ATS5000 Mechanical-Bearing Ball-Screw Linear Stage

Description

Design Features

  • Rugged construction
  • Hard-coated tabletop and waycovers
  • Optional high-accuracy, noncontact linear encoder
  • Sealed design with optional air purge

The ATS5000 was designed to meet the needs of the most demanding applications. A rigid base, fully sealed metal waycovers and high-performance brushless servomotor make the ATS5000 the stage of choice in industrial applications such as laser machining, ceramic scribing or any other application requiring high accuracy in a production environment.

Rugged Construction

The greatest attention to detail is evident in all aspects of the ATS5000's design. The tabletop utilizes stainless steel Helicoil inserts to protect mounting holes against thread wear. An integral metal waycover is provided to protect the stage from hot sparks or debris. Both the metal waycover and tabletop are treated with a hardcoat (Rockwell 62 hardness) that is scratch-resistant and provides outstanding protection in the harshest applications.

To further provide the stage with protection from a caustic environment, the ATS5000 utilizes Aerotech's unique tensioned side-strap system. The straps are in a vertical orientation that prevents debris from accumulating on top of them and are tensioned to create a tight seal. An optional air-purge fitting is available that allows air to be forced into the body of the stage. This creates a positive pressure that prevents any particulate, no matter how fine, from entering the stage.

To aid in system assembly, the base mounting holes are located outboard of the stage. Therefore, the stage can be mounted without removing the hardcover.

High Performance

The base of the ATS5000 is machined from special aluminum alloy tooling plate to provide high stiffness and long-term stability. Sealed linear motion guide bearings with integral wipers are incorporated to provide excellent payload capability and long-life, even with heavy offset loads.

Noncontact linear encoders with submicron repeatabilities are available on all ATS5000 series stages. Optional HALAR and HALSF factory calibrations are available that further increase the standard accuracy, straightness and flatness specifications to even finer precision.

Motor and Drives

Included with all ATS5000 series stages is Aerotech's high performance BM series brushless servomotor. Aerotech manufactures a wide range of matching drives and controls to provide a fully integrated and optimized solution. Optional brushless and slotless (BMS series), NEMA 34 DC brush and microstepping motors are also offered. For maximum performance, a linear motor version is available – please refer to the ALS5000.

Specifications

ATS5000 Specifications

Model ATS50030 ATS50045 ATS50060 ATS50075 ATS50090 ATS50100
Travel 300 mm 450 mm 600 mm 750 mm 900 mm 1000 mm
Drive System Super-Precision Ground Ball Screw/Brushless Servomotor (BM250-MS-E1000H)
Bus Voltage Up to 320 VDC
Continuous Current Apk Up to 10.5 A
Arms Up to 7.4 A
Feedback Noncontact Rotary Encoder (1000 line)
Resolution 4 mm/rev Lead 1.0 µm @ 4000 steps/rev Motor Resolution
0.2 in/rev Lead 1.25 µm @ 4000 steps/rev Motor Resolution
LT Linear Encoder 0.005 µm - 1.0 µm
Maximum Travel Speed(1) 4 mm/rev Lead 250 mm/s 200 mm/s
0.2 in/rev Lead 300 mm/s 250 mm/s 200 mm/s
Maximum Load Horizontal 135.0 kg
Vertical 45.0 kg
Side 45.0 kg
Accuracy Ball Screw HALAR(3) ±1.0 µm ±1.5 µm ±2.0 µm ±2.0 µm ±3.0 µm ±3.0 µm
Standard +0.0, -12.0 µm +0.0, -18.0 µm +0.0, -24.0 µm +0.0, -30.0 µm +0.0, -36.0 µm +0.0, -36.0 µm
LT HALAR(3) ±1.0 µm
Standard ±12.0 µm ±18.0 µm ±24.0 µm ±30.0 µm ±36.0 µm ±40.0 µm
Bidirectional Repeatability Ball Screw HALAR(3) ±0.5 µm
Standard ±1.0 µm
LT ±0.5 µm
Straightness and Flatness HALSF ±1.5 µm ±2.5 µm ±3.0 µm ±3.5 µm ±4.5 µm ±5.0 µm
Standard ±3.0 µm ±4.0 µm ±6.0 µm ±7.0 µm ±8.0 µm ±9.0 µm
Pitch and Yaw 10 arc sec 14 arc sec 17 arc sec 20 arc sec 25 arc sec 25 arc sec
Nominal Stage Weight Less Motor 35.0 kg 42 kg 50 kg 62 kg 68 kg 72 kg
With Motor 39.0 kg 46 kg 54 kg 66 kg 71 kg 76 kg
Construction Aluminum Body/Stage; Hardcoated Table (62 Rockwell Hardness);
Textured Epoxy (Polane-T) Pebble Grey Paint
  1. Excessive duty cycle may impact stage accuracy.
  2. Payload specifications are for single-axis system and based on ball screw and bearing life of 2500 km (100 million inches) of travel.
  3. Available with Aerotech controllers.
  4. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
  • Cantilevered load capability of the ATS5000

