PRO165LM Mechanical-Bearing Direct-Drive Linear Stage

Description

Design Features

  • Direct-drive linear motor for ultra-precise motion
  • Long-life linear motion guide bearing system
  • Ten models with travels from 100 mm to 1 m
  • Low-cost, high-performance stage
  • Fast delivery

The PRO165LM is a high-performance linear motor stage that is as accurate as it is versatile, providing a cost-effective alternative for precision applications. A linear motion guide bearing system and high-performance brushless linear servomotor make the PRO165LM the stage of choice in industrial applications such as laser machining, medical component manufacturing and other applications requiring high accuracy in a production environment.

Construction Features

Sealed linear motion guide bearings with integral wipers are incorporated to provide excellent payload capability and long life. Both the metal waycover and tabletop are treated with a hardcoat that is scratch-resistant and provides outstanding protection in the harshest applications. The tabletop utilizes stainless steel Helicoil® inserts to protect mounting holes against thread wear. Several tabletop options are available for metric or English mounting, as well as for direct interface with our popular ADRS and AGR rotary stages. In addition, configurable cable management options are available for single- or multi-axis systems.

Linear Motor Drive

Aerotech’s high-power, cog-free, BLMC series linear motor drives the PRO165LM. The non-magnetic forcer coil provides high force with zero cogging for super-smooth velocity and position control. This zero-cogging design is ideal for applications requiring outstanding contour accuracy and smooth velocity profiling. As with all Aerotech linear motor stages, the linear motor has zero backlash, no windup, zero friction and outstanding system responsiveness. The magnetic field of the linear motor is totally self-contained within the U-channel design. Many high-performance applications cannot tolerate the stray magnetic fields generated by flat motor magnet tracks.

High Performance

Noncontact linear encoders with micron-level repeatabilities are standard on all PRO165LM series stages. A line-driver output or amplified sine-wave output encoder is available.

The optional HALAR factory calibration further increases the standard accuracy and repeatability. Aerotech manufactures a wide range of matching drives and controls to provide a fully integrated and optimized motion solution.

Specifications

Mechanical Specifications

ModelPRO165LM-0100PRO165LM-0150PRO165LM-0200PRO165LM-0250
Travel 100 mm 150 mm 200 mm 250 mm
Accuracy(1) Standard ±4.0 µm ±6.0 µm ±8.0 µm ±10.0 µm
HALAR ±1.5 µm ±1.5 µm ±1.5 µm ±2.0 µm
Resolution 250 nm 250 nm 250 nm 250 nm
Bidirectional Repeatability(1) ±0.75 µm ±0.75 µm ±0.75 µm ±0.75 µm
Straightness(1) ±2.5 µm ±3.0 µm ±4.5 µm ±5.0 µm
Flatness(1) ±2.5 µm ±3.0 µm ±4.5 µm ±5.0 µm
Pitch 6 arc sec 7 arc sec 9 arc sec 10 arc sec
Roll 6 arc sec 7 arc sec 9 arc sec 10 arc sec
Yaw 8 arc sec 8 arc sec 12 arc sec 12 arc sec
Maximum Speed 2 m/s
Maximum Acceleration 3 g
Maximum Force (Continuous) 68.2 N
Load Capacity(2) Horizontal 45 kg
Side 45 kg
Moving Mass 2.5 kg
Stage Mass 10 kg 11 kg 12 kg 13 kg
Material Aluminum
MTBF (Mean Time Between Failure) 20,000 Hours
  1. Certified with -PLOTS option.
  2. Axis orientation for on-axis loading is listed. See curves for offset loading behavior.
  3. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
ModelPRO165LM-0300PRO165LM-0400PRO165LM-0500PRO165LM-0600
Travel 300 mm 400 mm 500 mm 600 mm
Accuracy(1) Standard ±11.5 µm ±14.0 µm ±16.0 µm ±17.5 µm
HALAR ±2.0 µm ±2.0 µm ±2.5 µm ±2.5 µm
Resolution 250 nm 250 nm 250 nm 250 nm
Bidirectional Repeatability(1) ±0.75 µm ±0.75 µm ±0.75 µm ±0.75 µm
Straightness(1) ±6.0 µm ±8.0 µm ±9.0 µm ±10.0 µm
Flatness(1) ±6.0 µm ±8.0 µm ±9.0 µm ±10.0 µm
Pitch 12 arc sec 16 arc sec 19 arc sec 22 arc sec
Roll 12 arc sec 16 arc sec 19 arc sec 22 arc sec
Yaw 16 arc sec 20 arc sec 24 arc sec 28 arc sec
Maximum Speed 2 m/s
Maximum Acceleration 3 g
Maximum Force (Continuous) 68.2 N
Load Capacity(2) Horizontal 45 kg
Side 45 kg
Moving Mass 2.5 kg
Stage Mass 14 kg 16 kg 18 kg 20 kg
Material Aluminum
MTBF (Mean Time Between Failure) 20,000 Hours
  1. Certified with -PLOTS option.
  2. Axis orientation for on-axis loading is listed. See curves for offset loading behavior.
  3. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
ModelPRO165LM-0800PRO165LM-1000
Travel 800 mm 1000 mm
Accuracy(1) Standard ±19.0 µm ±20.0 µm
HALAR ±2.5 µm ±2.5 µm
Resolution 250 nm 250 nm
Bidirectional Repeatability(1) ±0.75 µm ±0.75 µm
Straightness(1) ±12.0 µm ±14.0 µm
Flatness(1) ±12.0 µm ±14.0 µm
Pitch 27 arc sec 30 arc sec
Roll 27 arc sec 30 arc sec
Yaw 34 arc sec 38 arc sec
Maximum Speed 2 m/s
Maximum Acceleration 3 g
Maximum Force (Continuous) 68.2 N
Load Capacity(2) Horizontal 45 kg
Side 45 kg
Moving Mass 2.5 kg
Stage Mass 24 kg 28 kg
Material Aluminum
MTBF (Mean Time Between Failure) 20,000 Hours
  1. Certified with -PLOTS option.
  2. Axis orientation for on-axis loading is listed. See curves for offset loading behavior.
  3. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.

