- Rugged construction
- Hard-coated tabletop and waycovers
- Optional high-accuracy, noncontact linear encoder
- Sealed design with optional air purge
The ATS5000 was designed to meet the needs of the most demanding applications. A rigid base, fully sealed metal waycovers and high-performance brushless servomotor make the ATS5000 the stage of choice in industrial applications such as laser machining, ceramic scribing or any other application requiring high accuracy in a production environment.
The greatest attention to detail is evident in all aspects of the ATS5000's design. The tabletop utilizes stainless steel Helicoil™ inserts to protect mounting holes against thread wear. An integral metal waycover is provided to protect the stage from hot sparks or debris. Both the metal waycover and tabletop are treated with a hardcoat (Rockwell 62 hardness) that is scratch-resistant and provides outstanding protection in the harshest applications.
To further provide the stage with protection from a caustic environment, the ATS5000 utilizes Aerotech's unique tensioned side-strap system. The straps are in a vertical orientation that prevents debris from accumulating on top of them and are tensioned to create a tight seal. An optional air-purge fitting is available that allows air to be forced into the body of the stage. This creates a positive pressure that prevents any particulate, no matter how fine, from entering the stage.
To aid in system assembly, the base mounting holes are located outboard of the stage. Therefore, the stage can be mounted without removing the hardcover.
The base of the ATS5000 is machined from special aluminum alloy tooling plate to provide high stiffness and long-term stability. Sealed linear motion guide bearings with integral wipers are incorporated to provide excellent payload capability and long-life, even with heavy offset loads.
Noncontact linear encoders with submicron repeatabilities are available on all ATS5000 series stages. Optional HALAR and HALSF factory calibrations are available that further increase the standard accuracy, straightness and flatness specifications to even finer precision.
Motor and Drives
Included with all ATS5000 series stages is Aerotech's high performance BM series brushless servomotor. Aerotech manufactures a wide range of matching drives and controls to provide a fully integrated and optimized solution. Optional brushless and slotless (BMS series), NEMA 34 DC brush and microstepping motors are also offered. For maximum performance, a linear motor version is available – please refer to the ALS5000.
|Travel||300 mm||450 mm||600 mm||750 mm||900 mm||1000 mm|
|Drive System||Super-Precision Ground Ball Screw/Brushless Servomotor (BM250-MS-E1000H)|
|Bus Voltage||Up to 320 VDC|
|Continuous Current||Apk||Up to 10.5 A|
|Arms||Up to 7.4 A|
|Feedback||Noncontact Rotary Encoder (1000 line)|
|Resolution||4 mm/rev Lead||1.0 µm @ 4000 steps/rev Motor Resolution|
|0.2 in/rev Lead||1.25 µm @ 4000 steps/rev Motor Resolution|
|LT Linear Encoder||0.005 µm - 1.0 µm|
|Maximum Travel Speed(1)||4 mm/rev Lead||250 mm/s||200 mm/s|
|0.2 in/rev Lead||300 mm/s||250 mm/s||200 mm/s|
|Maximum Load||Horizontal||135.0 kg|
|Accuracy||Ball Screw||HALAR(3)||±1.0 µm||±1.5 µm||±2.0 µm||±2.0 µm||±3.0 µm||±3.0 µm|
|Standard||+0.0, -12.0 µm||+0.0, -18.0 µm||+0.0, -24.0 µm||+0.0, -30.0 µm||+0.0, -36.0 µm||+0.0, -36.0 µm|
|Standard||±12.0 µm||±18.0 µm||±24.0 µm||±30.0 µm||±36.0 µm||±40.0 µm|
|Bidirectional Repeatability||Ball Screw||HALAR(3)||±0.5 µm|
|Straightness and Flatness||HALSF||±1.5 µm||±2.5 µm||±3.0 µm||±3.5 µm||±4.5 µm||±5.0 µm|
|Standard||±3.0 µm||±4.0 µm||±6.0 µm||±7.0 µm||±8.0 µm||±9.0 µm|
|Pitch and Yaw||10 arc sec||14 arc sec||17 arc sec||20 arc sec||25 arc sec||25 arc sec|
|Nominal Stage Weight||Less Motor||35.0 kg||42 kg||50 kg||62 kg||68 kg||72 kg|
|With Motor||39.0 kg||46 kg||54 kg||66 kg||71 kg||76 kg|
|Construction||Aluminum Body/Stage; Hardcoated Table (62 Rockwell Hardness);
Textured Epoxy (Polane-T) Pebble Grey Paint
- Excessive duty cycle may impact stage accuracy.
