Home >> Single-Axis Linear Nanopositioners

Aerotech’s single-axis linear nanopositioners include the ANT95-L and ANT130-L. Both of these crossed-roller bearing, direct-drive linear stages offer 1 nm resolution, <1 nm in-position stability, and ±250 nm accuracy. The ANT95-L offers travels of 25 or 50 mm and loads of 5.0 or 7.0 kg, while the ANT130-L offers travels of 35, 60, 110, and 160 mm and loads to 12 kg. They are designed to be equally at home in the laboratory or 24/7 manufacturing environment.

Outstanding accuracy, position repeatability, and in-position stability require high system resolution. The ANT95-L and ANT130-L 1 nm minimum incremental step size provides this high level of performance. Excellent in-position stability, assisted by high-quality, anti-creep crossed-roller bearings, enables virtually maintenance-free operation over the life of the product. Aerotech’s direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion.

Aerotech nanopositioners are offered as stand-alone units, or as part of a complete positioning package that includes Aerotech’s own controls and drives.

Aerotech’s NanoTranslation (ANT95-L, ANT95-L-PLUS) crossed-roller stages combine speed, accuracy, resolution, repeatability, reliability, and compact size, and are offered in two accuracy grades. As an evolution of the popular ANT stage family, these linear stages exhibit enhanced motion performance over Aerotech’s first generation ANT series. Product improvements such as 5 g acceleration, 500 mm/s velocity, enhanced load capacity, and standardized, universal base mounting patterns allow the use of this flexible stage family in an even wider range of configurations than its predecessors.

Click here for complete product information.

The ANT130-L series stages offer best-in-class performance in speed, accuracy, resolution, repeatability, reliability, travel range, and are offered in two accuracy grades. With its low profile and outstanding performance characteristics, the ANT130-L is the ultimate solution for high-accuracy alignment, inspection, positioning, and measurement stations.

Click here for complete product information.

1 nm Best-In-Class Resolution


1 nm step plot for ANT95-L