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Home >> NANO Technology >> ANT95-L Series Crossed-Roller Bearing Linear Stage
   
ANT95-L Series
Description
   

Mechanical Specifications

ANT95-25-L

ANT95-25-L-PLUS

ANT95-50-L

ANT95-50-L-PLUS
Travel 25 mm 25 mm 50 mm 50 mm
Accuracy(1) ±2.5 μm (±100 μin) ±250 nm (±10 μin) ±2.5 μm (±100 μin) ±250 nm (±10 μin)
Resolution 1 nm (0.04 μin) 1 nm (0.04 μin) 1 nm (0.04 μin) 1 nm (0.04 μin)
Repeatability (Bi-Directional) (1) ±100 nm (±4 μin) ±75 nm (±3 μin) ±100 nm (±4 μin) ±75 nm (±3 μin)
Repeatability (Uni-Directional) (1) ±25 nm (±1 μin) ±25 nm (±1 μin) ±25 nm (±1 μin) ±25 nm (±1 μin)
Straightness(1) ±1.0 μm (±40 μin) ±1.0 μm (±40 μin) ±1.0 μm (±40 μin) ±1.0 μm (±40 μin)
Flatness(1) ±1.0 μm (±40 μin) ±1.0 μm (±40 μin) ±1.0 μm (±40 μin) ±1.0 μm (±40 μin)
Pitch 10 arc sec 10 arc sec 10 arc sec 10 arc sec
Roll 10 arc sec 10 arc sec 10 arc sec 10 arc sec
Yaw 5 arc sec 5 arc sec 5 arc sec 5 arc sec
Maximum Speed 500 mm/s (20 in/s) 500 mm/s (20 in/s) 500 mm/s (20 in/s) 500 mm/s (20 in/s)
Maximum Acceleration 5 g - 50 m/s2 (No Load) 5 g - 50 m/s2 (No Load) 4 g - 40 m/s2 (No Load) 4 g - 40 m/s2 (No Load)
Speed Stability See graph for typical performance
Settling Time See graph for typical performance
In-Position Stability(2) <1 nm (<0.04 μin) <1 nm (<0.04 μin) <1 nm (<0.04 μin) <1 nm (<0.04 μin)
Maximum Force (Continuous) 7.75 N 7.75 N 9.5 N 9.5 N
Load Capacity(3) Horizontal 5.0 kg (11 lb) 5.0 kg (11 lb) 7.0 kg (15.4 lb) 7.0 kg (15.4 lb)
Side 5.0 kg (11 lb) 5.0 kg (11 lb) 5.0 kg (11 lb) 5.0 kg (11 lb)
Moving Mass 0.46 kg (1.0 lb) 0.46 kg (1.0 lb) 0.52 kg (1.1 lb) 0.52 kg (1.1 lb)
Stage Mass 0.8 kg (1.8 lb) 0.8 kg (1.8 lb) 1.2 kg (2.7 lb) 1.2 kg (2.7 lb)
Material Aluminum Body/Black Hardcoat Finish
MTBF (Mean Time Between Failure) 30,000 Hours

Notes:
1. Certified with each stage.
2. In-Position Jitter listing is 3 sigma value.
3. Axis orientation for on-axis loading is listed.
• Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of combined multi-axis systems is payload and workpoint dependent. Consult factory for
multi-axis or non-standard applications.
• -PLUS requires the use of an Aerotech controller.

 

