Introduction
Aerotech’s NanoTranslation (ANT95-L, ANT95-L-PLUS) crossed-roller
stages are the best-in-class in combining speed, accuracy, resolution,
repeatability, reliability, and size, and are offered in two accuracy
grades. As an evolution of the popular ANT stage family, these
linear stages exhibit enhanced motion performance over Aerotech’s
first generation ANT series. Product improvements such as 5 g
acceleration, 500 mm/s velocity, enhanced load capacity, and standardized,
universal base mounting patterns allow the use of this flexible
stage family in an even wider range of configurations than its
predecessors.
Noncontact Direct-Drive
All of the original ANT series’ direct-drive advantages
have been preserved in the ANT95-L family. Only noncontact direct-drive
technology offers the robust, accurate, and high-speed positioning
necessary for mass production of precision devices. ANT95-L stages
utilize advanced direct-drive technology pioneered by Aerotech
to achieve the highest level of positioning performance. This
direct-drive technology is high-performance, non-cogging, noncontact,
high-speed, high-resolution, and high-accuracy, and the use of
anti-creep crossed-roller bearing elements allows even higher precision,
smaller incremental moves to be accomplished reliably and repeatably.
This unique drive and bearing combination, packaged in an extremely
small-profile and footprint, offers tangible advantages in many
applications such as high-precision positioning, disk-drive fabrication,
fiber alignment, optical delay element actuation, sensor testing,
and scanning processes that demand smooth and precise motion.
Flexible System Design
The ANT95-L family has universal mounting and tabletop
patterns that allow for easy system integration. Two, three,
or more axes can be easily combined for flexible system
designs and multi-axis configurations.
System Characteristics
Outstanding accuracy, position repeatability, and in-position
stability require high system resolution. The ANT95-L stage’s
industry-leading 1 nm minimum incremental step size provides this
high level of performance. Excellent in-position stability, assisted
by high-quality, anti-creep crossed-roller bearings, enables virtually
maintenance-free operation over the life of the product. Aerotech’s
direct-drive technology has no hysteresis or backlash, enabling
accurate and repeatable nanometer-scale motion.

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