| Total Travel |
100 mm
(4 in) |
200 mm
(8 in) |
300 mm
(12 in) |
400 mm
(16 in) |
500 mm
(20 in) |
750 mm
(30 in) |
1000 mm
(40 in) |
1200 mm
(48 in) |
| Motor Type |
Linear Brushless Servomotor (BLMC-192-A) |
| Bus Voltage |
Up
to 320 VDC |
| Continuous
Current |
Apk |
6.1
A |
| Arms |
4.4
A |
| Feedback |
Noncontact Linear Encoder (LN, LT, or LZAS) or Laser Interferometer
|
|
Encoder |
LT |
0.005µm - 1.0 µm (0.2 µin - 40 µin) |
|
LN |
0.001 µm - 0.2 µm (0.04µin - 8 µin) |
|
LZAS |
0.064 nm - 6.4 nm (0.0025 µin - 0.25 µin) |
|
Laser Interferometer |
0.3 nm - 79 nm (0.12 µin - 3.2 µin) |
| Maximum Speed(2) |
2 m/s (80 in/s) |
| Maximum Acceleration |
2 g - 20 m/s2 (768 in/s2) (no-load) |
| Maximum Load
(3) |
50.0 kg (110.0 lb) |
|
Overall Accuracy |
LT |
HALAR(4) |
±0.5 µm (±20 µin) |
±0.75 µm (±30 µin) |
±1 µm (±40 µin) |
|
Standard |
±4.0 µm
(±160 µin) |
±8.0 µm
(±320 µin) |
±12.0 µm
(±480 µin) |
±16.0 µm
(±640 µin) |
±20.0 µm
(±800 µin) |
±30.0 µm (±1200 µin) |
±40.0 µm (±1600 µin) |
±48.0 µm
(±1960 µin) |
|
LN |
HALAR(4) |
±0.5 µm (±20 µin) |
±0.75 µm (±30 µin) |
±1 µm (±40 µin) |
|
Standard |
±5.0 µm (±200 µin) |
|
Laser Interferometer |
Standard ±10 ppm; Compensated ±1.5 ppm (6) |
|
LZAS |
±0.2 µm over entire travel (±8 µin) |
|
|
Repeatability |
LT |
±0.2 µm (±8 µin) |
±0.3 µm (±12 µin) |
±0.4 µm (±16 µin) |
|
LN |
±0.2 µm (±8 µin) |
±0.3 µm (±12 µin) |
±0.4 µm (±16 µin) |
|
LZAS |
±0.1 µm (±4 µin) |
|
Straightness and Flatness |
Maximum Deviation |
±0.25 µm
(±10 µin) |
±0.40 µm
(±16 µin) |
±0.75 µm
(±30 µin) |
±1.5 µm
(±60 µin) |
±2.0 µm
(±80 µin) |
±3.0 µm
(±120 µin) |
±4.0 µm
(±160 µin) |
±5.0 µm
(±200 µin) |
| Pitch/Roll/Yaw |
1 arc sec |
2 arc sec |
3 arc sec |
4 arc sec |
5 arc sec |
7.5 arc sec |
10 arc sec |
12 arc sec |
| Nominal Stage
Mass |
30.0 kg
(66.1 lb) |
34.5 kg
(76.1 lb) |
39.5 kg
(87.1 lb) |
44.0 kg
(97.0 lb) |
49.0 kg
(108.0 lb) |
61.0 kg
(134.5 lb) |
72.5 kg
(159.8 lb) |
79.5 kg
(175.3 lb) |
| Operating
Pressure (6) |
80 psi ±5 psi |
| Air Consumption
(7) |
0.7 SCFM (Single Axis) |
| Moving Mass |
9
kg |
| Material |
Aluminum |
| Finish |
Hard Coating (62 Rockwell Hardness TeflonR Impregnated) |
|
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Notes:
1. When mounting the ABL2000
in an XY configuration, the maximum upper axis length is 300 mm.
2. Maximum speed based on stage capability; maximum application
velocity may be limited by system data rate and system resolution.
3. Maximum load based on bearing capability; maximum application
load may be limited by acceleration requirements.
4. Available with Aerotech controllers.
5. Requires environmental compensation.
6. To protect air bearing against under-pressure, an in-line pressure
switch tied to the motion controller/amplifier E-stop input is
recommended.
7. Air supply must be clean, dry to 0° F dewpoint and filtered
to 0.25 µm or better; recommend nitrogen at 99.9% purity.
8. Specifications are for single-axis systems, measured 50 mm
above the tabletop. Performance of multi-axis systems is payload
and workpoint dependent. Consult factory for multi-axis
or non-standard applications.
|
United
States [Change]
