Aerotech’s Z-axis linear-motor vertical nanopositioners include the ANT95-L-Z and ANT130-L-Z. Both of these crossed-roller bearing, direct-drive linear vertical stages offer 2 nm resolution, <2 nm in-position stability, and ±300 nm accuracy. The ANT95-L-Z offers travels of 25 or 50 mm and loads up to 5.0 kg, while the ANT130-L-Z offers travels of 35 or 60 mm and loads to 10 kg. They are designed to be equally at home in the laboratory or 24/7 manufacturing environment.
Outstanding accuracy, position repeatability, and in-position stability require high system resolution. The ANT95-L-Z and ANT130-L-Z 2 nm minimum incremental step size provides this high level of performance. Excellent in-position stability, assisted by high-quality, anti-creep crossed-roller bearings, enables virtually maintenance-free operation over the life of the product. Aerotech’s direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion.
Aerotech nanopositioners are offered as stand-alone units, or as part of a complete positioning package that includes Aerotech’s own controls and drives. |
Aerotech’s ANT95 series linear-motor vertical travel stages offer 25 or 50 mm travel with nanometer-level positioning performance. The ANT95-L-Z and ANT95-L-Z-PLUS crossed-roller
stages are the best-in-class in combining speed,
accuracy, resolution, repeatability, reliability, and size, and
are offered in two accuracy grades.
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complete product information.
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Aerotech’s ANT130 series linear-motor vertical travel stages offer 35 or 60 mm travel with nanometer-level performance. The ANT130-L-Z and ANT130-L-Z-PLUS
crossed-roller stages are packaged in an extremely small-profile and compact footprint, and have universal mounting and tabletop patterns for easy system integration.
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complete product information.
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