| Total Travel |
100 mm |
200 mm |
300 mm |
400 mm |
500 mm |
600 mm |
700 mm |
800 mm |
900 mm |
1000 mm |
| Drive System |
Linear Brushless
Servomotor |
| Feedback |
Noncontact Linear
Encoder |
| Resolution(5) |
5 nm - 1.0 µm |
Max Travel(1)(6)
Speed |
5 m/s |
Max Linear
Acceleration(6) |
3 g (30 m/s2
no load) |
| Max Horizontal(2)
Load |
40 kg |
| Max Side Load(2) |
20 kg |
| Continuous Force(3) |
207 N |
| Continuous Force (20 psi)(3) |
276 N |
| Peak Force(3) |
1106 N |
| Accuracy |
±1 µm/25 mm |
| Calibrated Accuracy(4) |
±5 µm Over Entire
Length of Travel |
| Repeatability |
± 0.5 µm |
| Nominal Stage Weight |
16.3 kg |
18.5 kg |
20.7 kg |
22.8 kg |
25.0 kg |
27.2 kg |
29.4 kg |
31.6 kg |
33.7 kg |
35.9 kg |
| Moving Weight |
3.28 kg (142
Motor Option) |
5.18 kg (264 Motor Option) |
| Material |
Aluminum |
| Finish |
Electroless
Nickel Base/Black Hardcoat Tabletop |
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