Mechanical Specifications

ANT95-75-L

ANT95-75-L-PLUS

ANT95-100-L

ANT95-100-L-PLUS
Travel 75 mm 75 mm 100 mm 100 mm
Accuracy(1) ±4.0 μm (±160 μin) ±275 nm (±11 μin) ±5.0 μm (±200 μin) ±275 nm (±11 μin)
Resolution 1 nm (0.04 μin) 1 nm (0.04 μin) 1 nm (0.04 μin) 1 nm (0.04 μin)
Repeatability (Bi-Directional) (1) ±100 nm (±4 μin) ±75 nm (±3 μin) ±100 nm (±4 μin) ±75 nm (±3 μin)
Repeatability (Uni-Directional) (1) ±25 nm (±1 μin) ±25 nm (±1 μin) ±25 nm (±1 μin) ±25 nm (±1 μin)
Straightness(1) ±2.0 μm (±80 μin) ±2.0 μm (±80 μin) ±2.5 μm (±100 μin) ±2.5 μm (±100 μin)
Flatness(1) ±2.0 μm (±80 μin) ±2.0 μm (±80 μin) ±2.5 μm (±100 μin) ±2.5 μm (±100 μin)
Pitch 10 arc sec 10 arc sec 10 arc sec 10 arc sec
Roll 10 arc sec 10 arc sec 10 arc sec 10 arc sec
Yaw 5 arc sec 5 arc sec 5 arc sec 5 arc sec
Maximum Speed 500 mm/s (20 in/s) 500 mm/s (20 in/s) 500 mm/s (20 in/s) 500 mm/s (20 in/s)
Maximum Acceleration 3 g - 30 m/s2 (No Load) 3 g - 30 m/s2 (No Load) 3 g - 30 m/s2 (No Load) 3 g - 30 m/s2 (No Load)
Speed Stability See graph for typical performance
Settling Time See graph for typical performance
In-Position Stability(2) <1 nm (<0.04 μin) <1 nm (<0.04 μin) <1 nm (<0.04 μin) <1 nm (<0.04 μin)
Maximum Force (Continuous) 9.5 N 9.5 N 12.9 N 12.9 N
Load Capacity(3) Horizontal 7.0 kg (15.4 lb) 7.0 kg (15.4 lb) 7.0 kg (15.4 lb) 7.0 kg (15.4 lb)
Side 5.0 kg (11 lb) 5.0 kg (11 lb) 5.0 kg (11 lb) 5.0 kg (11 lb)
Moving Mass 0.72 kg (1.6 lb) 0.72 kg (1.6 lb) 0.91 kg (2.0 lb) 0.91 kg (2.0 lb)
Stage Mass 1.64 kg (3.6 lb) 1.64 kg (3.6 lb) 2.1 kg (4.6 lb) 2.1 kg (4.6 lb)
Material Aluminum Body/Black Hardcoat Finish
MTBF (Mean Time Between Failure) 30,000 Hours

Notes:
1. Certified with each stage.
2. In-Position Jitter listing is 3 sigma value.
3. Axis orientation for on-axis loading is listed.
• Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of combined multi-axis systems is payload and workpoint dependent. Consult factory for
multi-axis or non-standard applications.
• -PLUS requires the use of an Aerotech controller.

 

 

Electrical Specifications

ANT95-25-L

ANT95-25-L-PLUS

ANT95-50-L

ANT95-50-L-PLUS
Drive System Brushless Linear Servomotor
Feedback Noncontact Linear Encoder
Maximum Bus Voltage ±40 VDC
Limit Switches 5 V, Normally Closed
Home Switch Near Center

 

Electrical Specifications

ANT95-75-L

ANT95-75-L-PLUS

ANT95-100-L

ANT95-100-L-PLUS
Drive System Brushless Linear Servomotor
Feedback Noncontact Linear Encoder
Maximum Bus Voltage ±40 VDC
Limit Switches 5 V, Normally Closed
Home Switch Near Center


Recommended Controller

ANT95-25-L

ANT95-25-L-PLUS

ANT95-50-L

ANT95-50-L-PLUS
Multi-Axis A3200 Npaq-MXR
Npaq MR-MXH
Ndrive ML-MXH
Ensemble Epaq-MXH
Epaq MR-MXH
Ensemble ML-MXH
Single Axis Soloist Soloist ML-MXH

Notes:
1. Linear amplifiers are required to achieve the listed specifications. Other options are available.

 

Recommended Controller

ANT95-75-L

ANT95-75-L-PLUS

ANT95-100-L

ANT95-100-L-PLUS
Multi-Axis A3200 Npaq-MXR
Npaq MR-MXH
Ndrive ML-MXH
Ensemble Epaq-MXH
Epaq MR-MXH
Ensemble ML-MXH
Single Axis Soloist Soloist ML-MXH

Notes:
1. Linear amplifiers are required to achieve the listed specifications. Other options are available.



Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25ºC/24 hours. If this is not possible, alternate products are available. Please consult Aerotech Sales Engineering for more information.

 

Downloads

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      - Instructions 
  Manual

Similar Products

  ANT95-XY



Supporting Products

  Soloist
  Ensemble
  A3200
  Ndrive



 
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Accuracy X
For a specific point of interest in three-dimensional space, accuracy is the difference between the actual position in space and the position as measured by a measurement device. Stage accuracy is influenced by the feedback mechanism (linear encoder, rotary encoder, laser interferometer), drive mechanism (ball screw, lead screw, linear motor), and trueness of bearing ways. The measurement reference for Aerotech linear products is a laser interferometer.