- Payload specifications are for single-axis system and based on ball screw and bearing life of 2500 km (100 million inches) of travel.
- Available with Aerotech controllers.
- Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
|Series||Travel (mm)||Stage Construction Options||Mounting and Grid Pattern||Drive Screw||Motor||Limits||Linear Encoder||Options|
ATS5000 Series Linear Ball-Screw Stage
|ATS50030||300 mm (12 in) travel stage with ground ball screw and limits|
|ATS50045||450 mm (18 in) travel stage with ground ball screw and limits|
|ATS50060||600 mm (24 in) travel stage with ground ball screw and limits|
|ATS50075||750 mm (30 in) travel stage with ground ball screw and limits|
|ATS50090||900 mm (36 in) travel stage with ground ball screw and limits|
|ATS50100||1000 mm (40 in) travel stage with ground ball screw and limits|
Stage Construction Options
|/VAC3||Vacuum preparation of stage to 10-3 torr|
|/VAC6||Vacuum preparation of stage to 10-6 torr|
|/STEEL||All steel construction|
Mounting and Grid Pattern
|-M||Metric dimension mounting pattern and holes|
|-U||English dimension mounting pattern and holes|
|-02P||0.2 inch per rev drive-screw lead|
|-40P||4 mm per rev drive-screw lead|
|-BM||Brushless servomotor with connectors and 1000-line encoder; requires cable (BM250-MS-E1000H/)|
|-NM||No motor or encoder|
|-BMS||Brushless, slotless servomotor with connectors and 1000-line encoder; requires cable (BMS280-AH-MS-E1000H)|
|-NC||Normally-closed end of travel limit switches (standard)|
|-NO||Normally-open end of travel limit switches|
|-9DU||With 9-pin limit connector|
|-FLY||With flying leads|
Standard Linear Encoders
|-LT30AS||Linear encoder for ATS50030; amplified sine output 1 Vpp (20 µm signal period); requires signal multiplier|
|-LT45AS||Linear encoder for ATS50045; amplified sine output 1 Vpp (20 µm signal period); requires signal multiplier|
|-LT60AS||Linear encoder for ATS50060; amplified sine output 1 Vpp (20 µm signal period); requires signal multiplier|
|-LT75AS||Linear encoder for ATS50075; amplified sine output 1 Vpp (20 µm signal period); requires signal multiplier|
|-LT90AS||Linear encoder for ATS50090; amplified sine output 1 Vpp (20 µm signal period); requires signal multiplier|
|-LT100AS||Linear encoder for ATS50100 amplified sine output 1 Vpp (20 µm signal period); requires signal multiplier|
|-LT30X5||Linear encoder for ATS50030; 1.0 micron line driver output|
|-LT45X5||Linear encoder for ATS50045; 1.0 micron line driver output|
|-LT60X5||Linear encoder for ATS50060; 1.0 micron line driver output|
|-LT75X5||Linear encoder for ATS50075; 1.0 micron line driver output|
|-LT90X5||Linear encoder for ATS50090; 1.0 micron line driver output|
|-LT100X5||Linear encoder for ATS50100; 1.0 micron line driver output|
|-BRK34||24 VDC spring-set motor brake for NEMA 34 motor|
|-P5||Air-purge pressure fittings|
|-FB||Foldback motor kit|
|-FB-BRK||Foldback motor kit for use with NEMA 34 brake (brake between stage and foldback)|
Accessories (to be ordered as separate line item)
|HDZ5||Right angle L-bracket to mount any ATS5000 series stage; English bolt pattern|
|HDZ5M||Right angle L-bracket to mount any ATS5000 series stage; metric bolt pattern|
|HALAR||High-accuracy system linear error correction for accuracy and repeatability|
|HALSF||High-accuracy system improved straightness and flatness|
|ALIGNMENT-NPA||Non-precision XY assembly|
|ALIGNMENT-NPAZ||Non-precision XZ or YZ assembly|
|ALIGNMENT-PA10||XY assembly; 10 arc sec orthogonal|
|ALIGNMENT-PA10Z||XZ or YZ assembly with L-bracket; 10 arc second orthogonal|
|ALIGNMENT-PA5||XY assembly; 5 arc sec orthogonal|
|ALIGNMENT-PA5Z||XZ or YZ assembly with L-bracket; 5 arc second orthogonal|
*Please go HERE for complete information on XY, XZ and YZ assembly options.
*Please go HERE for complete information on motor orientation options.