Leading-edge manufacturing, particularly in the semiconductor
and data storage industries, demands positioning tolerances beyond
the capability of conventional ball-screw and mechanical-bearing
positioning systems. The ABL8000, with its fully active preload,
exceptionally high stiffness, and excellent geometric characteristics
was designed specifically to meet those demands.
Air Bearing Design
The ABL8000 incorporates an active preload on both the vertical
and horizontal surfaces. The opposing thin-film pressure maintains
the bearing nominal gap tolerance. This design, in addition to
the large air-bearing surface that distributes the load over a
large surface area, results in a stage with outstanding stiffness
that is ideal for heavy or offset loading.
Proprietary manufacturing techniques result in a stage with unsurpassed
geometrical characteristics. The air bearing has an inherent averaging
effect that maximizes performance. The thin film will fill small
surface voids and allow for other irregularities. This characteristic
yields superior pitch, roll, yaw, straightness and flatness specifications
Linear Motor Drive
The driving force behind this stage is Aerotech’s BLM series
brushless linear servomotor. Aerotech’s long history and
experience as a motor manufacturer is reflected in this design.
The BLM utilizes an ironless forcer, which means there is zero
cogging and no attractive forces – resulting in unsurpassed
smoothness of motion. Capable of generating high force and velocity,
the BLM represents the ultimate combination of power and performance.
Zero Maintenance
Our totally noncontact air bearing, noncontact linear motor drive,
and noncontact feedback device ensure years of maintenance-free
operation at the high performance levels that are expected of
Aerotech equipment. Because there is no mechanical contact between
moving elements, the ABL8000 experiences no wear or reduction
in performance over time. Service life is virtually unlimited
and since there is no lubrication – only clean, dry gas
– air bearings are ideal for clean room and medical applications.
Cable Management
We carefully optimize the cable bend radius to ensure years of
trouble-free operation. In the unlikely event of failure, Aerotech’s
modular design makes cable replacement quick and easy with minimal
downtime.
To facilitate integration into the final system, we include all
customer-required cables, air hoses, etc. in our CMS bundle. Both
ends are fully connectorized for simple integration into the customer’s
machine. |