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Straightness X
Straightness is a deviation from the true line of travel perpendicular to the direction of travel in the horizontal plane. For the stage assembly listed above, a straightness deviation in the travel of the X-axis stage will cause a positioning error in the Y direction. A straightness deviation in the travel of the Y-axis stage will cause a positioning error in the X direction.
Flatness X
Flatness is a deviation from the true line of travel perpendicular to the direction of travel in the vertical plane. For the stage assembly shown, a flatness deviation in the travel of the X-axis or Y-axis stage will cause a positioning error in the Z direction.
Roll X
Roll is a rotation around an axis in the horizontal plane parallel to the direction of travel. If the position of interest being measured is not located at the center of rotation, then the roll rotation will cause an Abbe error in two dimensions. For the X-axis, a roll rotation will cause an Abbe error in both the Y and Z direction.

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Pitch X
Pitch is a rotation around an axis in the horizontal plane perpendicular to the direction of travel. If the position of interest being measured is not located at the center of rotation, then the pitch rotation will cause an Abbe error in two dimensions.

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Yaw X
Yaw is a rotation around an axis in the vertical plane perpendicular to the direction of travel. If the position of interest being measured is not located at the center of rotation, then the yaw rotation will cause an Abbe error in two dimensions.

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Repeatability X
Repeatability is defined as the range of positions attained when the system is repeatedly commanded to one location under identical conditions. Uni-directional repeatability is measured by approaching the point from one direction, and ignores the effects of backlash or hysteresis within the system. Bi-directional repeatability measures the ability to return to the point from both directions. Many vendors specify repeatability as ± (resolution). This is the repeatability of any digital servo system as measured at the encoder. All of Aerotech's specifications, which include the effects of Abbe error, friction, etc. are based on actual operating conditions and usage - not on theoretical, unachievable values.
Resolution X
The smallest possible movement of a system. Also known as step size, resolution is determined by the feedback device and capabilities of the motion system. Theoretical resolution may exceed practical resolution.

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Axial Error Motion (Synchronous) X
Component of total error motion that occurs at integer multiples of rotation frequency coaxial with stage axis of rotation.
Radial Error Motion (Synchronous) X
Component of total error motion that occurs at integer multiples of rotation frequency perpendicular to the stage axis of rotation at a given axial location.
Tilt Error Motion (Synchronous) X
Component of total error motion that occurs at integer multiples of rotation frequency in an angular direction relative to the stage axis rotation. In previous specification tables published by Aerotech, the term wobble was used and is synonymous; however, wobble is no longer preferred.
Axial Error Motion (Asynchronous) X
Component of total error motion that occurs at noninteger multiples of rotation frequency coaxial with stage axis of rotation.
Radial Error Motion (Asynchronous) X
Component of total error motion that occurs at noninteger multiples of rotation frequency perpendicular to the stage axis of rotation at a given axial location.
Tilt Error Motion (Asynchronous) X
Component of total error motion that occurs at noninteger multiples of rotation frequency in an angular direction relative to the stage axis rotation.
Vacuum X
Aerotech’s vast application experience, unmatched product scope, and extensive engineering capabilities make us the partner of choice for vacuum-compatible motion systems. Since its inception, Aerotech has designed and manufactured the highest-performance motion control and positioning systems available, and our vacuum-compatible platforms are no exception.

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Cleanroom X
Aerotech has a long history of providing components and systems to the semiconductor and medical device manufacturing industries. This experience has provided extensive knowledge of how to prepare stages for cleanroom use.

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Maximum Load X
All maximum load values in the stage specification tables are based on the stage operating in a Normal Loading Condition. A Normal Loading condition results when the load is attached to the stage with the center of gravity positioned directly above the bearings.

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Orthogonality X
The condition of a surface or axis which is perpendicular (offset 90 degrees) to a second surface or axis. Orthogonality specification refers to the error from 90 degrees from which two surfaces of axes are aligned.
Accuracy X
Accuracy is defined as the difference between the commanded position and the actual position of a rotary stage. The accuracy can be influenced by the feedback device, drive mechanism (motor type), axis of rotation error motions, thermal effects (such as environmental changes), and the accuracy of mounting surfaces. Aerotech measures the accuracy of rotary tables using laser measurement techniques with ultra-precise index tables as the measurement reference. Unless specifically noted, Aerotech specifies accuracy as a peak-to-valley deviation from the nominal position.