Leading-edge manufacturing, particularly in the semiconductor
and data storage industries, demands positioning tolerances beyond
the capability of conventional ball-screw and mechanical-bearing
positioning systems. The ABL1500, with its fully active preload,
exceptionally high stiffness, and excellent geometric characteristics
was designed specifically to meet those demands.
Air-Bearing Design for High Dynamic Performance
The ABL1500 incorporates an active preload on both
the vertical and horizontal surfaces. The opposing thin-film pressure
maintains the bearing nominal gap tolerance. This design, in addition
to the large air-bearing surface that distributes the load over
a large surface area, results in a stage with outstanding stiffness
that is ideal for heavy or offset loading.
Proprietary manufacturing techniques result in a stage with unsurpassed
geometrical characteristics. The air bearing has an inherent averaging
effect that maximizes performance. The thin film will fill small
surface voids and allow for other irregularities. This characteristic
yields superior pitch, roll, yaw, straightness and flatness specifications.
Linear Motor Drive
The driving force behind this stage is Aerotech’s
BLMC series brushless linear
servomotor. Aerotech’s long history and experience as
a motor manufacturer is reflected in this design. The BLMC utilizes
an ironless forcer, which means there is zero cogging and no attractive
forces, resulting in unsurpassed smoothness of motion. Capable
of generating high force and velocity, the BLMC represents the
ultimate combination of power and performance.
Zero Maintenance
Our totally noncontact air bearing, noncontact linear
motor drive, and noncontact feedback device ensure years of maintenance-free
operation at the high performance levels that are expected of
Aerotech equipment. Because there is no mechanical contact between
moving elements, the ABL1500 experiences no wear or reduction
in performance over time. Service life is virtually unlimited
and since there is no lubrication – only clean, dry gas
– air bearings are ideal for cleanroom and medical applications.
Cable Management
We carefully optimize the cable bend radius to ensure
years of trouble-free operation. In the unlikely event of failure,
Aerotech’s modular design makes cable replacement quick
and easy with minimal downtime. We include all customer-required
cables, air hoses, etc. in our CMS bundle to facilitate integration
into the final system. Both ends are fully connectorized for simple
integration into the customer’s machine.
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