ANT95-R Mechanical-Bearing Direct-Drive Rotary Stage
Description
Design Features
- 0.01 arc sec resolution
- 0.005 arc sec in-position stability
- Outstanding error motion specifications
- Multi-axis configurations
- High dynamic performance
- Both limited and unlimited rotation
The ANT95-R and ANT95-R-PLUS direct-drive rotary stages are designed as part of Aerotech’s nano Motion Technology product family. Our rotary stages offer unprecedented in-position stability (0.005 arc sec) and sub 0.01 arc-sec incremental motion performance, and are offered in two grades of accuracy.
Multi-Axis Capabilities
The ANT95-R series is designed for compatibility and easy integration with Aerotech's ANT linear stage product offerings. Together these stages provide accuracy, stability and small size performance capability for almost any nanomanufacturing or inspection application.
Dynamic Performance
In addition to the high precision levels, these systems offer high dynamic performance and throughput ideal for disk drive manufacture and test.
Durability
The ANT95-R stage series was designed to operate in a 24/7 manufacturing environment. Unlike other rotary devices, the ANT95-R requires no periodic maintenance, assuring years of trouble-free operation.
Specifications
ANT95-R Series Specifications
| Model | ANT95- 20-R | ANT95- 20-R-PLUS | ANT95- 180-R | ANT95- 180-R-PLUS | ANT95- 360-R | ANT95- 360-R-PLUS |
|
|---|---|---|---|---|---|---|---|
| Rotation Angle | 20° | 20° | 180° | 180° | ±360° Continuous | ±360° Continuous | |
| Accuracy(1) | 10 arc sec | 3 arc sec | 10 arc sec | 3 arc sec | 10 arc sec | 3 arc sec | |
| Resolution | 0.01 arc sec | 0.01 arc sec | 0.01 arc sec | 0.01 arc sec | 0.01 arc sec | 0.01 arc sec | |
| Bidirectional Repeatability(1) | 1.5 arc sec | 1.5 arc sec | 1.5 arc sec | 1.5 arc sec | 1.5 arc sec | 1.5 arc sec | |
| Unidirectional Repeatability | 0.5 arc sec | 0.5 arc sec | 0.5 arc sec | 0.5 arc sec | 0.5 arc sec | 0.5 arc sec | |
| Tilt Error Motion | Synchronous | NA | NA | NA | NA | 10 arc sec | 10 arc sec |
| Asynchronous | NA | NA | NA | NA | 3 arc sec | 3 arc sec | |
| Axial Error Motion(1) | Synchronous | NA | NA | NA | NA | 2 µm | 2 µm |
| Asynchronous | NA | NA | NA | NA | 0.5 µm | 0.5 µm | |
| Radial Error Motion(1) | Synchronous | NA | NA | NA | NA | 3 µm | 3 µm |
| Asynchronous | NA | NA | NA | NA | 1 µm | 1 µm | |
| Maximum Speed | 20 rpm | 20 rpm | 20 rpm | 20 rpm | 200 rpm | 200 rpm | |
| Maximum Acceleration | 400 rad/s2 | 400 rad/s2 | 400 rad/s2 | 400 rad/s2 | 400 rad/s2 | 400 rad/s2 | |
| In-Position Stability(2) | 0.005 arc sec | 0.005 arc sec | 0.005 arc sec | 0.005 arc sec | 0.005 arc sec | 0.005 arc sec | |
| Aperture | 11 mm | 11 mm | 11 mm | 11 mm | 11 mm | 11 mm | |
| Maximum Torque (Continuous) | 0.2 N-m | 0.2 N-m | 0.2 N-m | 0.2 N-m | 0.2 N-m | 0.2 N-m | |
| Load Capacity(3) | Axial | 2.0 kg | 2.0 kg | 2.0 kg | 2.0 kg | 2.0 kg | 2.0 kg |
| Radial | 1.5 kg | 1.5 kg | 1.5 kg | 1.5 kg | 1.5 kg | 1.5 kg | |
| Moment | 2 N-m | 2 N-m | 2 N-m | 2 N-m | 2 N-m | 2 N-m | |
| Rotor Inertia (Unloaded) | 0.00065 kg-m2 | 0.00065 kg-m2 | 0.00066 kg-m2 | 0.00066 kg-m2 | 0.00069 kg-m2 | 0.00069 kg-m2 | |
| Stage Mass | 1.2 kg | 1.2 kg | 1.2 kg | 1.2 kg | 1.2 kg | 1.2 kg | |
| Material | Aluminum Body/Black Hardcoat Finish | ||||||
| MTBF (Mean Time Between Failure) | 30,000 Hours | ||||||
- Certified with each stage. Requires the use of an Aerotech controller.
- In-Position Jitter listing is 3 sigma value.
- Axis orientation for on-axis loading is listed.
- Specifications are per axis, measured 25 mm above the tabletop. Consult factory for multi-axis or non-standard applications.
- All error motion specifications are measured at 60 rpm.
- For high-speed operation customer payload must be balanced to G1.0 per ISO 1940.
Electrical Specifications
| Drive System | Slotless, Brushless, Direct-Drive Rotary Motor | ||
| Feedback | Noncontact Rotary Encoder | ||
| Maximum Bus Voltage | ±40 VDC | ||
| Limit Switches | 5 V, Normally Closed | ||
| Home Switch | Near Center | ||
Recommended Controller
| Multi-Axis | A3200 | Npaq MXR Npaq MR-MXH Ndrive ML-MXH |
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| Ensemble | Epaq MXR Epaq MR-MXH Ensemble ML-MXH |
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| Single Axis | Soloist | Soloist ML-MXH | ||
- Linear amplifiers are required to achieve the listed specifications. Other options are available.
Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25ºC/24 hours. If this is not possible alternate products are available. Please consult Aerotech for more information.
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ANT95-R Step Plot 
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ANT95-R Specifications Images 
Dimensions
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ANT95-R/ANT95-R-PLUS 
Ordering Information
ANT95-R Series Rotary Stage
| Option | Description |
|---|---|
| ANT95-R | Aerotech direct-drive rotary positioner |
Rotary Stage Travel
| Option | Description |
|---|---|
| ANT95-20-R | 20° rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary encoder, optical limits and hard stops |
| ANT95-20-R-PLUS | 20° rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary encoder, optical limits and hard stops (high accuracy version) |
| ANT95-180-R | 180° rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary encoder, optical limits and hard stops |
| ANT95-180-R-PLUS | 180° rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary encoder, optical limits and hard stops (high accuracy version) |
| ANT95-360-R | 360° continuous rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary encoder and optical limits |
| ANT95-360-R-PLUS | 360° continuous rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary encoder and optical limits (high accuracy version) |
Options
| Option | Description |
|---|---|
| -MP | Breadboard mounting plate |