ANT130-XY BASE & PLUS Mechanical-Bearing Direct-Drive XY Linear Stage
Description
Design Features
- Integrated low-profile XY linear motor stage
- Nanometer-level performance in a large travel format
- High resolution (1 nm), repeatability (75 nm) and accuracy (250 nm) per axis
- In-position stability of <1 nm
- Anti-creep crossed-roller bearings
- High dynamic performance
Introduction
The ANT130-XY series stages offer nanometer-level performance in travels up to 160 mm. The ANT130-XY and ANT130-XY-PLUS are three-piece designs that allow travel in two dimensions (X and Y). The sleek design provides an extremely low profile of only 85 mm. The stage comes with proprietary direct-drive motor technology, noncontact linear encoders, limits, integrated cable management system and two grades of accuracy.
Stage Design
The ANT130-XY design allows critical elements such as orthogonality, straightness and flatness to be optimized, resulting in a stage with exceptional geometric tolerances. Aerotech’s direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion in both the X and Y dimensions. All travel options (60 mm x 60 mm, 110 mm x 110 mm, 160 mm x 160 mm) come with the 85 mm profile height. You can expect outstanding accuracy, position repeatability and in-position stability with the ANT130-XY stage.
Noncontact Direct-Drive
Only noncontact direct-drive technology offers the robust, accurate and high-speed positioning necessary for mass production of precision devices. ANT130-XY stages utilize advanced direct-drive technology pioneered by Aerotech to achieve the highest level of positioning performance. This direct-drive technology is high-performance, non-cogging, noncontact, high-speed, high-resolution and high-accuracy. This unique drive and bearing combination, packaged in an extremely small-profile and footprint, offers tangible advantages in many applications such as high-precision positioning, disk-drive fabrication, fiber alignment, optical delay element actuation, sensor testing and scanning processes that demand smooth and precise motion. The integrated cable management system is designed for long life and to minimize drag forces.
Multi-Axis Configurations
The ANT130-XY can be combined with other Aerotech ANT series products (vertical lift stages, direct-drive rotaries and goniometers) to create unique, high performance, multi-axis systems.
Specifications
Mechanical Specifications
| Model | ANT130-060-XY | ANT130-060-XY-PLUS | ANT130-110-XY | ANT130-110-XY-PLUS | |
|---|---|---|---|---|---|
| Travel | 60 mm | 60 mm | 110 mm | 110 mm | |
| Accuracy(1) | ±2.5 µm | ±250 nm | ±4.0 µm | ±300 nm | |
| Resolution | 1 nm | 1 nm | 1 nm | 1 nm | |
| Repeatability (Bidirectional)(1) | ±100 nm | ±75 nm | ±100 nm | ±75 nm | |
| Repeatability (Unidirectional) | ±25 nm | ±25 nm | ±25 nm | ±25 nm | |
| Straightness(1) | ±1.5 µm | ±1.5 µm | ±1.5 µm | ±1.5 µm | |
| Flatness(1) | ±1.5 µm | ±1.5 µm | ±1.5 µm | ±1.5 µm | |
| Pitch | 10 arc sec | 10 arc sec | 12 arc sec | 12 arc sec | |
| Roll | 10 arc sec | 10 arc sec | 12 arc sec | 12 arc sec | |
| Yaw | 5 arc sec | 5 arc sec | 6 arc sec | 6 arc sec | |
| Orthogonality | 10 arc sec | 3 arc sec | 10 arc sec | 3 arc sec | |
| Maximum Speed | 350 mm/s (Upper Axis) | 350 mm/s (Upper Axis) | 350 mm/s (Upper Axis) | 350 mm/s (Upper Axis) | |
| Maximum Acceleration | 1 g (No Load)(Upper Axis) | 1 g (No Load)(Upper Axis) | 1 g (No Load)(Upper Axis) | 1 g (No Load)(Upper Axis) | |
| Speed Stability | See graph for typical performance | ||||
| Settling Time | See graph for typical performance | ||||
| In-Position Stability(2) | <1 nm | <1 nm | <1 nm | <1 nm | |
| Maximum Force (Continuous) | 23 N | 23 N | 23 N | 23 N | |
| Load Capacity(3) | Horizontal | 12.0 kg | 12.0 kg | 12.0 kg | 12.0 kg |
| Moving Mass | Upper | 1.5 kg | 1.5 kg | 2.1 kg | 2.1 kg |
| Lower | 4.2 kg | 4.2 kg | 5.7 kg | 5.7 kg | |
| Stage Mass | 5.5 kg | 5.5 kg | 7.4 kg | 7.4 kg | |
| Material | Aluminum Body/Black Hardcoat Finish | ||||
| MTBF (Mean Time Between Failure) | 30,000 Hours | ||||
- Certified with each stage.
