ANT95-XY BASE & PLUS Series Two-Axis XY Direct-Drive Nanopositioning Stages

Description

Design Features

  • Integrated, low-profile, XY linear motor stage
  • 25 mm x 25 mm or 50 mm x 50 mm travel
  • Nanometer-level performance in a large travel format
  • High resolution (1 nm), repeatability (75 nm) and accuracy (250 nm) per axis
  • In-position stability of <1 nm
  • Anti-creep crossed-roller bearings
  • High dynamic performance

Introduction

Aerotech’s ANT series stages are the world’s first nanometer-level positioning systems with greater than 25 mm travel. The ANT95-XY crossed-roller-bearing, linear motor, dual-axis stage continues the evolution of the ANT series of stages. The ANT95-XY and ANT95-XY-PLUS are three-piece designs that allow travel in two dimensions (X and Y). The sleek design provides an extremely low profile of only 60 mm. The stage comes with proprietary direct-drive motor technology, noncontact linear encoders, limits, integrated cable management system and two grades of accuracy (BASE and PLUS).

Stage Design

The ANT95-XY design allows critical elements such as orthogonality, straightness and flatness to be optimized, resulting in a stage with exceptional geometric tolerances. Aerotech’s direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion in both the X and Y dimensions. Both travel options (25 mm x 25 mm or 50 mm x 50 mm) come with the 60 mm profile height. You can expect outstanding accuracy, position repeatability and in-position stability with the ANT95-XY stage.

Noncontact Direct-Drive

Only noncontact direct-drive technology offers the robust, accurate and high-speed positioning necessary for mass production of precision devices. ANT95-XY stages utilize advanced direct-drive technology pioneered by Aerotech to achieve the highest level of positioning performance. This direct-drive technology is high-performance, non-cogging, noncontact, high-speed, high-resolution and high-accuracy. This unique drive and bearing combination, packaged in an extremely small-profile and footprint, offers tangible advantages in many applications such as high-precision positioning, disk-drive fabrication, fiber alignment, optical delay element actuation, sensor testing and scanning processes that demand smooth and precise motion. The integrated cable management system is designed for long life and to minimize drag forces.

Multi-Axis Configurations

The ANT95-XY can be combined with other Aerotech ANT series products (vertical lift stages, direct-drive rotaries and goniometers) to create unique, high performance, multi-axis systems.

Specifications

Mechanical Specifications

ModelANT95-25-XYANT95-25-XY-PLUSANT95-50-XYANT95-50-XY-PLUS
Travel 25 mm 25 mm 50 mm 50 mm
Accuracy(1) ±2.5 µm ±250 nm ±2.5 µm ±250 nm
Resolution 1 nm 1 nm 1 nm 1 nm
Repeatability
(Bidirectional)(1)
±100 nm ±75 nm ±100 nm ±75 nm
Repeatability (Unidirectional) ±25 nm ±25 nm ±25 nm ±25 nm
Straightness(1) ±1.0 µm ±1.0 µm ±1.0 µm ±1.0 µm
Flatness(1) ±1.0 µm ±1.0 µm ±1.0 µm ±1.0 µm
Pitch 10 arc sec 10 arc sec 10 arc sec 10 arc sec
Roll 10 arc sec 10 arc sec 10 arc sec 10 arc sec
Yaw 5 arc sec 5 arc sec 5 arc sec 5 arc sec
Orthogonality 10 arc sec 3 arc sec 10 arc sec 3 arc sec
Maximum Speed 500 mm/s
(Upper Axis)
500 mm/s
(Upper Axis)
500 mm/s
(Upper Axis)
500 mm/s
(Upper Axis)
Maximum Acceleration 4.5 g (No Load)
(Upper Axis)
4.5 g (No Load)
(Upper Axis)
2.75 g (No Load)
(Upper Axis)
2.75 g (No Load)
(Upper Axis)
Speed Stability See graph for typical performance
Settling Time See graph for typical performance
In-Position Stability(2) <1 nm <1 nm <1 nm <1 nm
Maximum Force (Continuous) 7.75 N 7.75 N 9.5 N 9.5 N
Load Capacity(3) Horizontal 4.0 kg 4.0 kg 6.0 kg 6.0 kg
Moving Mass Upper Axis 0.45 kg 0.45 kg 0.8 kg 0.8 kg
Lower Axis 1.13 kg 1.13 kg 2.1 kg 2.1 kg
Stage Mass 1.8 kg 1.8 kg 3.2 kg 3.2 kg
Material Aluminum Body/Black Hardcoat Finish
MTBF (Mean Time
Between Failure)
20,000 Hours
  1. Certified with each stage.
  2. In-Position Jitter listing is 3 sigma value.
  3. Axis orientation for on-axis loading is listed.
  • Specifications are for XY systems, measured 25 mm above the tabletop. Consult factory for non-standard applications.
  • -PLUS requires the use of an Aerotech controller.

Electrical Specifications

Drive System Brushless Linear Servomotor
Feedback Noncontact Linear Encoder
Maximum Bus Voltage ±40 VDC
Limit Switches 5 V, Normally Closed
Home Switch Near Center

Recommended Controller

Multi-Axis A3200 Npaq MXR
Npaq MR-MXH
Ndrive ML-MXH
Ensemble Epaq MXH
Epaq MR-MXH
Ensemble ML-MXH
Single Axis Soloist Soloist ML-MXH
  1. Linear amplifiers are required to achieve the listed specifications. Other options are available.

Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25°C/24 hours. If this is not possible, alternate products are available. Please consult Aerotech for more information.

  • ANT95-XY PLUS Step Graph
  • ANT95-XY Performance Graphs

Dimensions

  • ANT95-25-XY/ANT95-25-XY-PLUS
  • ANT95-50-XY/ANT95-50-XY-PLUS
  • Mounting Plate: ANT95-25-XY/ANT95-25-XY-PLUS
  • Mounting Plate: ANT95-50-XY/ANT95-50-XY-PLUS

Ordering Information

ANT95-XY Series Linear Stage

Options in green available from Aerotech's Fast Delivery program.

OptionDescription
ANT95-XY/ANT95-XY-PLUS Aerotech nanotranslation crossed-roller linear positioner

Linear Stage Travel

OptionDescription
ANT95-25-XY 25 mm (1 in) XY travel stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output linear encoder and limits
ANT95-25-XY-PLUS 25 mm (1 in) XY travel stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output linear encoder and limits (High Accuracy Version)
ANT95-50-XY 50 mm (2 in) XY travel stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output linear encoder and limits
ANT95-50-XY-PLUS 50 mm (2 in) XY travel stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output linear encoder and limits (High Accuracy Version)

Options

OptionDescription
-MP Breadboard mounting plate