- Long life linear motion guide bearing system
- Ultra-fine resolution
- Integral bellows waycovers
- Low-profile compact design
- Includes brushless, slotless motor
The ATS100 series motor-driven linear stages provide the high resolution and repeatability required for semiconductor wafer testing and fabrication, automated microscope inspection systems and precision micromachining applications.
Outstanding Construction Features
ATS100 series stages are machined from a special cast aluminum alloy to provide a high strength-to-weight ratio and long-term stability. The base is a box design that provides exceptional stiffness and stability.
ATS100 series stages employ a precision-ground ball screw pre-loaded to eliminate backlash, and its nut has wipers to prevent contamination and maintain high accuracy throughout the life of the stage. High-quality, pre-loaded duplex bearings are used to eliminate axial play.
All ATS100 series stages incorporate Linear Motion Guide (LMG) bearings to provide high load capability and high stiffness. The LMG design provides a compact stage with continuous carriage support over the entire travel and good cantilevered load capability. Integral wipers on the bearing trucks help ensure stage travel life. Highly accurate optical limit switches and end stops are also standard.
Integral bellows-type waycovers protect the drive and bearing system from contamination. Metal surfaces are protected with an attractive clear anodized finish. Both metric (standard) and English mounting and bolt-hole patterns are available.
The ATS100 sets the standard for precision performance in a compact package. With the HALAR option, the ATS100 is capable of submicron accuracy and an impressive repeatability of 0.3 µm.
Motors and Drives
Included with the ATS100 series stages are Aerotech's BMS series brushless rotary motors. This motor has all of the advantages of a brushless motor – high acceleration, no brushes to wear and lower heating – yet has zero cogging for extremely smooth motion and accuracy. Aerotech manufactures a wide range of matching drives and controls to provide a fully integrated and optimized motion solution.
Standard options include a precision right-angle bracket for multi-axis assembly and vacuum preparation to 10-6 torr.
|Travel||50 mm||100 mm||150 mm||200 mm|
|Drive System||Precision Ground Ball Screw/Brushless Servomotor (BMS60-A-D25-E1000H)|
|Bus Voltage||Up to 160 VDC|
|Continuous Current||Apk||Up to 2.3 A|
|Arms||Up to 1.6 A|
|Feedback||Noncontact Rotary Encoder (1000 line)|
|Resolution||2 mm/rev lead||0.5 µm @ 4000 steps/rev Motor Resolution|
|Maximum Travel Speed(1)||100 mm/s|
|Maximum Load(2)||Horizontal||25.0 kg|
|Accuracy||HALAR(3)||±0.5 µm||±0.5 µm||±0.75 µm||±1.0 µm|
|Standard||±2.0 µm||±3.0µm||±5.0 µm||±6.0 µm|
|Repeatability (Bidirectional)||HALAR(3)||±0.3 µm|
|Straightness and Flatness||Differential||HALSF||1.0 µm/25 mm|
|Standard||2.0 µm/25 mm|
|HALSF||±0.5 µm||± 1.0 µm||±1.5 µm||±1.75 µm|
|Standard||±1.0 µm||±2.0 µm||±2.0 µm||±3.0 µm|
|Pitch and Yaw||5 arc sec||8 arc sec||10 arc sec||12 arc sec|
|Nominal Stage Weight||Less Motor||1.6 kg||1.7 kg||1.8 kg||2.0 kg|
|With Motor||2.7 kg||2.8 kg||2.9 kg||3.1 kg|
|Construction||Aluminum Body/Stage and Table; Clear Anodize Finish|
- Excessive duty cycle may impact stage accuracy.
- Payload specifications are for single axis systems and based on ball screw and bearing life of 2500 km (100 million inches) of travel.
- Available with Aerotech controllers.
- Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
|Series||Travel (mm)||Stage Construction Options||Mounting and |
-LGR MTR COUPLING
ATS100 Series Linear Ball-Screw Stage
|ATS100-050||50 mm (2 in) travel stage with limits|
|ATS100-100||100 mm (4 in) travel stage with limits|
|ATS100-150||150 mm (6 in) travel stage with limits|
|ATS100-200||200 mm (8 in) travel stage with limits|
|/VAC3||Vacuum preparation of stage to 10-3 torr|
|/VAC6||Vacuum preparation of stage to 10-6 torr|
|/STEEL||All steel construction|
Mounting and Grid Pattern
|-M||Metric dimension mounting pattern and holes|
|-U||English dimension mounting pattern and holes|
|-20P||2 mm/rev precision-ground ball screw|
|-BMS||Brushless servomotor with connectors and 1000-line encoder; requires cable (BMS60-A-D25-E1000H/)|
|-SM||Stepping motor with connector and home marker pulse (one per rev); requires cable (50SMB2-HM/)|
|-NM||No motor or encoder|
|-NC||Normally-closed end of travel limit switches (standard)|
|-NO||Normally-open end of travel limit switches|
|-9DU||With 9-pin limit connector|
|-FLY||With flying leads|
|-BRK||24 VDC spring-set motor brake for NEMA 23 motor|
|-FB||Fold-back motor configuration|
|-NO COUPLING||No coupling|
|-STD COUPLING||0.25 in coupling|
|-LGR MTR COUPLING||0.375 in coupling|
Accessories (to be ordered as separate line item)
|ALIGNMENT-NPA||Non-precision XY assembly|
|ALIGNMENT-NPAZ||Non-precision XZ or YZ assembly|
|ALIGNMENT-PA10||XY assembly; 10 arc sec orthogonal|
|ALIGNMENT-PA10Z||XZ or YZ assembly with L-bracket; 10 arc second orthogonal|
|ALIGNMENT-PA5||XY assembly; 5 arc sec orthogonal|
|ALIGNMENT-PA5Z||XZ or YZ assembly with L-bracket; 5 arc second orthogonal|
|HDZ1||English right angle L-bracket (ATS100-050 thru ATS100-100)|
|HDZ1U/VAC6||VAC6 prepared English right angle L-bracket (ATS100-050 thru ATS100-100)|
|HDZ1M||Metric right angle L-bracket (ATS100-050 thru ATS100-100)|
|HDZ1M/VAC6||VAC6 prepared metric right angle L-bracket (ATS100-050 thru ATS100-100)|
|HDZ1L||English right angle L-bracket (ATS100-150 thru ATS100-200)|
|HDZ1L/VAC6||VAC6 prepared English right angle L-bracket (ATS100-150 thru ATS100-200)|
|HDZ1LM||Metric right angle L-bracket (ATS100-150 thru ATS100-200)|
|HDZ1LM/VAC6||VAC6 prepared metric right angle L-bracket (ATS100-150 thru ATS100-200)|
|MP100U||English base mounting plate|
|MP100U/VAC6||VAC6 prepared English base mounting plate|
|MP100M||Metric base mounting plate|
|MP100M/VAC6||VAC6 prepared metric base mounting plate|
|HALAR||High-accuracy system linear error correction for accuracy and repeatability|
|HALSF||High-accuracy system improved straightness and flatness|
*Please go HERE for complete information on XY, XZ and YZ assembly options.
*Please go HERE for complete information on motor orientation options.