The ABL/ABLH9000 is simply the world’s highest performance
air bearing. Designed to meet the exacting requirements of wafer,
flat panel display, and optical inspection and fabrication, the
ABL/ABLH9000 sets new standards of performance.
Air-Bearing Design
The ABL/ABLH9000 incorporates an active preload on both vertical
and horizontal surfaces. The opposing thin-film pressure maintains
the bearing nominal gap tolerance. This design, in addition to
the large air-bearing surface that distributes the load over a
large surface area, results in a stage with outstanding stiffness
that is ideal for heavy or offset loading.
Proprietary manufacturing techniques result in a stage with unsurpassed
geometrical characteristics. The air bearing has an inherent averaging
effect that maximizes performance. The thin film will fill small
surface voids and allow for other irregularities. This characteristic
yields superior pitch, roll, yaw, straightness, and flatness specifications.
Linear Motor Drive
The driving force behind this stage is Aerotech’s BLM series
brushless linear servomotor. Aerotech’s long history and
experience as a motor manufacturer is reflected in this latest
design. The BLM utilizes an ironless forcer, which means there
is zero cogging and no attractive forces, resulting in unsurpassed
smoothness of motion. Capable of generating high force and velocity,
the BLM represents the ultimate combination of power and performance.
Zero Maintenance
Our totally noncontact air bearing, noncontact linear motor drive,
and noncontact feedback device ensure years of maintenance-free
operation at the high performance levels expected of Aerotech
equipment. Because there is no mechanical contact between moving
elements, the ABL/ABLH9000 experiences no wear or reduction in
performance over time. Service life is virtually unlimited and
since there is no lubrication – only clean, dry gas –
air bearings are ideal for cleanroom and medical applications.
Cable Management
We carefully optimize the cable bend radius to ensure years of
trouble-free operation. In the unlikely event of failure, Aerotech’s
modular design makes cable replacement quick and easy with minimal
downtime. To facilitate integration into the final system, we
include all customer-required cables, air hoses, etc. in our CMS
bundle. Both ends are fully connectorized for simple integration
into the customer’s machine.
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