The ANT95-R direct-drive rotary stages are designed as
part of Aerotech’s nano Motion Technology product
family. Our rotary stages offer unprecedented in-position
stability (0.005 arc sec) and incremental motion (0.01 arc
sec) performance.
Multi-Axis Capabilities
The ANT95-R series is designed for compatibility and easy
integration with Aerotech’s ANT linear stage product
offerings. Together these stages provide accuracy, stability,
and small size performance capability for almost any nanomanufacturing
or inspection application.
Dynamic Performance
In addition to the high precision levels, these systems offer
high dynamic performance and throughput ideal for disk
drive manufacture and test.
Durability
The ANT95-R stage series was designed to operate in a
24/7 manufacturing environment. Unlike other rotary
devices, the ANT95-R requires no periodic maintenance,
assuring years of trouble-free operation.
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