Dimensions

  • ATS5000
  • HDZ5 Bracket

Ordering Information

Ordering Example

ATS50 030 -M -40P -BM -NC

Ordering Options

Series Travel (mm) Stage Construction Options Mounting and Grid Pattern Drive Screw Motor Limits Linear Encoder Options
ATS50 030
045
060
075
090
100
/VAC3
/VAC6
/STEEL

-M
-U
-02P
-40P
-BM
-NM
-BMS
-NC
-NO
-9DU
-FLY
-LTnnX5
-LTnnAS
-BRK34
-P5
-FB
-FB-BRK

ATS5000 Series Linear Ball-Screw Stage

OptionDescription
ATS50030 300 mm (12 in) travel stage with ground ball screw and limits
ATS50045 450 mm (18 in) travel stage with ground ball screw and limits
ATS50060 600 mm (24 in) travel stage with ground ball screw and limits
ATS50075 750 mm (30 in) travel stage with ground ball screw and limits
ATS50090 900 mm (36 in) travel stage with ground ball screw and limits
ATS50100 1000 mm (40 in) travel stage with ground ball screw and limits

Stage Construction Options

OptionDescription
/VAC3 Vacuum preparation of stage to 10-3 torr
/VAC6 Vacuum preparation of stage to 10-6 torr
/STEEL All steel construction

Mounting and Grid Pattern

OptionDescription
-M Metric dimension mounting pattern and holes
-U English dimension mounting pattern and holes

Drive Screw

OptionDescription
-02P 0.2 inch per rev drive-screw lead
-40P 4 mm per rev drive-screw lead

Motor

OptionDescription
-BM Brushless servomotor with connectors and 1000-line encoder; requires cable (BM250-MS-E1000H/)
-NM No motor or encoder
-BMS Brushless, slotless servomotor with connectors and 1000-line encoder; requires cable (BMS280-AH-MS-E1000H)

Limits

OptionDescription
-NC Normally-closed end of travel limit switches (standard)
-NO Normally-open end of travel limit switches
-9DU With 9-pin limit connector
-FLY With flying leads

Standard Linear Encoders

OptionDescription
-LT30AS Linear encoder for ATS50030; amplified sine output 1 Vpp (20 µm signal period); requires signal multiplier
-LT45AS Linear encoder for ATS50045; amplified sine output 1 Vpp (20 µm signal period); requires signal multiplier
-LT60AS Linear encoder for ATS50060; amplified sine output 1 Vpp (20 µm signal period); requires signal multiplier
-LT75AS Linear encoder for ATS50075; amplified sine output 1 Vpp (20 µm signal period); requires signal multiplier
-LT90AS Linear encoder for ATS50090; amplified sine output 1 Vpp (20 µm signal period); requires signal multiplier
-LT100AS Linear encoder for ATS50100 amplified sine output 1 Vpp (20 µm signal period); requires signal multiplier
-LT30X5 Linear encoder for ATS50030; 1.0 micron line driver output
-LT45X5 Linear encoder for ATS50045; 1.0 micron line driver output
-LT60X5 Linear encoder for ATS50060; 1.0 micron line driver output
-LT75X5 Linear encoder for ATS50075; 1.0 micron line driver output
-LT90X5 Linear encoder for ATS50090; 1.0 micron line driver output
-LT100X5 Linear encoder for ATS50100; 1.0 micron line driver output

Options

OptionDescription
-BRK34 24 VDC spring-set motor brake for NEMA 34 motor
-P5 Air-purge pressure fittings
-FB Foldback motor kit
-FB-BRK Foldback motor kit for use with NEMA 34 brake (brake between stage and foldback)

Accessories (to be ordered as separate line item)

OptionDescription
HDZ5 Right angle L-bracket to mount any ATS5000 series stage; English bolt pattern
HDZ5M Right angle L-bracket to mount any ATS5000 series stage; metric bolt pattern
HALAR High-accuracy system linear error correction for accuracy and repeatability
HALSF High-accuracy system improved straightness and flatness
ALIGNMENT-NPA Non-precision XY assembly
ALIGNMENT-NPAZ Non-precision XZ or YZ assembly
ALIGNMENT-PA10 XY assembly; 10 arc sec orthogonal
ALIGNMENT-PA10Z XZ or YZ assembly with L-bracket; 10 arc second orthogonal
ALIGNMENT-PA5 XY assembly; 5 arc sec orthogonal
ALIGNMENT-PA5Z XZ or YZ assembly with L-bracket; 5 arc second orthogonal

*Please go HERE for complete information on XY, XZ and YZ assembly options.

*Please go HERE for complete information on motor orientation options.