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ANT95-XY Series Two-Axis, Cross-Roller Bearing Linear Stage

ANT95-XY Series

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Mechanical Specifications		ANT95-25-XY	ANT95-25-XY-PLUS	ANT95-50-XY	ANT95-50-XY-PLUS
Travel		25 mm (1 in)	25 mm (1 in)	50 mm (2 in)	50 mm (2 in)
Accuracy⁽¹⁾		±3.0 µm (±120 µin)	±250 nm (±10 µin)	±3.0 µm (±120 µin)	±250 nm (±10 µin)
Resolution		1 nm	1 nm	1 nm	1 nm
Repeatability (Bi-Directional)⁽¹⁾		±100 nm	±50 nm	±100 nm	±50 nm
Straightness⁽¹⁾		±1.5 µm (±60 µin)	±1.5 µm (±60 µin)	±2.0 µm (±80 µin)	±2.0 µm (±80 µin)
Flatness⁽¹⁾		±2.0 µm (±80 µin)	±2.0 µm (±80 µin)	±2.5 µm (±100 µin)	±2.5 µm (±100 µin)
Pitch		10 arc sec	10 arc sec	10 arc sec	10 arc sec
Roll		10 arc sec	10 arc sec	10 arc sec	10 arc sec
Yaw		5 arc sec	5 arc sec	5 arc sec	5 arc sec
Orthogonality		10 arc sec	3 arc sec	10 arc sec	3 arc sec
Maximum Speed		500 mm/s (20 in/s) (Upper Axis)	500 mm/s (20 in/s) (Upper Axis)	500 mm/s (20 in/s) (Upper Axis)	500 mm/s (20 in/s) (Upper Axis)
Maximum Acceleration		4.5 g - 45 m/s² (No Load) (Upper Axis)	4.5 g - 45 m/s² (No Load) (Upper Axis)	2.75 g - 27 m/s² (No Load) (Upper Axis)	2.75 g - 27 m/s² (No Load) (Upper Axis)
Speed Stability		See graphs for typical performance
Settling Time		See graphs for typical performance
In-Position Stability⁽²⁾		3 nm	3 nm	3 nm	3 nm
Maximum Force (Continuous)		7.75 N	7.75 N	9.5 N	9.5 N
Load Capacity⁽³⁾	Horizontal	4.0 kg (8.8 lb)	4.0 kg (8.8 lb)	6.0 kg (13.2 lb)	6.0 kg (13.2 lb)
Moving Mass	Upper Axis	0.45 kg (1.0 lb)	0.45 kg (1.0 lb)	0.8 kg (1.8 lb)	0.8 kg (1.8 lb)
Moving Mass	Lower Axis	1.13 kg (2.5 lb)	1.13 kg (2.5 lb)	2.1 kg (4.6 lb)	2.1 kg (4.6 lb)
Stage Mass		1.8 kg (4 lb)	1.8 kg (4 lb)	3.2 kg (7 lb)	3.2 kg (7 lb)
Material		Aluminum Body/Black Hardcoat Finish
MTBF (Mean Time Between Failure)		20,000 Hours

Notes:
1. Certified with each stage.
2. In-Position Jitter listing is 3 sigma value.
3. Axis orientation for on-axis loading is listed.
4. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
5. -PLUS requires the use of an Aerotech controller.

Electrical Specifications	ANT95-25-XY	ANT95-25-XY-PLUS	ANT95-50-XY	ANT95-50-XY-PLUS
Drive System	Brushless Linear Servomotor
Feedback	Noncontact Linear Encoder
Maximum Bus Voltage	±40 VDC
Limit Switches	5 V, Normally Closed
Home Switch	Near Center

Recommended Controller		ANT95-25-XY	ANT95-25-XY-PLUS	ANT95-50-XY	ANT95-50-XY-PLUS
Multi-Axis	A3200	Npaq-MXR Npaq MR-MXH Ndrive ML-MXH
	Ensemble	Epaq-MXH Epaq MR-MXH Ensemble ML-MXH
Single Axis	Soloist	Soloist ML-MXH

Notes:
1. Linear amplifiers are required to achieve the listed specifications. Other options are available.

Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25ºC/24 hours. If this is not possible, alternate products are available. Please consult Aerotech Sales Engineering for more information.

Downloads

  PDF File
  CAD Drawing
  Manual

Similar Products

ANT95-L

Supporting Products

  Soloist
  Ensemble
  A3200
  Ndrive

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Aerotech is a motion controller and motion control systems manufacturer.