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| Total Travel
|
300
mm x 300 mm |
500
mm x 500 mm |
750
mm x 750 mm |
1000
mm x 1000 mm |
1200
mm x 1200 mm |
| Drive System
|
Linear
Brushless Servomotor
(Bridge Axis: BLM-142-A,
Gantry Axis: BLM-142-A) |
Linear
Brushless Servomotor
(Bridge Axis: BLM-325-A,
Gantry Axis: BLMH-262-A) |
| Bus Voltage
|
up
to 160 VDC |
|
Continuous Current (Bridge Axis) |
Apk
|
up
to 3.10 A |
up
tp 6.20 A |
|
Arms |
up to 2.19 A |
up to 4.38 A |
|
Continuous Current (Gantry Axis) |
Apk |
up
to 3.10 A |
up
to 5.50 A |
|
Arms |
up to 2.19 A |
up to 3.89 A |
| Feedback
|
Noncontact
Linear Encoder |
| Resolution
|
1
nm - 1.0 μm |
| Maximum
Travel Speed(1) |
500
mm/s |
| Maximum
Acceleration (no load) |
1
g (10 m/s2) |
| Maximum Load(2) |
30.0
kg |
125.0
kg |
|
Accuracy(3) |
LN |
±0.5
μm |
±0.75
μm |
±0.85
μm |
±1.0
μm |
±1.25
μm |
|
LZR |
Standard ±10 ppm; Compensated
±1.5 ppm(4) |
Contact an Aerotech Application Engineer
for further details |
| Repeatability(3) |
LN |
±0.1
μm |
±0.2
μm |
| Straightness
and Flatness(5) |
Max Deviation
|
±0.5
μm |
±1.5
μm |
±2.0
μm |
±2.5
μm |
±3.0
μm |
| Pitch/Roll/Yaw
|
2
arc sec |
3.5
arc sec |
4.5
arc sec |
5.5
arc sec |
6
arc sec |
| Stage Mass
|
320
kg |
690.0
kg |
3200.0
kg |
4130.0
kg |
5200.0
kg |
|
Moving Mass |
Bridge |
9.5
kg |
35.0
kg |
|
Gantry |
44.0 kg |
57.0 kg |
120.0 kg |
130.0 kg |
140.0 kg |
| Orthogonality
|
2
arc sec |
3
arc sec |
3.5
arc sec |
4
arc sec |
5
arc sec |
| Operating
Pressure(6) |
551.6
kPa + 0, -34 kPa |
| Air Consumption(7)
|
45
SLPM |
85
SLPM |
| Material(8)
|
Aluminum
|
| Finish |
Hard
Coating (62 Rockwell Hardness ) |
Notes:
1. Maximum speed based on stage capability; maximum application
velocity may be limited by system data rate and system resolution.
2. Maximum load based on bearing capability; maximum application
load may be limited by acceleration requirements.
3. Available with Aerotech controllers and HALAR Calibration option.
4. Requires environmental compensation.
5. Requires HALSF option.
6. To protect air bearing against under-pressure, an in-line pressure
switch tied to motion controller E-stop input is recommended.
7. Air supply must be clean, dry to 0° F dewpoint and filtered
to 0.25 µm or better; recommend nitrogen at 99.9% purity.
8. Optional construction materials include ceramic, invar, stainless,
and titanium.
9. Specifications are for single-axis systems, measured 50 mm
above the tabletop. Performance of multi-axis systems is payload
and workpoint dependent. Consult factory for multi-axis or non-standard
applications.

Please contact an Aerotech Application Engineer for ordering
information on the ABL/ABLH9000 series.
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