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| Travel |
250 mm x 250 mm |
500 mm x 500 mm |
750 mm x 750 mm |
1000 mm x 1000 mm |
| Motor Type |
Linear Brushless Servomotor (Bridge Axis: BLM-264-A, Gantry
Axis: BLM-264-A) |
| Bus Voltage |
Up
to 320 VDC |
| Continuous
Current |
Apk |
5.10 |
| Arms |
3.61 |
| Encoder |
Non-contact linear encoder LT (20 µm fundamental) or
LN (4 µm fundamental) |
| Resolution |
0.005 µm - 1.0 µm (LT); 0.001 µm - 0.2 µm (LN) |
| Accuracy (1)(2) |
±2 µm (HALAR) |
| Repeatability
(Bi-Directional) |
±0.5 µm (HALAR) |
| Straightness(3) |
±1 µm |
±2 µm |
±2 µm |
±3 µm |
| Flatness(3) |
±4 µm |
±6 µm |
±12 µm |
±14 µm |
| Roll(3) |
±2 arc sec |
±3 arc sec |
±4 arc sec |
±5 arc sec |
| Pitch(3) |
±6 arc sec |
±8 arc sec |
±13 arc sec |
±15 arc sec |
| Yaw(3) |
±1 arc sec |
±2 arc sec |
±3 arc sec |
±4.5 arc sec |
| Maximum Speed
(4) |
1000 mm/s |
| Maximum Acceleration |
0.5
g - 5 m/s2 (193 in/s2) |
| Moving
Mass |
Bridge |
9 kg |
9 kg |
9 kg |
9 kg |
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Gantry |
64 kg |
70 kg |
77 kg |
84 kg |
| Orthogonality |
5 arc sec |
| Operating Pressure(5) |
80 psig +0 psig
-5 psig |
| Air Consumption(6) |
2.0 SCFM |
| Material |
Aluminum |
| Finish |
Hard Coating |
| Stage Mass (not
including risers or granite base) |
260 kg |
282 kg |
303 kg |
325 kg |
Notes:
1. Measured at center of travel.
2. Available with Aerotech motion controller.
3. Maximum application load may be limited by performance requirements;
no load specifications are shown.
4. Maximum speed based on stage capability; maximum application
velocity may be limited by system data rate and system resolution.
5. To protect air bearing against under-pressure, an in-line pressure
switch tied to E-stop input is recommended.
6. Air supply must be clean, dry to 0° F dewpoint and filtered
to 0.25 µm or better; recommend nitrogen at 99.9% purity.
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