| Total Travel
|
25 mm |
50 mm |
100 mm |
150 mm |
| Drive System
|
Linear Brushless Servomotor |
| Bus Voltage
|
up to 160 VDC |
|
Continuous Current |
Apk
|
up to 2.9 A |
|
Arms |
up to 2.1 A |
|
BEMF, line-line, max. |
V/m/sec
|
3.77952 |
|
V/in/sec |
0.096 |
|
Force Constant, Sinusoidal Drive |
N/A (lb/A),
pk |
3.29 (0.739) |
|
NA (lb/A), rms |
4.65 (1.04) |
| Resistance,
25 C, line-line |
Ohms |
5.2 |
| Resistance,
125 C, line-line |
Ohms |
7.28 |
| Inductance,
line-line |
mH |
0.7 |
| Magnetic
Pole Pitch |
mm (inch)
|
16 (0.63) |
| Feedback
|
Noncontact Linear Encoder |
|
Resolution |
LN |
0.5 nm (0.02 μin) |
|
LT |
2.5 nm (0.1 μin) |
| Maximum
Travel Speed(1) |
300 mm/s (12 in/s) |
| Maximum
Linear Acceleration |
1 g -10 m/s2 (394 in/s2)(no load) |
| Maximum
Load(2) |
Horizontal
|
15.0 kg (33.0 lb) |
|
Accuracy |
LN |
±0.2 μm (±8 μin)(3)
±1 μm (±40 μin) |
±0.2 μm (±8 μin)(3) ±1 μm (±40 μin)
|
±0.2 μm (±8 μin) (3) ±2 μm (±80 μin)
|
±0.5 μm (±20 μin) (3)
±3 μm (±120 μin) |
|
LT |
±0.3 μm (±12 μin) (3) ±2 μm
(±80 μin) |
±0.3 μm (±12 μin) (3) ±2 μm
(±80 μin) |
±0.3 μm (±12 μin) (3) ±5 μm
(±200 μin) |
±0.5 μm (±20 μin) (3) ±5 μm
(±200 μin) |
|
Repeatability |
LN(3)
|
±50 nm (±2 μin) |
|
LT |
±50 nm (±2 μin) (3); ±100 nm (±4 μin)
|
|
Straightness and Flatness(4) |
Differential
|
0.25 μm/25 mm (10 μin/in) |
|
Max Deviation |
±0.25 μm (±10 μin) |
±0.25 μm (±10 μin) |
±0.4 μm (±16 μin) |
±0.4 μm (±16 μin) |
| Pitch and
Yaw |
±0.25 arc sec |
±0.50 arc sec |
±1.0 arc sec |
±1.5 arc sec |
| Nominal
Stage Weight |
4.5 kg (10 lb) |
5.5 kg (12 lb) |
6.4 kg (14 lb) |
12.7 kg (28 lb) |
| Moving Mass
|
1.9 kg (4.2 lb) |
4.8 kg (10.6 lb) |
| Operating
Pressure(5) |
80 psi ±5 psi |
| Air Consumption(6)
|
0.5 SCFM |
| Construction
|
Aluminum Body/Hardcoat |
|
|
|
|
|
|
|
|