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Total Travel |
350 mm x 350 mm |
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Drive System |
Linear Brushless Servomotor
(Bridge Axis: BLM-264-A, Gantry Axis: BLM-203-A) |
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Bus Voltage |
up to 160 VDC |
Continuous Current
(Bridge Axis) |
Apk |
up to 5.10 A |
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Arms |
up to 3.61 A |
Continuous Current
(Gantry Axis) |
Apk |
up to 5.30 A |
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Arms |
up to 3.75 A |
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Feedback |
Noncontact Linear Encoder (LT or LN) |
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Resolution |
0.0005 µm - 1.0 µm |
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Maximum Travel Speed(1) |
1000 mm/s |
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Maximum Acceleration (no load) |
1.0 g - 10 m/s2 |
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Maximum Load(2) |
30.0 kg |
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Accuracy(3) |
LT |
±1.5 µm |
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LN |
±1.0 µm |
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Repeatability(3) |
LT |
±0.5 µm |
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LN |
±0.2 µm |
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Straightness (Y Axis) |
Max Deviation |
0.6 µm |
| Flatness |
Max
Deviation |
0.6 µm |
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Pitch/Roll/Yaw |
3 arc sec |
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Stage Mass |
535 kg |
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Moving Mass |
Bridge |
9.7 kg |
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Gantry |
34.0 kg |
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Orthogonality |
2 arc sec |
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Operating Pressure(4) |
551.6 kPA +0, -34 kPa |
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Air Consumption(5) |
33 SLPM |
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Material(6) |
Aluminum |
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Finish |
Hard Coating (62 Rockwell Hardness ) |
Notes:
1. Maximum speed based on stage capability; maximum application
velocity may be limited by system data rate and system resolution.
2. Maximum load based on bearing capability; maximum application
load may be limited by acceleration requirements.
3. Available with Aerotech controllers and HALAR Calibration option.
4. To protect air bearing against under-pressure, an in-line pressure
switch tied to motion controller E-stop input is recommended.
5. Air supply must be clean, dry to 0° F dewpoint and filtered
to 0.25 µm or better; recommend nitrogen at 99.9% purity.
6. Optional construction materials include ceramic, invar, stainless,
and titanium.
7. Specifications are for single-axis systems, measured 50 mm
above the tabletop. Performance of multi-axis systems is payload
and workpoint dependent. Consult factory for multi-axis or non-standard
applications.
Please contact an Aerotech Application
Engineer for ordering information on the AHL9000.
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