| Total Travel |
500 mm x 500 mm
(20 in x 20 in) |
750 mm x 750 mm
(30 in x 30 in) |
1000 mm x 1000 mm
(40 in x 40 in) |
| Drive System |
Linear Brushless Servomotor — BLM-325-A (lower axis);
BLM-264-A (upper axis) |
| Feedback |
Noncontact Linear Encoder |
| Resolution(1) |
0.005 µm - 1.0 µm (0.2 µin - 40 µin) |
| Maximum Travel
Speed(2) |
3 m/s (120 in/s) |
| Maximum Linear
Acceleration |
3 g - 30 m/s2 (1152 in/s2) (no-load) |
| Maximum Load(3) |
25.0 kg (55.1 lb) |
Continuous
Force(4,5) |
Lower
Axis |
Air Cooling
(20 psi) |
316 N (70.9 lb) |
|
No Air |
246 N (55.3 lb) |
|
Upper Axis |
Air Cooling (20 psi) |
276 N (62.0 lb) |
|
No Air |
207 N (46.4 lb) |
|
Peak Force(5) |
Lower Axis |
1264 N (284 lb) |
|
Upper Axis |
1106 N (248 lb) |
| Accuracy(6)(7) |
±5.0 µm (±200 µin) |
| Repeatability |
±2.0 µm (±80 µin) |
| Orthogonality |
5 arc sec |
| Nominal System
Weight (Gantry only) |
131.0 kg (288.8 lb) |
179.0 kg (394.6 lb) |
227.0 kg (500.4 lb) |
| Material |
Aluminum |
|
Finish |
Stage |
Black Anodize |
|
Table |
Hard Coating (62 Rockwell hardness); ESD optional |