Electrical Specifications

Drive System Brushless Linear Servomotor
Feedback Noncontact Linear Encoder
Maximum Bus Voltage 320 VDC
Limit Switches 5 V, Normally Closed
Home Switch Near Center

Recommended Controller

Multi-Axis A3200 Ndrive CP/Ndrive HPe/Npaq
Ensemble Ensemble CP/Ensemble HPe
Single Axis Soloist Soloist CP/Soloist HPe

Dimensions

  • PRO165LM Dimensions
  • Tabletop

Ordering Information

Ordering Example

PRO165LM -0150 -TTM -LTAS -CMS -NONE -PLOTS

Ordering Options

Options in green available from Aerotech's Fast Delivery program.

SeriesTravel (mm)TabletopEncoderCable ManagementLiftingMetrology
PRO165LM -0100
-0150
-0200
-0250
-0300
-0400
-0500
-0600
-0800
-1000
-TTM
-TTU
-TTM-WIPER
-TTU-WIPER
-TT100
-TT150
-TT100-WIPER
-TT150-WIPER
-TTAGR
-TTAGR-WIPER
-LTAS
-LTX50
-xxxx-X-CMS ‑LIFTING
-NONE
-PLOTS
-NO PLOTS

PRO165LM Linear Motor Stage

OptionsDescription
PRO165LM-0100 100 mm travel stage with linear motor and limits
PRO165LM-0150 150 mm travel stage with linear motor and limits
PRO165LM-0200 200 mm travel stage with linear motor and limits
PRO165LM-0250 250 mm travel stage with linear motor and limits
PRO165LM-0300 300 mm travel stage with linear motor and limits
PRO165LM-0400 400 mm travel stage with linear motor and limits
PRO165LM-0500 500 mm travel stage with linear motor and limits
PRO165LM-0600 600 mm travel stage with linear motor and limits
PRO165LM-0800 800 mm travel stage with linear motor and limits
PRO165LM-1000 1000 mm travel stage with linear motor and limits

Tabletop

OptionsDescription
-TTM Metric dimension mounting pattern and holes
-TTU English dimension mounting pattern and holes
-TTM-WIPER Metric dimension mounting pattern and holes with wipers
-TTU-WIPER English dimension mounting pattern and holes with wipers
-TT100 Mounting pattern for ADRS100 rotary stage
-TT150 Mounting pattern for ADRS150 rotary stage
-TT100-WIPER Mounting pattern for ADRS100 rotary stage with wipers
-TT150-WIPER Mounting pattern for ADRS150 rotary stage with wipers
-TTAGR Mounting pattern for AGR series rotary stage
-TTAGR-WIPER Mounting pattern for AGR series rotary stage with wipers

Standard Linear Encoders

OptionsDescription
-LTAS Amplified sine output 1 Vpp (20 μm signal period) requires signal multiplier
-LTX50 Linear encoder; 0.1 micron line driver output

CMS - Cable management

OptionsDescription
‑xxxx‑X‑CMS External cable management system where xxxx = travel (0100-1000 mm) and X = axes (X, XY, XZ, XT, Y, YZ, YT, XYZ, XYT, XZT)

LIFTING

OptionsDescription
‑LIFTING Threaded inserts and lifting lugs; recommended for longer travel stages and XY assemblies; only available for PRO165LM stages of 400 mm travel or greater
-NONE None

METROLOGY

OptionsDescription
-PLOTS Accuracy and repeatability plots
-NO PLOTS No performance plots

Accessories (to be ordered as separate line item)

OptionsDescription
ALIGNMENT-NPA Non-precision XY assembly
ALIGNMENT-NPAZ Non-precision XZ or YZ assembly
ALIGNMENT-PA10 XY assembly; 10 arc second orthogonal
ALIGNMENT-PA10Z XZ or YZ assembly; 10 arc second orthogonal
ALIGNMENT-PA5 XY assembly; 5 arc second orthogonal
ALIGNMENT-PA5Z XZ or YZ assembly; 5 arc second orthogonal
HALAR High-accuracy system – linear error correction for accuracy and repeatability