The ABL3600 dual-axis, large aperture, open-frame, airbearing
stage addresses the unique needs of scanning microscopy and mask
and wafer inspection.
Design and Construction
The combination of high stiffness air bearings and dual linear-motor-driven
axes provides an XY open-frame stage with exceptional performance
characteristics. The ABL3600 represents a major upgrade in performance
over traditional mechanical bearing open-frame stages.
As with all Aerotech air-bearing systems, proprietary manufacturing
techniques are used to produce stages with unsurpassed geometric
characteristics including straightness, flatness, pitch, roll,
and yaw. The ABL3600 is manufactured in Aerotech’s state-of-the-art
production facility, and is machined with exacting tolerances
that are unachievable by conventional methods.
Brushless Linear Servomotor
The ABL3600 incorporates a high-power linear motor to meet the
needs of the most demanding applications. This results in a stage
with all of the advantages of a direct-drive mechanism: zero backlash,
no windup, exceptional acceleration, zero friction, and outstanding
servo stiffness. Many applications require extreme stability of
motion that can only be met with a linear motor drive. Since the
drive train has zero friction and no recirculating elements, the
ABL3600 is ideal for scanning, imaging, or any other precision
application.
High-Accuracy Linear Encoder Feedback
The standard feedback device is a high-resolution, noncontact,
linear encoder. This noncontact encoder offers exceptional repeatability
and stability over a range of operating conditions. Both digital
and analog output versions are available.
Cable Management
Years of research have resulted in what is universally considered
to be the best cable management system (CMS) in the industry.
We carefully optimize the cable bend radius and utilize only the
highest quality cable to ensure years of trouble-free operation.
In the unlikely event of failure, Aerotech’s modular design
makes cable replacement quick and easy with minimal downtime.
To facilitate integration into the final system, we include all
customer-required cables, air hoses, etc. in our CMS bundle. Both
ends are fully connectorized for simple integration into the customer’s
machine.
Custom Designs
Aerotech has engineered and manufactured custom highperformance
systems to meet customers’ needs and specifications for
a variety of applications. We can draw on over 35 years of motion
control and positioning system experience to produce the ideal
solution for your application.
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