MPS75SL Mechanical-Bearing Ball-Screw Linear Stage
Description
Design Features
- Compact 75 mm width with travel to 100 mm
- Precision ground ball-screw drive
- DC servo or stepper motor
- Anti-creep crossed-roller bearings
- High resolution (0.1 µm), repeatability (±0.75 µm) and accuracy (±1.0 µm)
- High-vacuum compatible
- Optional bellows waycovers
- Compact multi-axis configurations
The MPS75SL is a compact, high-performance linear positioning stage that is perfect for the confines of the laboratory while providing the high reliability required in a production environment. It is the ideal choice for measurement, testing, accurate alignment and component assembly.
High Accuracy
The precision ground ball-screw provides exceptional accuracy, repeatability and ultra-fine positioning resolution capability to 0.1 micron. The DC servomotor is equipped with a rotary encoder. The anti-creep crossed-roller linear bearings provide smooth travel and excellent payload characteristics.
Optional Vacuum Preparation
The MPS75SL is available with optional vacuum preparation to 10-6 torr. It is the perfect compact stage choice for today's demanding vacuum applications in markets such as semiconductor manufacturing and inspection, optics fabrication and military/aerospace.
Highly Configurable
An optional breadboard mounting plate provides direct mounting to both English and metric breadboards. Bellows waycovers are available for use in dusty environments. Any of the models can be mounted in an XY configuration and, with the right-angle L-bracket, in XYZ configurations. It can also be mounted with the smaller MPS50SL stage.
The MPS75SL is a member of the MPS (Miniature Positioning Stage) family of linear, rotary, goniometer and vertical lift and Z stages. Two or more stages can easily be mounted together in numerous combinations using standardized mounting patterns and adapter plates.
Specifications
Mechanical Specifications
| Model | MPS75SL-025 | MPS75SL-050 | MPS75SL-075 | MPS75SL-100 | ||
|---|---|---|---|---|---|---|
| Travel | 25 mm | 50 mm | 75 mm | 100 mm | ||
| Accuracy | Standard | ±2.5 µm | ±3.0 µm | ±3.5 µm | ±4.0 µm | |
| HALAR(1) | ±1.0 µm | ±1.0 µm | ±1.5 µm | ±1.5 µm | ||
| Resolution | DC Motor | 0.1 µm | ||||
| SM Motor (and VAC) | 0.1 µm | |||||
| DC Motor (VAC) | 0.5 µm | |||||
| Repeatability (Bidirectional)(1) | ±0.75 µm | |||||
| Straightness | ±2.0 µm | ±2.0 µm | ±3.0 µm | ±3.0 µm | ||
| Flatness | ±2.0 µm | ±2.0 µm | ±3.0 µm | ±3.0 µm | ||
| Maximum Speed | 1.0 mm/rev Ball Screw | DC Motor | 50 mm/s | 50 mm/s | 50 mm/s | 35 mm/s |
| SM Motor | 30 mm/s | 30 mm/s | 30 mm/s | 30 mm/s | ||
| Load Capacity(2) | Horizontal | 15 kg | ||||
| Side | 15 kg | |||||
| Vertical | 4 kg | |||||
| Stage Mass | 1.7 kg | 1.8 kg | 1.9 kg | 2.0 kg | ||
| Material | Anodized Aluminum Body | |||||
- With Aerotech controllers.
- Payload specifications are single-axis system.
- Excessive duty cycle may impact stage accuracy.
- Specifications are for single-axis systems measured 50 mm above the tabletop.
- Contact factory for specifications of stages with bellows option.
Electrical Specifications
| Model | DC MOTOR | SM MOTOR | DC MOTOR (VAC) | SM MOTOR (VAC) |
|---|---|---|---|---|
| Drive System | DC Brush Servomotor | Bipolar Stepper Motor | DC Brush Servomotor - VAC | Bipolar Stepper Motor - VAC |
| Feedback | 12,000 lines/rev Rotary Encoder | N/A | 2048 lines/rev Rotary Encoder | N/A |
| Maximum Bus Voltage | 48 VDC | 24 VDC | 48 VDC | 24 VDC |
| Limit Switches | 5V, Normally Open | |||
Recommended Controller
| Model | DC MOTOR | SM MOTOR | DC MOTOR (VAC) | SM MOTOR (VAC) | |
|---|---|---|---|---|---|
| Multi-Axis | A3200 | Npaq Npaq MR Ndrive MP |
Npaq Npaq MR Ndrive MP |
Npaq Npaq MR Ndrive MP |
Npaq Npaq MR Ndrive MP |
| Ensemble | Epaq Epaq MR Ensemble MP |
Epaq Epaq MR Ensemble MP |
Epaq Epaq MR Ensemble MP |
Epaq Epaq MR Ensemble MP |
|
| Single Axis | Soloist | Soloist MP | Soloist MP | Soloist MP | Soloist MP |
-
MPS75SL Load Curves 
Dimensions
-
MPS75SL 
-
MPS75SL Bellows Option 
-
MPS75SL Mounting Plates 
-
HDZ-MPS75SL L-Bracket 
Ordering Information
MPS75SL Series Drive-Screw Stage (highlighted options available from Aerotech's Fast Delivery Service program)
| Options | Description |
|---|---|
| -025 | 25 mm travel stage with drive screw and limits |
| -050 | 50 mm travel stage with drive screw and limits |
| -075 | 75 mm travel stage with drive screw and limits |
| -100 | 100 mm travel stage with drive screw and limits |
Stage Construction Option
| Options | Description |
|---|---|
| -VAC | Vacuum preparation of the stage and motor to 10-6 torr |
Tabletop
| Options | Description |
|---|---|
| -TTM | Metric pattern/thread tabletop |
Drive Screw
| Options | Description |
|---|---|
| -B1MM | 1 mm/rev precision-ground ball screw |
Motor
| Options | Description |
|---|---|
| -DC | DC servomotor with 3 meter integral cable |
| -SM | Stepping motor with 3 meter integral cable |
Limits
| Options | Description |
|---|---|
| -5V-NC | 5 V normally-closed limits |
Way Cover Options
| Options | Description |
|---|---|
| -BELLOWS | Bellows way cover (not available with VAC option) |
Options
| Options | Description |
|---|---|
| -MP | Breadboard mounting plate |
Testing
| Options | Description |
|---|---|
| -PLOTS | Accuracy and repeatability plots |
| -NO PLOTS | No performance plots |
Accessories (to be ordered as separate line item)
| Options | Description |
|---|---|
| HALAR | High-accuracy system linear error correction for accuracy and repeatability |
| HDZ-MPS75SL | Right-angle L-bracket |
| HDZ-MPS75SL-VAC | VAC 6 prepared right angle L-bracket |
| ALIGNMENT-NPA | Non-precision XY assembly |
| ALIGNMENT-NPAZ | Non-precision YZ assembly |
| ALIGNMENT-PA10 | XY assembly; 10 arc sec orthogonal |
| ALIGNMENT-PA10Z | XZ or YZ assembly; 10 arc sec orthogonal |
| ALIGNMENT-PA5 | XY assembly; 5 arc sec orthogonal |
| ALIGNMENT-PA5Z | XZ or YZ assembly; 5 arc sec orthogonal |