Home >> NANO Technology >> ANT95-L-Z Series Mechanical Bearing, Linear Motor Vertical Stage

Introduction
Aerotech’s ANT95 series stages are the world’s first nanometer-level positioning systems with greater than 25 mm travel. The ANT95-L-Z and ANT95-L-Z-PLUS crossed-roller stages are the best-in-class in combining speed, accuracy, resolution, repeatability, reliability, and size, and are offered in two accuracy grades. As an evolution of the popular ANT stage family, these linear stages exhibit enhanced motion performance over Aerotech’s first generation ANT series.

Noncontact Direct-Drive
All of the original ANT series’ direct-drive advantages have been preserved in the ANT95-L-Z family. Only noncontact direct-drive technology offers the robust, accurate, and high-speed positioning necessary for mass production of precision devices. ANT95-L-Z stages utilize advanced direct-drive technology pioneered by Aerotech to achieve the highest level of positioning performance. This direct-drive technology is high-performance, non-cogging, noncontact, high-speed, high-resolution, and high-accuracy. This unique drive and bearing combination, packaged in an extremely small-profile and footprint, offers tangible advantages in many applications such as high-precision positioning, disk-drive fabrication, fiber alignment, optical delay element actuation, sensor testing, and scanning processes that demand smooth and precise motion.

Flexible System Design
The ANT95-L-Z family has universal mounting and tabletop patterns that allow for easy system integration. Two, three, or more axes can be easily combined for flexible system designs and multi-axis configurations.

System Characteristics
Outstanding accuracy, position repeatability, and in-position stability require high system resolution. The ANT95-L-Z stage’s industry-leading 2 nm minimum incremental step size provides this high level of performance. Excellent in-position stability, assisted by high-quality, anti-creep crossed-roller bearings, enables virtually maintenance-free operation over the life of the product. Aerotech’s direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion.