ABL8000 Air Bearing Stage

ABL8000

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Description

Specifications

Dimensions

Order Information

Basic Model			ABL80020	ABL80030	ABL80040	ABL80050	ABL80075	ABL80100
Total Travel⁽¹⁾			200 mm (8 in)	300 mm (12 in)	400 mm (16 in)	500 mm (20 in)	750 mm (30 in)	1000 mm (40 in)
Drive System			Linear Brushless Servomotor [BLM-142-A (-SC) or BLM-264-A (-LC)]
Bus Voltage			Up to 320 VDC
Continuous Current		A_pk	5.3 A (-SC); 8.7 A (-LC)
		A_rms	3.8 A (-SC); 6.2 A (-LC)
Feedback			Noncontact Linear Encoder (LN or LT) or Laser Interferometer
Resolution	LN		0.001 µm - 0.2 µm (0.04 µin - 8 µin)
	LT		0.005 µm - 1.0 µm (0.2 µin - 40 µin)
	Laser Interferometer		0.3 nm - 79 nm (0.012 µin - 3.2 µin)
Maximum Travel Speed⁽²⁾			2 m/s (80 in/s)
Maximum Linear Acceleration			2 g - 20 m/s² (768 in/s²) (no-load)
Maximum Load⁽³⁾			70 kg (-SC); 120 kg (-LC)
Continuous Stall Force ^(4,5)		Air (20 psi)	BLM-142-A [168.0 N (37.9 lb)]; BLM-264-A [276.0 N (62.0 lb)]
		No Air	BLM-142-A [109.0 N (24.6 lb)]; BLM-264-A [207.0 N (46.4 lb)]
Peak Force ⁽⁵⁾			BLM-142-A [673.0 N (151.0 lb)]; BLM-264-A [1106.0 N (248.0 lb)]
Overall Accuracy	LN	HALAR⁽⁶⁾	±0.5 µm (±20 µin)		±0.75 µm (±30 µin)		±1.0 µm (±40 µin)
		Standard	±5.0 µm (±200 µin)
	LT	HALAR⁽⁶⁾	±0.5 µm (±20 µin)		±0.75 µm (±30 µin)		±1.0 µm (±40 µin)
		Standard	±8.0 µm (±320 µin)	±12.0 µm (±480 µin)	±16.0 µm (±640 µin)	±24.0 µm (±960 µin)	±30.0 µm (±1200 µin)	±40.0 µm (±1600 µin)
	Laser Interferometer		Standard ±10 ppm; Compensated ±1.5 ppm⁽⁷⁾
Repeatability		LN	±0.2 µm (±8 µin)			±0.3 µm (±12 µin)	±0.4 µm (±16 µin)
		LT	±0.2 µm (±8 µin)			±0.3 µm (±12 µin)	±0.4 µm (±16 µin)
Straightness and Flatness	Differential		0.25 µm/25 mm (10 µin/in)		0.50 µm/25 mm (20 µin/in)
	Maximum Deviation		±0.4 µm (±16 µin)	±0.75 µm (±30 µin)	±1.5 µm (±60 µin)	±2.0 µm (±80 µin)	±3.0 µm (±120 µin)	±4.0 µm (±160 µin)
Pitch/Roll/Yaw			2 arc sec	3 arc sec	4 arc sec	5 arc sec	7.5 arc sec	10 arc sec
Operating Pressure⁽⁸⁾			80 psi ±5 psi
Air Consumption⁽⁹⁾			1.6 SCFM (-LC Single Axis); 1.0 SCFM (-SC Single Axis)
Nominal Stage Weight			70.0 kg (154.3 lb)	77.0 kg (169.8 lb)	85.5 kg (188.5 lb)	93.5 kg (206.1 lb)	113.0 kg (249.1 lb)	131.5 kg (289.9 lb)
Moving Mass			10 kg (-SC); 16 kg (-LC)
Material			Aluminum
Finish			Hard Coating (62 Rockwell Hardness )

Notes:
1. When mounting the ABL8000 in an XY configuration, the maximum upper axis length is 400 mm.
2. Maximum speed based on stage capability; maximum application velocity may be limited by system data rate and system resolution.
3. Maximum load based on bearing capability; maximum application load may be limited by acceleration requirements.
4. Thermal limitations of positioning stage with respect to performance may limit continuous force output.
5. Force may be limited by amplifier output.
6. Available with Aerotech controllers.
7. Requires environmental compensation.
8. To protect air bearing against under-pressure, an in-line pressure switch tied to the motion controller/amplifier E-stop input is recommended.
9. Air supply must be clean, dry to 0° F dewpoint and filtered to 0.25 µm or better; recommend nitrogen at 99.9% purity.
10. Specifications are for single-axis systems, measured 50 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.

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ABL8000

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