MPS50SL Mechanical-Bearing Ball-Screw Linear Stage
Description
Design Features
- Compact 50 mm width with travel to 50 mm
- Precision ground ball-screw or lead-screw drive
- DC servo or stepper motor
- Crossed-roller bearings
- High resolution (0.1 µm), repeatability (±0.75 µm) and accuracy (±1.5 µm)
- High vacuum capable
- Compact multi-axis configurations
The MPS50SL is a compact, high-performance linear positioning stage that is perfect for the confines of the laboratory while providing the high reliability required in a production environment. It is the ideal choice for measurement, testing, accurate alignment and component assembly in space-constrained applications.
High Accuracy
The precision ground ball-screw or lead screw provides exceptional accuracy, repeatability and ultra-fine positioning resolution capability to 0.1 micron. The DC servomotor is equipped with a rotary encoder. The crossed-roller linear bearings provide smooth travel and excellent payload characteristics.
Optional Vacuum Preparation
The MPS50SL is available with optional vacuum preparation to 10-6 torr. It is the perfect compact stage choice for today's demanding vacuum applications in markets such as semiconductor manufacturing and inspection, optics fabrication and military/aerospace.
Highly Configurable
An optional breadboard mounting plate provides direct mounting to both English and metric breadboards. Any of the models can be mounted in an XY configuration and, with the right-angle L-bracket, in XYZ configurations. It can also be directly mounted to the larger MPS75SL stage.
The MPS50SL is a member of the MPS (Miniature Positioning Stage) family of linear, rotary, goniometer and vertical lift and Z stages. Two or more stages can easily be mounted together in numerous combinations using standardized mounting patterns and adapter plates.
Specifications
Mechanical Specifications
| Model | MPS50SL-25 | MPS50SL-50 | ||
|---|---|---|---|---|
| Travel | 25 mm | 50 mm | ||
| Accuracy | 1.0 mm/rev Ball Screw | Standard | ±3.0 µm | ±4.0 µm |
| HALAR(1) | ±1.5 µm | ±1.5 µm | ||
| 0.5 mm/rev Lead Screw | Standard | ±4.0 µm | ±6.0 µm | |
| HALAR(1) | ±2.0 µm | ±2.5 µm | ||
| Resolution | 1.0 mm/rev Ball Screw | 0.1 µm | 0.1 µm | |
| 0.5 mm/rev Lead Screw | 0.1 µm | 0.1 µm | ||
| Repeatability (Bidirectional)(1) | 1.0 mm/rev Ball Screw | ±0.75 µm | ±0.75 µm | |
| 0.5 mm/rev Lead Screw | ±1.0 µm | ±1.0 µm | ||
| Straightness | ±2.0 µm | ±3.0 µm | ||
| Flatness | ±2.0 µm | ±3.0 µm | ||
| Maximum Speed | 1.0 mm/rev Ball Screw | DC Motor | 5 mm/s | 5 mm/s |
| SM Motor | 1 mm/s | 1 mm/s | ||
| 0.5 mm/rev Lead Screw | DC Motor | 2.5 mm/s | 2.5 mm/s | |
| SM Motor | 0.5 mm/s | 0.5 mm/s | ||
| Load Capacity(2) | Horizontal | 5 kg | 5 kg | |
| Side | 5 kg | 5 kg | ||
| Vertical | 2.5 kg | 2.5 kg | ||
| Stage Mass | 0.85 kg | 0.9 kg | ||
| Material | Anodized Aluminum Body | |||
- With Aerotech controllers.
- Payload specifications are single-axis system.
- Excessive duty cycle may impact stage accuracy.
- Specifications are for single-axis systems measured 50 mm above the tabletop.
Electrical Specifications
| Model | DC MOTOR (and VAC) | SM MOTOR (and VAC) |
|---|---|---|
| Drive System | DC Brush Servomotor with 14:1 Gearbox | Bipolar Stepper Motor with 43:1 Gearbox |
| Feedback | 512 lines/rev Rotary Encoder | N/A |
| Maximum Bus Voltage | 48 VDC | 24 VDC |
| Limit Switches | 5 V, Normally Closed | 5 V, Normally Closed |
Recommended Controller
| Model | DC MOTOR | SM MOTOR | |
|---|---|---|---|
| Multi-Axis | A3200 | Npaq Npaq MR Ndrive MP |
Npaq Npaq MR Ndrive MP |
| Ensemble | Epaq Epaq MR Ensemble MP |
Epaq Epaq MR Ensemble MP |
|
| Single Axis | Soloist | Soloist MP | Soloist MP |
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MPS50SL Load Curves 
Dimensions
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MPS50SL 
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MPS50SL Mounting Plates 
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MPS50SL Mounting Bracket 
Ordering Information
MPS50SL Series Drive-Screw Stage (highlighted options available from Aerotech's Fast Delivery Service program)
| Option | Description |
|---|---|
| -025 | 25 mm travel stage with drive screw and limits |
| -050 | 50 mm travel stage with drive screw and limits |
Stage Construction Option
| Option | Description |
|---|---|
| -VAC | Vacuum preparation of the stage and motor to 10-6 torr |
Tabletop
| Option | Description |
|---|---|
| -TTM | Metric pattern/thread tabletop |
Drive Screw
| Option | Description |
|---|---|
| -B1MM | 1 mm/rev precision-ground ball screw |
| -L0.5MM | 0.5 mm/rev ground lead screw |
Motor
| Option | Description |
|---|---|
| -DC | DC servomotor with 3 meter integral cable |
| -SM | Stepping motor with 3 meter integral cable |
Limits
| Option | Description |
|---|---|
| -5V-NC | 5 V normally-closed limits |
Options
| Option | Description |
|---|---|
| -MP | Breadboard mounting plate |
Testing
| Option | Description |
|---|---|
| -PLOTS | Accuracy and repeatability plots |
| -NO PLOTS | No performance plots |
Accessories (to be ordered as separate line item)
| Option | Description |
|---|---|
| HALAR | High-accuracy system linear error correction for accuracy and repeatability |
| HDZ-MPS50SL | Right-angle L-bracket |
| HDZ-MPS50SL-VAC | VAC6 prepared right angle L-bracket |
| ALIGNMENT-NPA | Non-precision XY assembly |
| ALIGNMENT-NPAZ | Non-precision YZ assembly |
| ALIGNMENT-PA10 | XY assembly; 10 arc sec orthogonal |
| ALIGNMENT-PA10Z | XZ or YZ assembly; 10 arc sec orthogonal |
| ALIGNMENT-PA5 | XY assembly; 5 arc sec orthogonal |
| ALIGNMENT-PA5Z | XZ or YZ assembly; 5 arc sec orthogonal |