PRO560LM Mechanical-Bearing Direct-Drive Linear Stage
Description
Design Features
- Wider design for large, offset loads
- Direct-drive linear motor for smooth and precise motion
- Long-life linear motion guide bearing system
- Eight models with travels from 300 mm to 1.5 m
- Side-seal design provides superior debris protection
- Low-cost, high-performance stage
The PRO560LM is the full-sized offering in Aerotech’s PRO-LM series of high performance, cost-effective and versatile linear motor positioning stages. The PRO560LM was designed to be used primarily as the lower axis of a PRO560LM/PRO280LM XY stack, but it may be used anywhere the wider support platform, increased roll stiffness and extra motor thrust force may be of benefit. The PRO560LM is the stage of choice in industrial applications such as laser machining, medical component manufacturing and other applications requiring high accuracy in a production environment.
Construction Features
Sealed linear motion guide bearings with integral wipers are incorporated to provide excellent payload capability and long life. Both the metal waycover and tabletop are treated with a hardcoat that is scratch-resistant and provides outstanding protection in the harshest applications. The tabletop utilizes stainless steel Helicoil® inserts to protect mounting holes against thread wear. Several tabletop options are available for metric or English mounting, as well as for direct interface with our popular ADRS, ADRT and AGR rotary stages. In addition, configurable cable management options are available for single or multi-axis systems.
Linear Motor Drive
Two of Aerotech’s high-power, cog-free, BLMH series linear motors drive the PRO560LM. The non-magnetic forcer coils provide high force with zero cogging for super-smooth velocity and position control. This zero cogging design is ideal for applications requiring outstanding contour accuracy and smooth velocity profiling. As with all Aerotech linear motor positioning stages, the linear motors have zero backlash, no windup, zero friction and outstanding system responsiveness. The magnetic fields of the linear motors are totally self-contained within the U-channel design. Many high-performance applications cannot tolerate the stray magnetic fields generated by flat-motor magnet tracks.
High Performance
Noncontact linear encoders with micron-level repeatabilities are standard on all PRO560LM series stages. Either a line-driver output or amplified sine-wave output encoder is available.
The optional HALAR factory calibration further increases the standard accuracy and repeatability. Aerotech manufactures a wide range of matching drives and controls to provide a fully integrated and optimized motion solution.
Specifications
Mechanical Specifications
| Model | PRO560LM-0300 | PRO560LM-0400 | PRO560LM-0500 | PRO560LM-0600 | |
|---|---|---|---|---|---|
| Travel | 300 mm | 400 mm | 500 mm | 600 mm | |
| Accuracy(1) | Standard | ±11.5 µm | ±14.0 µm | ±16.0 µm | ±17.5 µm |
| HALAR | ±2.0 µm | ±2.0 µm | ±2.5 µm | ±2.5 µm | |
| Resolution(2) | 250 nm | 250 nm | 250 nm | 250 nm | |
| Bidirectional Repeatability(1) | ±0.75 µm | ±0.75 µm | ±0.75 µm | ±0.75 µm | |
| Straightness(1) | ±5 µm | ±6.5 µm | ±7.25 µm | ±8 µm | |
| Flatness(1) | ±5 µm | ±6.5 µm | ±7.25 µm | ±8 µm | |
| Pitch | 10 arc sec | 13 arc sec | 15.5 arc sec | 18 arc sec | |
| Roll | 10 arc sec | 13 arc sec | 15.5 arc sec | 18 arc sec | |
| Yaw | 13 arc sec | 16 arc sec | 19.5 arc sec | 22.5 arc sec | |
| Maximum Speed | 2 m/s | ||||
| Maximum Acceleration | 3 g | ||||
| Maximum Force (Continuous) | 532.4 N | ||||
| Maximum Force (Continuous) (With Air – 20 psi) | 792.6 N | ||||
| Load Capacity(3) | Horizontal | 150 kg | |||
| Side | 150 kg | ||||
| Moving Mass | 20.5 kg | ||||
| Stage Mass | 98 kg | 109 kg | 118 kg | 130 kg | |
| Material | Aluminum | ||||
| MTBF (Mean Time Between Failure) | 20,000 Hours | ||||
- Certified with -PLOTS option.
- Minimum incremental motion.
- Axis orientation for on-axis loading is listed. See curves for offset loading behavior.
- Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
| Model | PRO560LM-0800 | PRO560LM-1000 | PRO560LM-1200 | PRO560LM-1500 | |
|---|---|---|---|---|---|
| Travel | 800 mm | 1000 mm | 1200 mm | 1500 mm | |
| Accuracy(1) | Standard | ±19 µm | ±20 µm | ±21 µm | ±22 µm |
| HALAR | ±2.5 µm | ±2.5 µm | ±3.0 µm | ±3.0 µm | |
| Resolution(2) | 250 nm | 250 nm | 250 nm | 250 nm | |
| Bidirectional Repeatability(1) | ±0.75 µm | ±0.75 µm | ±0.75 µm | ±0.75 µm | |
| Straightness(1) | ±9.75 µm | ±11.25 µm | ±12.5 µm | ±14 µm | |
| Flatness(1) | ±9.75 µm | ±11.25 µm | ±12.5 µm | ±14 µm | |
| Pitch | 22 arc sec | 24.5 arc sec | 27 arc sec | 29 arc sec | |
| Roll | 22 arc sec | 24.5 arc sec | 27 arc sec | 29 arc sec | |
| Yaw | 27.5 arc sec | 30.5 arc sec | 33.5 arc sec | 36 arc sec | |
| Maximum Speed | 2 m/s | ||||
| Maximum Acceleration | 3 g | ||||
| Maximum Force (Continuous) | 532.4 N | ||||
| Maximum Force (Continuous) (With Air – 20 psi) | 792.6 N | ||||
| Load Capacity(3) | Horizontal | 150 kg | |||
| Side | 150 kg | ||||
| Moving Mass | 20.5 kg | ||||
| Stage Mass | 150 kg | 173 kg | 193 kg | 224 kg | |
| Material | Aluminum | ||||
| MTBF (Mean Time Between Failure) | 20,000 Hours | ||||
- Certified with -PLOTS option.
