- Integrated, low-profile, XY linear motor stage
- 25 mm x 25 mm or 50 mm x 50 mm travel
- Nanometer-level performance in a large travel format
- High resolution (1 nm), repeatability (75 nm) and accuracy (250 nm) per axis
- In-position stability of <1 nm
- Anti-creep crossed-roller bearings
- High dynamic performance
Aerotech’s ANT series stages are the world’s first nanometer-level positioning systems with greater than 25 mm travel. The ANT95-XY crossed-roller-bearing, linear motor, dual-axis stage continues the evolution of the ANT series of stages. The ANT95-XY and ANT95-XY-PLUS are three-piece designs that allow travel in two dimensions (X and Y). The sleek design provides an extremely low profile of only 60 mm. The stage comes with proprietary direct-drive motor technology, noncontact linear encoders, limits, integrated cable management system and two grades of accuracy (BASE and PLUS).
The ANT95-XY design allows critical elements such as orthogonality, straightness and flatness to be optimized, resulting in a stage with exceptional geometric tolerances. Aerotech’s direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion in both the X and Y dimensions. Both travel options (25 mm x 25 mm or 50 mm x 50 mm) come with the 60 mm profile height. You can expect outstanding accuracy, position repeatability and in-position stability with the ANT95-XY stage.
Only noncontact direct-drive technology offers the robust, accurate and high-speed positioning necessary for mass production of precision devices. ANT95-XY stages utilize advanced direct-drive technology pioneered by Aerotech to achieve the highest level of positioning performance. This direct-drive technology is high-performance, non-cogging, noncontact, high-speed, high-resolution and high-accuracy. This unique drive and bearing combination, packaged in an extremely small-profile and footprint, offers tangible advantages in many applications such as high-precision positioning, disk-drive fabrication, fiber alignment, optical delay element actuation, sensor testing and scanning processes that demand smooth and precise motion. The integrated cable management system is designed for long life and to minimize drag forces.
The ANT95-XY can be combined with other Aerotech ANT series products (vertical lift stages, direct-drive rotaries and goniometers) to create unique, high performance, multi-axis systems.
|Travel||25 mm||25 mm||50 mm||50 mm|
|Accuracy(1)||±2.5 µm||±250 nm||±2.5 µm||±250 nm|
|Resolution||1 nm||1 nm||1 nm||1 nm|
|Repeatability (Bidirectional)(1)||±100 nm||±75 nm||±100 nm||±75 nm|
|Repeatability (Unidirectional)||±25 nm||±25 nm||±25 nm||±25 nm|
|Straightness(1)||±1.0 µm||±1.0 µm||±1.0 µm||±1.0 µm|
|Flatness(1)||±1.0 µm||±1.0 µm||±1.0 µm||±1.0 µm|
|Pitch||10 arc sec||10 arc sec||10 arc sec||10 arc sec|
|Roll||10 arc sec||10 arc sec||10 arc sec||10 arc sec|
|Yaw||5 arc sec||5 arc sec||5 arc sec||5 arc sec|
|Orthogonality||10 arc sec||3 arc sec||10 arc sec||3 arc sec|
|Maximum Speed||500 mm/s (Upper Axis)||500 mm/s (Upper Axis)||500 mm/s (Upper Axis)||500 mm/s (Upper Axis)|
|Maximum Acceleration||4.5 g (No Load) (Upper Axis)||4.5 g (No Load) (Upper Axis)||2.75 g (No Load) (Upper Axis)||2.75 g (No Load) (Upper Axis)|
|Speed Stability||See graph for typical performance|
|Settling Time||See graph for typical performance|
|In-Position Stability(2)||<1 nm||<1 nm||<1 nm||<1 nm|
|Maximum Force (Continuous)||7.75 N||7.75 N||9.5 N||9.5 N|
|Load Capacity(3)||Horizontal||4.0 kg||4.0 kg||6.0 kg||6.0 kg|
|Moving Mass||Upper Axis||0.45 kg||0.45 kg||0.8 kg||0.8 kg|
|Lower Axis||1.13 kg||1.13 kg||2.1 kg||2.1 kg|
|Stage Mass||1.8 kg||1.8 kg||3.2 kg||3.2 kg|
|Material||Aluminum Body/Black Hardcoat Finish|
|MTBF (Mean Time Between Failure)||20,000 Hours|
- Certified with each stage.
- In-Position Jitter listing is 3 sigma value.
- Axis orientation for on-axis loading is listed.
- Specifications are for XY systems, measured 25 mm above the tabletop. Consult factory for non-standard applications.
- -PLUS requires the use of an Aerotech controller.
|Drive System||Brushless Linear Servomotor|
|Feedback||Noncontact Linear Encoder|
|Maximum Bus Voltage||±40 VDC|
|Limit Switches||5 V, Normally Closed|
|Home Switch||Near Center|
|Single Axis||Soloist||Soloist ML-MXH|
- Linear amplifiers are required to achieve the listed specifications. Other options are available.
Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25°C/24 hours. If this is not possible, alternate products are available. Please consult Aerotech for more information.
ANT95-XY Series Linear Stage (highlighted options available from Aerotech's Fast Delivery Service program)
|ANT95-XY/ANT95-XY-PLUS||Aerotech nanotranslation crossed-roller linear positioner|
Linear Stage Travel
|ANT95-25-XY||25 mm (1 in) XY travel stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output linear encoder and limits|
|ANT95-25-XY-PLUS||25 mm (1 in) XY travel stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output linear encoder and limits (High Accuracy Version)|
|ANT95-50-XY||50 mm (2 in) XY travel stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output linear encoder and limits|
|ANT95-50-XY-PLUS||50 mm (2 in) XY travel stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output linear encoder and limits (High Accuracy Version)|
|-MP||Breadboard mounting plate|