Introduction
Aerotech’s ANT series stages are the world’s first nanometer-level
positioning systems with greater than 25 mm travel. The
ANT95-XY crossed-roller-bearing, linear motor, dual-axis
stage continues the evolution of the ANT series of stages. The
ANT95-XY and ANT95-XY-PLUS are three-piece designs that
allow travel in two dimensions (X and Y). The sleek design
provides an extremely low profile of only 60 mm. The stage
comes with proprietary direct-drive motor technology,
noncontact linear encoders, limits, integrated cable
management system, and two grades of accuracy.
Stage Design
The ANT95-XY design allows critical elements such as
orthogonality, straightness, and flatness to be optimized,
resulting in a stage with exceptional geometrical tolerances.
Aerotech’s direct-drive technology has no hysteresis or
backlash, enabling accurate and repeatable nanometer-scale
motion in both the X and Y dimensions. Both travel options (25
mm x 25 mm or 50 mm x 50 mm) come with the 60 mm
profile height. You can expect outstanding accuracy, position
repeatability, and in-position stability with the ANT95-XY stage.
Noncontact Direct-Drive
Only noncontact direct-drive technology offers the robust,
accurate, and high-speed positioning necessary for mass
production of precision devices. ANT95-XY stages utilize
advanced direct-drive technology pioneered by Aerotech to
achieve the highest level of positioning performance. This
direct-drive technology is high-performance, non-cogging,
noncontact, high-speed, high-resolution, and high-accuracy. This unique drive and bearing combination, packaged in an
extremely small-profile and footprint, offers tangible
advantages in many applications such as high-precision
positioning, disk-drive fabrication, fiber alignment, optical
delay element actuation, sensor testing, and scanning
processes that demand smooth and precise motion. The
integrated cable management system is designed for long life
and to minimize drag forces.
Multi-Axis Configurations
The ANT95-XY can be combined with other Aerotech ANT
series products (vertical lift stages, direct-drive rotaries, and
goniometers) to create unique, high performance, multi-axis
systems.

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