- Minimum incremental motion.
- Axis orientation for on-axis loading is listed. See curves for offset loading behavior.
- Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
Electrical Specifications
| Drive System | Brushless Linear Servomotor |
| Feedback | Noncontact Linear Encoder |
| Maximum Bus Voltage | 320 VDC |
| Limit Switches | 5 V, Normally Closed |
| Home Switch | Near Center |
Recommended Controller
| Multi-Axis | A3200 | Ndrive CP/Ndrive HPe/Npaq |
| Ensemble | Ensemble CP/Ensemble HPe | |
| Single Axis | Soloist | Soloist CP/Soloist HPe |
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PRO560LM Cantilevered Load 
Dimensions
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PRO560LM Dimensions 
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Tabletop 
Ordering Information
Ordering Example
| PRO560LM | -0500 | -TTM | -LTAS | -CMS | -LIFTING | -PLOTS |
Ordering Options
| Series | Travel (mm) | Tabletop | Encoder | Cable Management | Lifting | Metrology |
|---|---|---|---|---|---|---|
| PRO560LM | -0300 -0400 -0500 -0600 -0800 -1000 -1200 -1500 |
-TTM -TTU -TTM-WIPER -TTU-WIPER -TTAGR -TTAGR-WIPER -TTADR -TTADR-WIPER |
-LTAS -LTX50 |
-X-CMS -XY-CMS -XZ-CMS -XT-CMS -Y-CMS -YZ-CMS -YT-CMS -XYZ-CMS -XYT-CMS -XZT-CMS -YZT-CMS -XYZT-CMS |
-LIFTING | -PLOTS -NO PLOTS |
PRO560LM Linear Motor Stage
| Options | Description |
|---|---|
| PRO560LM-0300 | 300 mm travel stage with linear motor and limits |
| PRO560LM-0400 | 400 mm travel stage with linear motor and limits |
| PRO560LM-0500 | 500 mm travel stage with linear motor and limits |
| PRO560LM-0600 | 600 mm travel stage with linear motor and limits |
| PRO560LM-0800 | 800 mm travel stage with linear motor and limits |
| PRO560LM-1000 | 1000 mm travel stage with linear motor and limits |
| PRO560LM-1200 | 1200 mm travel stage with linear motor and limits |
| PRO560LM-1500 | 1500 mm travel stage with linear motor and limits |
Tabletop
| Options | Description |
|---|---|
| -TTM | Metric dimension mounting pattern and holes |
| -TTU | English dimension mounting pattern and holes |
| -TTM-WIPER | Metric dimension mounting pattern and holes with wipers |
| -TTU-WIPER | English dimension mounting pattern and holes with wipers |
| -TTAGR | Mounting pattern for AGR series rotary stage |
| -TTAGR-WIPER | Mounting pattern for AGR series rotary stage with wipers |
| -TTADR | Mounting patterns for various ADR and ADRT series rotary stages |
| -TTADR-WIPER | Mounting patterns for various ADR and ADRT series rotary stages with wipers |
Standard Linear Encoders
| Options | Description |
|---|---|
| -LTAS | Amplified sine output 1 Vpp (20 μm signal period) requires signal multiplier |
| -LTX50 | Linear encoder; 0.1 micron line driver output |
CMS - Cable management
| Options | Description |
|---|---|
| -X-CMS | External cable management system for X axis |
| -XY-CMS | External cable management system for XY axes |
| -XZ-CMS | External cable management system for XZ axes |
| -XT-CMS | External cable management system for XT axes |
| -Y-CMS | External cable management system for Y axis |
| -YZ-CMS | External cable management system for YZ axes |
| -YT-CMS | External cable management system for YT axes |
| -XYZ-CMS | External cable management system for XYZ axes |
| -XYT-CMS | External cable management system for XYT axes |
| -XZT-CMS | External cable management system for XZT axes |
| -YZT-CMS | External cable management system for YZT axes |
| -XYZT-CMS | External cable management system for XYZT axes |
Lifting
| Options | Description |
|---|---|
| -LIFTING | Threaded inserts and lifting lugs; recommended for longer travel stages and XY assemblies; available for all PRO560LM stages |
Metrology
| Options | Description |
|---|---|
| -PLOTS | Accuracy and repeatability plots |
| -NO PLOTS | No performance plots |
Accessories (to be ordered as separate line item)
| Options | Description |
|---|---|
| ALIGNMENT-NPA | Non-precision XY assembly |
| ALIGNMENT-NPAZ | Non-precision XZ or YZ assembly |
| ALIGNMENT-PA10 | XY assembly; 10 arc second orthogonal |
| ALIGNMENT-PA10Z | XZ or YZ assembly; 10 arc second orthogonal |
| ALIGNMENT-PA5 | XY assembly; 5 arc second orthogonal |
| ALIGNMENT-PA5Z | XZ or YZ assembly; 5 arc second orthogonal |
| HALAR | High-accuracy system – linear error correction for accuracy and repeatability |