Introduction
Aerotech’s ANT series stages are the world’s first nanometer-level
positioning systems with greater than 25 mm travel. The
ANT130-L-Z and ANT130-L-Z-PLUS crossed-roller stages are
the best-in-class in combining speed, accuracy, resolution,
repeatability, reliability, and size, and are offered in two
accuracy grades. As an evolution of the ANT stage family,
these linear stages exhibit enhanced motion performance over
Aerotech’s first generation ANT series.
Noncontact Direct-Drive
All of the original ANT series’ direct-drive advantages have
been preserved in the ANT130-L-Z family. Only noncontact
direct-drive technology offers the robust, accurate, and high-speed
positioning necessary for mass production of precision
devices. ANT130-L-Z stages utilize advanced direct-drive
technology pioneered by Aerotech to achieve the highest
level of positioning performance for high-precision positioning,
disk-drive fabrication, fiber alignment, optical delay element
actuation, sensor testing, and scanning processes that demand
smooth and precise motion.
The ANT130-L-Z stages use a nearly frictionless
counterbalance mechanism to maintain performance levels
while minimizing motor heating. The counterbalance is useradjustable
from 0 to 10 kg.
Flexible System Design
The ANT130-L-Z family has universal mounting and
tabletop patterns that allow for easy system integration.
Two, three, or more axes can be easily combined for
flexible system designs and multi-axis configurations.
System Characteristics
Outstanding accuracy, position repeatability, and in-position
stability require high system resolution. The ANT130-L-Z
stage’s industry-leading 2 nm minimum incremental step size
provides this high level of performance. Excellent in-position
stability is assisted by high-quality, anti-creep, crossed-roller
bearings. The stage offers virtually maintenance-free operation
over the life of the product. Aerotech’s direct-drive technology
has no hysteresis or backlash, enabling accurate and
repeatable nanometer-scale motion.
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