Aerotech - Precision Positioning Systems and Motion Control. Aerotech has over 35 years of experience as a manufacturer of top quality motion control products and positioning systems to medical, industrial, research, educational, and government customers.
                 United States [Change]

   Motion Control

  
 
Aerotech Products
Actuators
Air Bearing Stages
Amplifiers
Drive Racks
Gantry Systems
Goniometers
Industry Solutions
Lift Stages
Linear Motors
Linear Stages
Linear/Rotary
Combination Stages
Manual Positioners
Motion Controllers
Motion Simulators
NANO Technology
Optical Mounts
Rotary Motors
Rotary Stages
Spindles
Accessories
Markets
Assembly
Automotive
Data Storage
Education
Electronic Manufacturing
Fiberoptics
Flat Panel
Imaging
Laser Processing
Machine Tool
Medical
Military/Aerospace
Optics
Packaging
Photovoltaic
Semiconductor
Test & Inspection
Engineered Systems
Engineering Reference
Software/Manuals
CADs/3D Models
Site Index
 
 


Home >> Air Bearing Stages >> PlanarHD Air Bearing Stage

   
PlanarHD
Description
   

Basic Model

PlanarHD
Travel Scan Axis 500 mm
Step Axis 500 mm
Drive System Linear Brushless Servomotor (Scan Axis: BLM-264-A) (Step Axis: Two BLM-325-A)
Resolution 0.25 nm
Accuracy (Zero Expansion Scale)(1) ±300 nm
Repeatability (Long Term) ±50 nm
XYZ Position Stability (On Air) 20 nm
Granite Base Thickness 250 mm
Rated Payload (Maintaining Dynamic Specifications) 5 kg
Maximum Payload(2) 30 kg
Maximum Velocity with Rated Payload(3) Scan Axis 2000 mm/s
Peak Acceleration with Rated Payload Scan Axis 5 g (50 m/s2)
RMS Acceleration with Rated Payload Scan Axis 1.25 g (12 m/s2)
Stiffness, First Natural Frequency, Rated Payload >330 Hz
Pitch 2 arc sec
Roll 2 arc sec
Yaw 2 arc sec
XY Orthogonality(4) 1 arc sec
MTBF >40,000 hours
Notes:
1. Available with Aerotech controllers and HALAR calibration option.
2. Maximum load based on bearing capability; maximum application load may be limited by acceleration requirements.
3. Maximum speed based on stage capability; maximum application velocity may be limited by system data rate and system resolution.
4. Requires calibration.
5. To protect air bearing against under-pressure, an in-line pressure switch tied to motion controller E-stop input is recommended.
6. Air supply must be clean, dry to 0° F dewpoint and filtered to 0.25 µm or better; recommend nitrogen at 99.9% purity.
7. Optional construction materials include ceramic, invar, stainless, and titanium.

 

  Downloads

  PDF File
  CAD Drawing
  



  Supporting Products

  Motion Controllers
  Wafer Chucks
 
Site Index  |  Contact  |  Careers  |  Locate Sales Office  |  RSS Feed  |  Aerotech Ltd  |  Aerotech GmbH  |  AerotechKK   |  Aerotech China
  
 
Aerotech is a motion controller and motion control systems manufacturer.