ANT130-XY ULTRA Mechanical-Bearing Direct-Drive XY Linear Stage
Description
Design Features
- Integrated low-profile XY linear motor stage
- Nanometer-level performance in a large travel format
- 2D system accuracy is 250 nm
- In-position stability of <1 nm
- High dynamic performance
Introduction
Aerotech’s ANT130-XY-ULTRA is a long travel (up to 160 mm x 160 mm) nanopositioner for XY applications. Each axis uses crossed-roller bearings, as well as Aerotech’s unique direct-drive for non-cogging, zero backlash motion. In addition, each stage receives a two-dimensional correction to achieve unmatched nanometer resolution, accuracy and repeatability. This unique drive and bearing combination, packaged in an extremely low profile and small footprint, offers tangible advantages in your motion application.
The ANT130-XY-ULTRA extends the performance capability of Aerotech’s ANT130-XY stage series to levels found nowhere else. The exceptional geometric and dynamic performance of the ANT130-XY-ULTRA make it an ideal choice for nearly all high-end motion applications in the lab or in production environments.
ULTRA Trajectory Management System
In order to achieve the highest possible system accuracy from our multi-axis nanopositioning systems, Aerotech has developed an advanced, interactive, dynamic trajectory management system. To take advantage of this sophisticated interactive calibration system, the mechanical system has to be completely assembled and functionally tested prior to calibration in our best-in-class metrology labs. Nano-level system accuracy can only be achieved under stringent environmental conditions, calibrating with the best test equipment and utilizing the formidable capability of ULTIMUS. By implementing the ULTIMUS dynamic trajectory management system with the ANT130-XY-ULTRA, we are able to produce 2-dimensional accuracies of ±250 nm or better.
The plots provided in the Specifications illustrate performance differences between a standard ANT130-XY and the -ULTRA version. Straightness errors, orthogonality errors and accuracy errors caused by stage yawing are virtually eliminated.
Specifications
Mechanical Specifications
| Model | ANT130-060-XY-ULTRA | ANT130-110-XY-ULTRA | ANT130-160-XY-ULTRA | |
|---|---|---|---|---|
| Travel | 60 mm | 110 mm | 160 mm | |
| Accuracy(1) | ±250 nm | ±300 nm | ±300 nm | |
| Resolution | 1 nm | 1 nm | 1 nm | |
| Repeatability (Bidirectional)(1) | ±75 nm | ±75 nm | ±75 nm | |
| Repeatability (Unidirectional) | ±25 nm | ±25 nm | ±25 nm | |
| Straightness(1) | ±250 nm | ±300 nm | ±300 nm | |
| Flatness(1) | ±1.0 µm | ±1.0 µm | ±1.0 µm | |
| Pitch | 10 arc sec | 12 arc sec | 12 arc sec | |
| Roll | 10 arc sec | 12 arc sec | 12 arc sec | |
| Yaw | 5 arc sec | 6 arc sec | 6 arc sec | |
| Orthogonality | 1.0 arc sec | 0.5 arc sec | 0.5 arc sec | |
| Maximum Speed | 350 mm/s (Upper Axis) | 350 mm/s (Upper Axis) | 350 mm/s (Upper Axis) | |
| Maximum Acceleration | 1 g (No Load)(Upper Axis) | 1 g (No Load)(Upper Axis) | 1 g (No Load)(Upper Axis) | |
| Speed Stability | See graph for typical performance | |||
| Settling Time | See graph for typical performance | |||
| In-Position Stability(2) | <1 nm | <1 nm | <1 nm | |
| Maximum Force (Continuous) | 23 N | 23 N | 23 N | |
| Load Capacity(3) | Horizontal | 12.0 kg | 12.0 kg | 12.0 kg |
| Moving Mass | Upper | 1.5 kg | 2.1 kg | 2.1 kg |
| Lower | 4.2 kg | 5.7 kg | 5.7 kg | |
| Stage Mass | 5.5 kg | 7.4 kg | 7.4 kg | |
| Material | Aluminum Body/Black Hardcoat Finish | |||
| MTBF (Mean Time Between Failure) | 30,000 Hours | |||
- Certified with each stage.
- In-Position Jitter listing is 3 sigma value.
- Axis orientation for on-axis loading is listed.
- Specifications are per axis, measured 25 mm above the tabletop. Consult factory for multi-axis or non-standard applications.
- -PLUS requires the use of an Aerotech controller.
Electrical Specification
| Drive System | Brushless Linear Servomotor | ||
| Feedback | Noncontact Linear Encoder | ||
| Maximum Bus Voltage | ±40 VDC | ||
| Limit Switches | 5 V, Normally Closed | ||
| Home Switch | Near Center | ||
Recommended Controller
| Multi-Axis | A3200 | Npaq MXR Npaq MR-MXH Ndrive ML-MXH |
||
| Ensemble | Epaq MXH Epaq MR-MXH Ensemble ML-MXH |
|||
| Single Axis | Soloist | Soloist ML-MXH | ||
- Linear amplifiers are required to achieve the listed specifications. Other options are available.
To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25°C/24 hours. If this is not possible, alternate products are available. Please consult Aerotech for more information.
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ANT130-XY Accuracy Plot 
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ANT130-XY-ULTRA Performance Graphs 
Dimensions
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ANT130-XY-ULTRA 
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Mounting Plates: ANT130-XY-ULTRA 
Ordering Information
ANT130-XY-ULTRA Series Linear Stage
| Options | Description |
|---|---|
| ANT130-XY-ULTRA | Aerotech nanotranslation crossed-roller linear positioner |
Linear Stage Travel
| Options | Description |
|---|---|
| ANT130-060-XY-ULTRA | 60 mm travel XY stage with linear motor and limits (high accuracy version) |
| ANT130-110-XY-ULTRA | 110 mm travel XY stage with linear motor and limits (high accuracy version) |
| ANT130-160-XY-ULTRA | 160 mm travel XY stage with linear motor and limits (high accuracy version) |
Output Cable Connectors
| Options | Description |
|---|---|
| -25DU | Single 25-pin D connector (standard) |
| -4DU-25DU | 4-pin HPD and 25-pin D connectors |
Note: -25DU single 25-pin connector option not valid for systems using bus voltages greater than 80 V.
Options
| Options | Description |
|---|---|
| -MP | Breadboard mounting plate |