- In-Position Jitter listing is 3 sigma value.
- Axis orientation for on-axis loading is listed.
- Specifications are per axis, measured 25 mm above the tabletop. Consult factory for multi-axis or non-standard applications.
- -PLUS requires the use of an Aerotech controller.
| Model | ANT130-160-XY | ANT130-160-XY-PLUS | |
|---|---|---|---|
| Travel | 160 mm | 160 mm | |
| Accuracy(1) | ±5.0 µm | ±300 nm | |
| Resolution | 1 nm | 1 nm | |
| Repeatability (Bidirectional)(1) | ±100 nm | ±75 nm | |
| Repeatability (Unidirectional)(1) | ±25 nm | ±25 nm | |
| Straightness(1) | ±2.0 µm | ±2.0 µm | |
| Flatness(1) | ±2.0 µm | ±2.0 µm | |
| Pitch | 15 arc sec | 15 arc sec | |
| Roll | 15 arc sec | 15 arc sec | |
| Yaw | 8 arc sec | 8 arc sec | |
| Orthogonality | 10 arc sec | 3 arc sec | |
| Maximum Speed | 350 mm/s (Upper Axis) | 350 mm/s (Upper Axis) | |
| Maximum Acceleration | 1 g (No Load)(Upper Axis) | 1 g (No Load)(Upper Axis) | |
| Speed Stability | See graph for typical performance | ||
| Settling Time | See graph for typical performance | ||
| In-Position Stability(2) | <1 nm | <1 nm | |
| Maximum Force (Continuous) | 23 N | 23 N | |
| Load Capacity(3) | Horizontal | 12.0 kg | 12.0 kg |
| Moving Mass | Upper | 2.4 kg | 2.4 kg |
| Lower | 6.9 kg | 6.9 kg | |
| Stage Mass | 8.9 kg | 8.9 kg | |
| Material | Aluminum Body/Black Hardcoat Finish | ||
| MTBF (Mean Time Between Failure) | 30,000 Hours | ||
- Certified with each stage.
- In-Position Jitter listing is 3 sigma value.
- Axis orientation for on-axis loading is listed.
- Specifications are per axis, measured 25 mm above the tabletop. Consult factory for multi-axis or non-standard applications.
- -PLUS requires the use of an Aerotech controller.
Electrical Specification
| Drive System | Brushless Linear Servomotor | ||
| Feedback | Noncontact Linear Encoder | ||
| Maximum Bus Voltage | ±40 VDC | ||
| Limit Switches | 5 V, Normally Closed | ||
| Home Switch | Near Center | ||
Recommended Controller
| Multi-Axis | A3200 | Npaq MXR Npaq MR-MXH Ndrive ML-MXH |
||
| Ensemble | Epaq MXH Epaq MR-MXH Ensemble ML-MXH |
|||
| Single Axis | Soloist | Soloist ML-MXH | ||
- Linear amplifiers are required to achieve the listed specifications. Other options are available.
To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25°C/24 hours. If this is not possible, alternate products are available. Please consult Aerotech for more information.
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ANT130-XY Step Plot 
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ANT130-XY Performance Graphs 
Dimensions
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ANT130-XY/ANT130-XY-PLUS 
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Mounting Plates: ANT130-XY/ANT130-XY-PLUS 
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CMS Post 
Ordering Information
ANT130-XY Series Linear Stage
| Options | Description |
|---|---|
| ANT130-XY/ANT130-XY-PLUS | Aerotech nanotranslation crossed-roller linear positioner |
Linear Stage Travel
| Options | Description |
|---|---|
| ANT130-060-XY | 60 mm travel XY stage with linear motor and limits |
| ANT130-060-XY-PLUS | 60 mm travel XY stage with linear motor and limits (high accuracy version) |
| ANT130-110-XY | 110 mm travel XY stage with linear motor and limits |
| ANT130-110-XY-PLUS | 110 mm travel XY stage with linear motor and limits (high accuracy version) |
| ANT130-160-XY | 160 mm travel XY stage with linear motor and limits |
| ANT130-160-XY-PLUS | 160 mm travel XY stage with linear motor and limits (high accuracy version) |
Output Cable Connectors
| Options | Description |
|---|---|
| -25DU | Single 25-pin D connector (standard) |
| -4DU-25DU | 4-pin HPD and 25-pin D connectors |
Note: -25DU single 25-pin connector option not valid for systems using bus voltages greater than 80 V.
CMS Post
| Options | Description |
|---|---|
| -XY-CMS | Post for two-axis cable anchoring (ACP2 – see product drawing) |
| -XYZ-CMS | Post for three-axis cable anchoring (ACP3 – see product drawing) |
Options
| Options | Description |
|---|---|
| -MP | Breadboard mounting plate |