United
States [Change]
|
|||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
|
|||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
|
|||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
1. Maximum speed based on stage capability; maximum application velocity may be limited by system data rate and system resolution. 2. Maximum load based on bearing capability; maximum application load may be limited by acceleration requirements. 3. Available with Aerotech controllers and HALAR calibration option. 4. To protect air bearing against under-pressure, an in-line pressure switch tied to motion controller E-stop input is recommended. 5. Air supply must be clean, dry to 0° F dew point, and filtered to 0.25 µm or better; recommend nitrogen at 99.9% purity. 6. Requires vacuum preload. 7. Specifications are for single-axis systems, measured 50 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications. |
|||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
 |
|||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
| Downloads PDF FileCAD Drawing Manual |
Supporting ProductsMotion ControllersWafer Chucks |
Aerotech is a motion
controller and motion
control systems manufacturer.