Aerotech - Precision Positioning Systems and Motion Control. Aerotech has over 35 years of experience as a manufacturer of top quality motion control products and positioning systems to medical, industrial, research, educational, and government customers.
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Home >> Air Bearing Stages >> PlanarHD Air Bearing Stage

   
PlanarHD
Description
   

Basic Model

PlanarHD
Travel Scan Axis 500 mm
Step Axis 500 mm
Drive System Linear Brushless Servomotor (Scan Axis: BLM-264-A) (Step Axis: Two BLM-325-A)
Resolution 0.25 nm
Accuracy (Zero Expansion Scale)(1) ±300 nm
Repeatability (Long Term) ±50 nm
XYZ Position Stability (On Air) 20 nm
Granite Base Thickness 250 mm
Rated Payload (Maintaining Dynamic Specifications) 5 kg
Maximum Payload(2) 30 kg
Maximum Velocity with Rated Payload(3) Scan Axis 2000 mm/s
Peak Acceleration with Rated Payload Scan Axis 5 g (50 m/s2)
RMS Acceleration with Rated Payload Scan Axis 1.25 g (12 m/s2)
Stiffness, First Natural Frequency, Rated Payload >330 Hz
Pitch 2 arc sec
Roll 2 arc sec
Yaw 2 arc sec
XY Orthogonality(4) 1 arc sec
MTBF >40,000 hours
Notes:
1. Available with Aerotech controllers and HALAR calibration option.
2. Maximum load based on bearing capability; maximum application load may be limited by acceleration requirements.
3. Maximum speed based on stage capability; maximum application velocity may be limited by system data rate and system resolution.
4. Requires calibration.
5. To protect air bearing against under-pressure, an in-line pressure switch tied to motion controller E-stop input is recommended.
6. Air supply must be clean, dry to 0° F dewpoint and filtered to 0.25 µm or better; recommend nitrogen at 99.9% purity.
7. Optional construction materials include ceramic, invar, stainless, and titanium.

 

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Aerotech is a motion controller and motion control systems manufacturer.