PRO225LM Mechanical-Bearing Direct-Drive Linear Stage
Description
Design Features
- Direct-drive linear motor for smooth and precise motion
- 450 mm wafer compatible
- Long-life linear motion guide bearing system
- Twelve models with travels from 100 mm to 1.5 m
- Side-seal design provides superior debris protection
- Low-cost, high-performance stage
The PRO225LM is the medium-sized offering in Aerotech’s PRO-LM series of high performance, cost-effective and versatile linear motor stages. The PRO225LM is a good alternative to the PRO165LM for applications that require higher stiffness, have larger payloads or require greater than 1 m of travel. A linear motion guide bearing system and high-performance brushless linear servomotor make the PRO225LM the stage of choice in industrial applications such as laser machining, medical component manufacturing and other applications requiring high accuracy in a production environment.
Construction Features
Sealed linear motion guide bearings with integral wipers are incorporated to provide excellent payload capability and long life. Both the metal waycover and tabletop are treated with a hardcoat that is scratch-resistant and provides outstanding protection in the harshest applications. The tabletop utilizes stainless steel Helicoil® inserts to protect mounting holes against thread wear. Several tabletop options are available for metric or English mounting, as well as for direct interface with our popular ADRS, ADRT and AGR rotary stages. In addition, configurable cable management options are available for single- or multi-axis systems.
Linear Motor Drive
Aerotech’s high-power, cog-free, BLM series linear motor drives the PRO225LM. The non-magnetic forcer coil provides high force with zero cogging for super-smooth velocity and position control. This zero cogging design is ideal for applications requiring outstanding contour accuracy and smooth velocity profiling. As with all Aerotech linear motor stages, the linear motor has zero backlash, no windup, zero friction and outstanding system responsiveness. The magnetic field of the linear motor is totally self-contained within the U-channel design. Many high-performance applications cannot tolerate the stray magnetic fields generated by flat motor magnet tracks.
High Performance
Noncontact linear encoders with micron-level repeatabilities are standard on all PRO225LM series stages. Either a line-driver output or amplified sine-wave output encoder is available.
The optional HALAR factory calibration further increases the standard accuracy and repeatability. Aerotech manufactures a wide range of matching drives and controls to provide a fully integrated and optimized motion solution.
Specifications
Mechanical Specifications
| Model | PRO225LM-0100 | PRO225LM-0150 | PRO225LM-0200 | PRO225LM-0250 | |
|---|---|---|---|---|---|
| Travel | 100 mm | 150 mm | 200 mm | 250 mm | |
| Accuracy(1) | Standard | ±4.0 µm | ±6.0 µm | ±8.0 µm | ±10.0 µm |
| HALAR | ±1.5 µm | ±1.5 µm | ±1.5 µm | ±2.0 µm | |
| Resolution | 250 nm | 250 nm | 250 nm | 250 nm | |
| Bidirectional Repeatability(1) | ±0.75 µm | ±0.75 µm | ±0.75 µm | ±0.75 µm | |
| Straightness(1) | ±2.25 µm | ±2.75 µm | ±4.0 µm | ±4.5 µm | |
| Flatness(1) | ±2.25 µm | ±2.75 µm | ±4.0 µm | ±4.5 µm | |
| Pitch | 5.5 arc sec | 6.5 arc sec | 8 arc sec | 9 arc sec | |
| Roll | 5.5 arc sec | 6.5 arc sec | 8 arc sec | 9 arc sec | |
| Yaw | 7 arc sec | 7 arc sec | 11 arc sec | 12.5 arc sec | |
| Maximum Speed | 2 m/s | ||||
| Maximum Acceleration | 3 g | ||||
| Maximum Force (Continuous) | 153.3 N | ||||
| Maximum Force (Continuous) (With Air – 20 psi) |
251.6 N | ||||
| Load Capacity(2) | Horizontal | 100 kg | |||
| Side | 100 kg | ||||
| Moving Mass | 7.4 kg | ||||
| Stage Mass | 26.5 kg | 28.7 kg | 30.9 kg | 33 kg | |
| Material | Aluminum | ||||
| MTBF (Mean Time Between Failure) | 20,000 Hours | ||||
- Certified with -PLOTS option.
- Axis orientation for on-axis loading is listed. See curves for offset loading behavior.
- Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
| Model | PRO225LM-0300 | PRO225LM-0400 | PRO225LM-0500 | PRO225LM-0600 | |
|---|---|---|---|---|---|
| Travel | 300 mm | 400 mm | 500 mm | 600 mm | |
| Accuracy(1) | Standard | ±11.5 µm | ±14.0 µm | ±16.0 µm | ±17.5 µm |
| HALAR | ±2.0 µm | ±2.0 µm | ±2.5 µm | ±2.5 µm | |
| Resolution | 250 nm | 250 nm | 250 nm | 250 nm | |
| Bidirectional Repeatability(1) | ±0.75 µm | ±0.75 µm | ±0.75 µm | ±0.75 µm | |
| Straightness(1) | ±5.5 µm | ±7.25 µm | ±8.0 µm | ±9.0 µm | |
| Flatness(1) | ±5.5 µm | ±7.25 µm | ±8.0 µm | ±9.0 µm | |
| Pitch | 11 arc sec | 14.5 arc sec | 17 arc sec | 20 arc sec | |
| Roll | 11 arc sec | 14.5 arc sec | 17 arc sec | 20 arc sec | |
| Yaw | 14.5 arc sec | 18 arc sec | 21.5 arc sec | 25 arc sec | |
| Maximum Speed | 2 m/s | ||||
| Maximum Acceleration | 3 g | ||||
| Maximum Force (Continuous) | 153.3 N | ||||
| Maximum Force (Continuous)(With Air – 20 psi) | 251.6 N | ||||
| Load Capacity(2) | Horizontal | 100 kg | |||
| Side | 100 kg | ||||
| Moving Mass | 7.4 kg | ||||
| Stage Mass | 35 kg | 38.9 kg | 42.6 kg | 45.9 kg | |
| Material | Aluminum | ||||
| MTBF (Mean Time Between Failure) | 20,000 Hours | ||||
- Certified with -PLOTS option.
- Axis orientation for on-axis loading is listed. See curves for offset loading behavior.
- Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
| Model | PRO225LM-0800 | PRO225LM-1000 | PRO225LM-1200 | PRO225LM-1500 | |
|---|---|---|---|---|---|
| Travel | 800 mm | 1000 mm | 1200 mm | 1500 mm | |
| Accuracy(1) | Standard | ±19.0 µm | ±20.0 µm | ±21.0 µm | ±22 µm |
| HALAR | ±2.5 µm | ±2.5 µm | ±3.0 µm | ±3.0 µm | |
| Resolution | 250 nm | 250 nm | 250 nm | 250 nm | |
| Bidirectional Repeatability(1) | ±0.75 µm | ±0.75 µm | ±0.75 µm | ±0.75 µm | |
| Straightness(1) | ±10.75 µm | ±12.5 µm | ±14 µm | ±15.5 µm | |
| Flatness(1) | ±10.75 µm | ±12.5 µm | ±14 µm | ±15.5 µm | |
| Pitch | 24.5 arc sec | 27 arc sec | 30 arc sec | 32 arc sec | |
| Roll | 24.5 arc sec | 27 arc sec | 30 arc sec | 32 arc sec | |
| Yaw | 30.5 arc sec | 34 arc sec | 37 arc sec | 40 arc sec | |
| Maximum Speed | 2 m/s | ||||
| Maximum Acceleration | 3 g | ||||
| Maximum Force (Continuous) | 153.3 N | ||||
| Maximum Force (Continuous)(With Air – 20 psi) | 251.6 N | ||||
| Load Capacity(2) | Horizontal | 100 kg | |||
| Side | 100 kg | ||||
| Moving Mass | 7.4 kg | ||||
| Stage Mass | 51.9 kg | 56.8 kg | 63.7 kg | 71 kg | |
| Material | Aluminum | ||||
| MTBF (Mean Time Between Failure) | 20,000 Hours | ||||
- Certified with -PLOTS option.
- Axis orientation for on-axis loading is listed. See curves for offset loading behavior.
- Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
Electrical Specifications
| Drive System | Brushless Linear Servomotor |
| Feedback | Noncontact Linear Encoder |
| Maximum Bus Voltage | 320 VDC |
| Limit Switches | 5 V, Normally Closed |
| Home Switch | Near Center |
Recommended Controller
| Multi-Axis | A3200 | CP/HPe/Npaq |
| Ensemble | CP/HPe | |
| Single Axis | Soloist | CP/HPe |
-
PRO225LM Cantilever Load 
Dimensions
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PRO225LM Dimensions 
-
Tabletop 
Ordering Information
Ordering Example
| Series | Travel (mm) | Tabletop | Encoder | Cable Management | Lifting | Metrology |
|---|---|---|---|---|---|---|
| PRO225LM | -0150 | -TTM | -LTAS | -CMS | -LIFTING | -PLOTS |
Ordering Options
| Series | Travel (mm) | Tabletop | Encoder | Cable Management | Lifting | Metrology |
|---|---|---|---|---|---|---|
| PRO225LM | -0100 -0150 -0200 -0250 -0300 -0400 -0500 -0600 -0800 -1000 -1200 -1500 |
-TTM -TTU -TTM-WIPER -TTU-WIPER -TTAGR -TTAGR-WIPER -TTADR -TTADR-WIPER |
-LTAS -LTX50 |
-X-CMS -XY-CMS -XZ-CMS -XT-CMS -Y-CMS -YZ-CMS -YT-CMS -XYZ-CMS -XYT-CMS -XZT-CMS -YZT-CMS -XYZT-CMS |
-LIFTING | -PLOTS -NO PLOTS |
PRO225LM Linear Motor Stage
| Options | Description |
|---|---|
| PRO225LM-0100 | 100 mm travel stage with linear motor and limits |
| PRO225LM-0150 | 150 mm travel stage with linear motor and limits |
| PRO225LM-0200 | 200 mm travel stage with linear motor and limits |
| PRO225LM-0250 | 250 mm travel stage with linear motor and limits |
| PRO225LM-0300 | 300 mm travel stage with linear motor and limits |
| PRO225LM-0400 | 400 mm travel stage with linear motor and limits |
| PRO225LM-0500 | 500 mm travel stage with linear motor and limits |
| PRO225LM-0600 | 600 mm travel stage with linear motor and limits |
| PRO225LM-0800 | 800 mm travel stage with linear motor and limits |
| PRO225LM-1000 | 1000 mm travel stage with linear motor and limits |
| PRO225LM-1200 | 1200 mm travel stage with linear motor and limits |
| PRO225LM-1500 | 1500 mm travel stage with linear motor and limits |
Tabletop
| Options | Description |
|---|---|
| -TTM | Metric dimension mounting pattern and holes |
| -TTU | English dimension mounting pattern and holes |
| -TTM-WIPER | Metric dimension mounting pattern and holes with wipers |
| -TTU-WIPER | English dimension mounting pattern and holes with wipers |
| -TTAGR | Mounting pattern for AGR series rotary stage |
| -TTAGR-WIPER | Mounting pattern for AGR series rotary stage with wipers |
| -TTADR | Mounting patterns for various ADR and ADRT series rotary stages |
| -TTADR-WIPER | Mounting patterns for various ADR and ADRT series rotary stages with wipers |
Standard Linear Encoders
| Options | Description |
|---|---|
| -LTAS | Amplified sine output 1 Vpp (20 μm signal period) requires signal multiplier |
| -LTX50 | Linear encoder; 0.1 micron line driver output |
CMS - Cable management
| Options | Description |
|---|---|
| -X-CMS | External cable management system for X axis |
| -XY-CMS | External cable management system for XY axes |
| -XZ-CMS | External cable management system for XZ axes |
| -XT-CMS | External cable management system for XT axes |
| -Y-CMS | External cable management system for Y axis |
| -YZ-CMS | External cable management system for YZ axes |
| -YT-CMS | External cable management system for YT axes |
| -XYZ-CMS | External cable management system for XYZ axes |
| -XYT-CMS | External cable management system for XYT axes |
| -XZT-CMS | External cable management system for XZT axes |
| -YZT-CMS | External cable management system for YZT axes |
| -XYZT-CMS | External cable management system for XYZT axes |
Lifting
| Options | Description |
|---|---|
| -LIFTING | Threaded inserts and lifting lugs; recommended for longer travel stages and XY assemblies; only available for PRO225LM stages of 300 mm travel or greater |
Metrology
| Options | Description |
|---|---|
| -PLOTS | Accuracy and repeatability plots |
| -NO PLOTS | No performance plots |
Accessories (to be ordered as separate line item)
| Options | Description |
|---|---|
| ALIGNMENT-NPA | Non-precision XY assembly |
| ALIGNMENT-NPAZ | Non-precision XZ or YZ assembly |
| ALIGNMENT-PA10 | XY assembly; 10 arc second orthogonal |
| ALIGNMENT-PA10Z | XZ or YZ assembly; 10 arc second orthogonal |
| ALIGNMENT-PA5 | XY assembly; 5 arc second orthogonal |
| ALIGNMENT-PA5Z | XZ or YZ assembly; 5 arc second orthogonal |
| HALAR | High-accuracy system – linear error correction for accuracy and repeatability |