Linear encoder for ALS50060; 1.0 micron line driver output
-LT75X5 Linear encoder for ALS50075; 1.0 micron line driver output
-LT90X5 Linear encoder for ALS50090; 1.0 micron line driver output
-LT100X5 Linear encoder for ALS50100; 1.0 micron line driver output

High Accuracy Linear Encoders

OptionsDescription
-LN10AS High-accuracy linear encoder for ALS50010; amplified sine output 1 Vpp (4 µm signal period); requires signal multiplier
-LN20AS High-accuracy linear encoder for ALS50020; amplified sine output 1 Vpp (4 µm signal period); requires signal multiplier
-LN30AS High-accuracy linear encoder for ALS50030; amplified sine output 1 Vpp (4 µm signal period); requires signal multiplier
-LN45AS High-accuracy linear encoder for ALS50045; amplified sine output 1 Vpp (4 µm signal period); requires signal multiplier
-LN60AS High-accuracy linear encoder for ALS50060; amplified sine output 1 Vpp (4 µm signal period); requires signal multiplier
-LN75AS High-accuracy linear encoder for ALS50075; amplified sine output 1 Vpp (4 µm signal period); requires signal multiplier
-LN90AS High-accuracy linear encoder for ALS50090; amplified sine output 1 Vpp (4 µm signal period); requires signal multiplier
-LN100AS High-accuracy linear encoder for ALS50100; amplified sine output 1 Vpp (4 µm signal period); requires signal multiplier
  1. Note: Integral signal multipliers available with A3200 amplifier products.

Limits

OptionsDescription
-NC Normally-closed end of travel limit switches (standard)
-NO Normally-open end of travel limit switches

Options

OptionsDescription
-XY-CMS Cable management system for XY assembly; order with X-axis only

Stage Construction Options (Consult Factory)

OptionsDescription
/VAC3 Vacuum preparation of stage to 10-3 torr
/VAC6 Vacuum preparation of stage to 10-6 torr
/STEEL All steel construction

Accessories (to be ordered as separate line item)

OptionsDescription
ALIGNMENT-NPA Non-precision XY assembly
ALIGNMENT-PA10 XY assembly; 10 arc sec orthogonal
ALIGNMENT-PA5 XY assembly; 5 arc sec orthogonal
HALAR High-accuracy system – linear error correction for accuracy and repeatability
HALSF High-accuracy system – improved straightness and flatness